635-643An
automatic optical inspection system for the image quality and light field of a
microlens array is presented in this paper. For the inspection of microlens
array, XY-Table is used to the positioning of micro-lens array. With a He-Ne
laser beam as a probing light, the measured image will be shown on the screen.
A CCD camera captures the image of the screen and sends the data to the
computer to analyze the luminosity function and uniformity. The noise
disturbance of energy fluctuation of light field can be filtered by dividing
the reference light intensity by the measured value. The light field
measurement system checks the photometric quantity of each check point in
sequence by distributing check points and several quality parameters are made
for analysis to evaluate the uniformity of light field. The novel quality parameters are used to identify the quality of light
field and provide a further understanding of the performance of microlens
array