Optische und taktile Nanosensoren auf der Grundlage des Fokusverfahrens für die Anwendung in Nanopositionier- und Nanomessmaschinen

This dissertation concerns itself with a nanosensor system on the basis of a non-contact optical probe (basis sensor), which is possesses high resolution and low uncertainty. This nanosensor system is especially suited to completing measuring tasks in the Nanopositioning and Nanomeasuring Machine.A novel focus sensor was developed to form the basis for the nanosensor system. The working principle of this sensor is based on the focus measurement method from CD and DVD reader technology. The combination of both mechanical and optical probe principles in the nanosensor system is achieved using the developed focus sensor (basis sensor). For this the deflection of the contact probe (cantilever or stylus) is measured directly without contact using the focus sensor’s laser beam.The significant advantage of the developed nanosensor system stems from its modularity and versatility. Optical and mechanical probing methods are combined on the basis of a basis sensor, allowing the combination of various interactions between sensor and specimen.The dissertation presents the development and comprehensive investigation of the nanosensor system in combination with a digital camera microscope. The emphasis is on a detailed explanation of the structure, taking into account important metrological properties of the focus sensor as a basis sensor.Two tactile sensors using the nanosensor systems are presented: the focus stylus sensor and the focus AFM sensor. The design and metrological properties of these sensors are discussed and compared in detail.Several practical applications and measurement results are presented.       Ein Nanosensorsystem auf Basis eines berührungslosen optischen Antastsensors (Basissensors), das durch eine hohe Auflösung und geringe Messunsicherheit ausgezeichnet wird, ist das Thema vorliegender Dissertation. Dieses Nanosensorsystem ist vor allem auf Messanwendungen in der Nanopositionier- und Nanomessmaschine abgestimmt. Als Basissensor für das Nanosensorsystem wurde ein neuartiger Fokussensor entwickelt. Das Funktionsprinzip dieses Sensors beruht auf die Fokusmessmethode, die für die DVD- bzw. CD-Player-Technik entwickelt wurde. Die Anbindung beider mechanischen Antastprinzipien in das Nanosensorsystem wird jeweils mittels des entwickelten Fokussensors (Basissensors) erreicht. Dabei wird die Auslenkung der antastenden Messspitze (Cantilever bzw. Stylus) direkt berührungslos mit fokussiertem Laserstrahl des Fokussensors aufgenommen.Der große Vorteil des entwickelten Nanosensorsystems besteht in dessen Modularität und Vielseitigkeit. Auf der Grundlage eines Basissensors werden optische und mechanische Antastmethoden und somit unterschiedliche Wechselwirkungen zwischen Messobjekt und Sensor vereint.Die Dissertation legt die Entwicklung und umfassende Untersuchungen des Nanosensorsystems in Kombination mit einem Digitalkameramikroskop dar. Der Schwerpunkt bildet dabei detaillierte Erläuterung des Aufbaus und Betrachtung wichtiger messtechnischen Eigenschaften des Fokussensors als Basissensors.Es werden die taktilen Sensoren des aufgebauten Nanosensorsystems vorgestellt: der Fokus-Stylus-Sensor und der Fokus-AFM-Sensor. Hierbei werden konstruktive und messtechnische Eigenschaften dieser Sensoren detailliert behandelt und verglichen.Zahlreiche praktische Anwendungen und Messergebnisse werden präsentiert

High precision optical step detection

For a high precision positioning and measurement system high accuracy detection of surface specific profiles such as steps or edges is required. The interaction of light with microscopic structures results in typical diffraction pattern which contain information about the 3D-profile. In this work we investigate these diffraction images in view of wavelength and position dependence

Development of software and hardware for the method of rehabilitation of patients with obliteration of atherosclerosis of the limb vessels

The theme of the project proposal relates to scientific research in the field of health care and medical technologies on the basis of the further development and implementation of hardware software, smart sensors, the technique of processing, normalizing and applying of information signals for the creation of means for adjusting the physiological state of the human body by the electro stimulation, agreed in real-time mode with cardiac rhythm. Interest in this topic is due to the manifestation of increasing the duration of the active period in the lives of a number of dangerous diseases, which, in the first place, include diseases of the cardiovascular system. Often, the cause of such diseases is age-related changes, as well as non-future behavior and human habits: smoking, lack of physical activity, unhealthy eating and excessive alcohol. Changing behavior, a person can also reduce the risk of cardiovascular disease

Progress of nanopositioning and nanomeasuring machines for cross-scale measurement with sub-nanometre precision

Nanopositioning and nanomeasuring machines (NPM-machines), developed at Technische Universität Ilmenau, have provided high-precision measurement and positioning of objects across ten decades, from 20 pm resolution up to 200 mm measuring range. They work on the basis of the error-minimal, extended six degrees of freedom Abbe-comparator principle, with high-precision fibre-coupled laser interferometers and optical or atomic force probes. These machines are suitable not only for measuring but also for positioning with an outstanding sub-nanometre performance. Measurements on precision step heights up to 5 mm show a repeatability of 20 pm. Consecutive step positioning of 80 pm can be demonstrated. With the new approach of an atomic clock-stabilized He–Ne-laser via a high-stable-frequency comb, we achieve a frequency stability of less than 300 Hz, respectively 0.6 ċ 10−12 relative frequency stability within 1 h at an integration time of 1 s. For the first time, we can demonstrate a direct, permanent and unbroken chain of traceability between the laser interferometric measurement within an NPM-machine and a GPS satellite-based atomic clock. This paper presents a closer insight into the scientific and metrological background as well as unrivalled measurement results, and discusses the great possibilities of this new technology