Breakdown and recovery of thin gate oxides

Breakdown events are studied in varying test set-ups with a high time resolution. Often a partial recovery from breakdown is observed\ud within a few ms. Parameters such as device area, stress conditions and parasitic elements prohibit the recovery if they result in a high system impedance. The results suggest the existence of a highly conductive path that can be annihilated during breakdown

Spin wave emission by spin-orbit torque antennas

We study the generation of propagating spin waves in Ta/CoFeB waveguides by spin-orbit torque antennas and compare them to conventional inductive antennas. The spin-orbit torque was generated by a transverse microwave current across the magnetic waveguide. The detected spin wave signals for an in-plane magnetization across the waveguide (Damon-Eshbach configuration) exhibited the expected phase rotation and amplitude decay upon propagation when the current spreading was taken into account. Wavevectors up to about 6 rad/$\mu$m could be excited by the spin-orbit torque antennas despite the current spreading, presumably due to the non-uniformity of the microwave current. The relative magnitude of generated anti-damping spin-Hall and Oersted fields was calculated within an analytic model and it was found that they contribute approximately equally to the total effective field generated by the spin-orbit torque antenna. Due to the ellipticity of the precession in the ultrathin waveguide and the different orientation of the anti-damping spin-Hall and Oersted fields, the torque was however still dominated by the Oersted field. The prospects for obtaining a pure spin-orbit torque response are discussed, as are the energy efficiency and the scaling properties of spin-orbit torque antennas.Comment: 20 pages, 5 figure

Study of electron traps associated with oxygen superlattices in n‐type silicon

status: publishe

Excitation and propagation of spin waves in non-uniformly magnetized waveguides

The characteristics of spin waves in ferromagnetic waveguides with nonuniform magnetization have been investigated for situations where the shape anisotropy field of the waveguide is comparable to the external bias field. Spin-wave generation was realized by the magnetoelastic effect by applying normal and shear strain components, as well as by the Oersted field emitted by an inductive antenna. The magnetoelastic excitation field has a nonuniform profile over the width of the waveguide because of the nonuniform magnetization orientation, whereas the Oersted field remains uniform. Using micromagnetic simulations, we indicate that both types of excitation fields generate quantised width modes with both odd and even mode numbers as well as tilted phase fronts. We demonstrate that these effects originate from the average magnetization orientation with respect to the main axes of the magnetic waveguide. Furthermore, it is indicated that the excitation efficiency of the second-order mode generally surpasses that of the first-order mode due to their symmetry. The relative intensity of the excited modes can be controlled by the strain state as well as by tuning the dimensions of the excitation area. Finally, we demonstrate that the nonreciprocity of spin-wave radiation due to the chirality of an Oersted field generated by an inductive antenna is absent for magnetoelastic spin-wave excitation.Comment: 22 pages, 8 figure

Ni-Al alloys as alternative EUV mask absorber

Extreme ultraviolet (EUV) lithography is being industrialized as the next candidate printing technique for high-volume manufacturing of scaled down integrated circuits. At mask level, the combination of EUV light at oblique incidence, absorber thickness, and non-uniform mirror reflectance through incidence angle, creates photomask-induced imaging aberrations, known as mask 3D (M3D) effects. A possible mitigation for the M3D effects in the EUV binary intensity mask (BIM), is to use mask absorber materials with high extinction coefficient k and refractive coefficient n close to unity. We propose nickel aluminide alloys as a candidate BIM absorber material, and characterize them versus a set of specifications that a novel EUV mask absorber must meet. The nickel aluminide samples have reduced crystallinity as compared to metallic nickel, and form a passivating surface oxide layer in neutral solutions. Composition and density profile are investigated to estimate the optical constants, which are then validated with EUV reflectometry. An oxidation-induced Al L2 absorption edge shift is observed, which significantly impacts the value of n at 13.5 nm wavelength and moves it closer to unity. The measured optical constants are incorporated in an accurate mask model for rigorous simulations. The M3D imaging impact of the nickel aluminide alloy mask absorbers, which predict significant M3D reduction in comparison to reference absorber materials. In this paper, we present an extensive experimental methodology flow to evaluate candidate mask absorber materials

Growth of high quality InP layers in STI trenches on miscut Si (001) substrates

In this work, we report the selective area epitaxial growth of high quality InP in shallow trench isolation (STI) structures on Si (0 0 1) substrates 6° miscut toward (1 1 1) using a thin Ge buffer layer. We studied the impact of growth rates and steric hindrance effects on the nano-twin formation at the STI side walls. It was found that a too high growth rate induces more nano-twins in the layer and results in InP crystal distortion. The STI side wall tapering angle and the substrate miscut angle induced streric hindrance between the InP facets and the STI side walls also contribute to defect formation. In the [-1 1 0] orientated trenches, when the STI side wall tapering angle is larger than 10°, crystal distortion was observed while the substrate miscut angle has no significant impact on the InP defect formation. In the [-1 1 0] trenches, both the increased STI tapering angle and the substrate miscut angle induce high density of defects. With a small STI tapering angle and a thin Ge layer, we obtained extended defect free InP in the top region of the [1 1 0] trenches with aspect ratio larger than 2

The H2020 OCRE Project Opens the Gates of the Commercial Cloud and EO Services Usage to the Research Community

Cloud and Earth Observation (EO) based services offer the European Research community a wealth of powerful tools. However, for many researchers these tools are currently out of reach. It is difficult to find and select suitable services. Establishing agreements with cloud and EO service providers and ensuring legal and technical compliance requires specialist skills and takes an inordinate amount of time. Equally, service providers find it difficult to reach and meet the needs of the research community in technical, financial and legal areas. The Open Clouds for Research Environments consortium (OCRE) will change this, by putting in place an easy adoption route. In the autumn of 2019, OCRE will run a pan-European tender and establish framework agreements with service providers who meet the requirements of the research community. 10.000 European research and education institutes will be able to directly consume these offerings via the European Open Science Cloud service catalogue, through ready-to-use agreements. They will not have to run a tender of their own. In addition, to stimulate usage, OCRE will make available 9.5 million euro in service credits (vouchers), through adoption funds from the European Commission. OCRE is a pioneer project without precedence, with potentially high impact in the future EO market activities and evolution of service offering, with the objective to burst the usage of EO commercial services by the research environment