Laser Tabbed Die: A Repairable, High-Speed Die-Interconnection Technology. 1994 Ldrd Final Report 93-Sr-089

A unique technology for multichip module production is presented. The technology, called Laser Tabbed Die (L-TAB), consists of a method for forming surface-mount-type {open_quotes}gull wing{close_quotes} interconnects on bare dice. The dice are temporarily bonded to a sacrificial substrate which has a polymer thin film coated onto it. The gull wings are formed on the side of the die with a direct-write laser patterning process which allows vertical as well as horizontal image formation. Using the laser patterning system, trenches are formed in a positive electrodeposited photoresist (EDPR) which is plated onto a metal seed layer, allowing copper to be electroplated through the resultant mask. After stripping the resist and the metal seed layer, the polymer film on the substrate is dissolved, releasing the chip with the {open_quotes}gull wings{close_quotes} intact. The chips are then bonded onto a circuit board or permanent substrate with solder or conductive adhesive

Microrelay

Our goals in this project were to (1) develop a new design concept for a high reliability microrelay, (2) build a prototype, and (3) demonstrate high force relay closure in the prototype. During FY1999, we designed a microrelay to meet commercial specifications: 3 g (or 0.03 N) closure force and 30-mA actuation current at less than 0.5 V. Our microrelay not only occupies less than 1 mm{sup 3}--about 1% of the volume of the smallest commercial part--but also its fabrication takes advantage of semiconductor processing, which has the potential to automate microrelay production. Conventional relays are fabricated by assembling many discrete parts. The process includes a number of nonautomated assembly and inspection steps, which increase fabrication cost and limit possible size reductions. Microrelays based on electrostatic forces can be fabricated by thin-film techniques employed in the semiconductor industry; however, the voltages required to make reliable electrical contact in an electrostatic relay significantly increase the cost of the driver. Microrelays based on electromagnetic forces, on the other hand, provide reliable contacts at low voltage. Reliable metal-to-metal contacts require sufficient contact force to plastically deform contact surfaces at asperities-thereby increasing the contact area. On the other hand, contact metallurgy and the gaseous environment must be controlled to prevent contact welding, contamination, oxidation, and other effects that change contact resistance over time. A contact force of 3 g is commonly used with gold/gold-alloy contacts in a sealed relay (e.g., a reed relay). In this way, more than 10 million closures can be achieved with a resistance of less than 100 m{Omega}. Our prototype relay preserves the contact metallurgy of commercial relays. The fundamental innovation in the fabrication of our microrelay is the use of a 3-D lithographic process to create a ''winding'' around a discrete magnetic core. To achieve sufficient inductance to generate the desired contact force, we chose a discrete core of substantial cross section (about 0.3 mm{sup 2}). Because of the core thickness, thin films deposited on it cannot be patterned by conventional lithography but can be patterned by our 3-D process. The microrelay is formed on a single substrate so that critical core-to-armature distance can be precisely defined using a thin sacrificial layer. The initial separation of the core and armature is about 10 {micro}m. The issue of greatest significance to the performance of the relay is the dimensional precision of relay closure--the electrical contacts must touch when the armature and the core (which define the magnetic circuit) are separated by only 1 {micro}m. Defining a manufacturable process which can achieve this goal has been the triumph of this year's development effort. To define the design of our prototype microrelay, we performed both 1-D analytic and 3-D numerical modeling. Photos of the prototype in fabrication are shown in Figure 1. The prototype differed in a number of ways from the design due mainly to problems in fabricating the iron core. The prototype served its purpose, however, verifying the design concept and demonstrating the closure forces required

High-performance RF coil inductors on silicon

Strong demand for wireless communication devices has motivated research directed toward monolithic integration of transceivers. The fundamental electronic component least compatible with silicon integrated circuits is the inductor, although a number of inductors are required to implement oscillators, filters and matching networks in cellular devices. Spiral inductors have been integrated into the silicon IC metallization sequence but have not performed adequately due to coupling to the silicon which results in parasitic capacitance and loss. We have, for the first time, fabricated three dimensional coil inductors on silicon which have significantly lower capacitive coupling and loss and which now exceed the requirements of potential applications. Quality factors of 30 at 1 GHz have been measured in single turn devices and Q > 16 in 2 and 4 turn devices. The reduced Q for multiturn devices appears to be related to eddy currents in outer turns generated by magnetic fields from current in neighboring turns. Higher Q values significantly in excess of 30 are anticipated using modified coil designs

A Sub-Millimeter Solenoid Device for Trapping Paramagnetic Microbeads

We present the design and preliminary evaluation of a paramagnetic microsphere trapping and separation device consisting of a copper solenoid wrapped around a 1.3 mm diameter glass capillary. The magnetization and subsequent dipole-dipole interaction of paramagnetic spheres under an applied magnetic field results in the formation of bead chains that persist and grow under the applied field, but quickly disperse upon field removal. The chaining of paramagnetic spheres is important to the design of magnetic-based separation devices because the viscous-drag-limited velocities of chains are typically several times larger than that of individual particles. We have performed a set of experiments designed to evaluate the performance of a sub-millimeter solenoid device including measurements of the temperature versus field strength of the device, observations of the controlled chain formation process, and preliminary observations regarding the maximum flow rate over which the bead chains can be held in place by magnetic forces. These results are applicable to the design and characterization of magnetically induced microsphere trapping and separation systems which use pressure driven flow

Portable, Low-cost NMR with Laser-Lathe Lithography Produced

Nuclear Magnetic Resonance (NMR) is unsurpassed in its ability to non-destructively probe chemical identity. Portable, low-cost NMR sensors would enable on-site identification of potentially hazardous substances, as well as the study of samples in a variety of industrial applications. Recent developments in RF microcoil construction (i.e. coils much smaller than the standard 5 mm NMR RF coils), have dramatically increased NMR sensitivity and decreased the limits-of-detection (LOD). We are using advances in laser pantographic microfabrication techniques, unique to LLNL, to produce RF microcoils for field deployable, high sensitivity NMR-based detectors. This same fabrication technique can be used to produce imaging coils for MRI as well as for standard hardware shimming or 'ex-situ' shimming of field inhomogeneities typically associated with inexpensive magnets. This paper describes a portable NMR system based on a laser-fabricated microcoil and homebuilt probe design. For testing this probe, we used a hand-held 2 kg Halbach magnet that can fit into the palm of a hand, and an RF probe with laser-fabricated microcoils. The focus of the paper is on the evaluation of the microcoils, RF probe, and first generation gradient coils. The setup of this system, initial results, sensitivity measurements, and future plans are discussed. The results, even though preliminary, are promising and provide the foundation for developing a portable, inexpensive NMR system for chemical analysis. Such a system will be ideal for chemical identification of trace substances on site

Magnetic susceptibility measurements at high pressure using designer diamond anvils

High pressure magnetic susceptibility experiments can yield valuable insights into the changes in magnetic behavior and electron correlation properties which can accompany extreme compressions of matter. However, magnetic susceptibility experiments with ultrahigh pressure diamond anvil cells are extremely challenging due to the very small size of the high-pressure sample ͑Ϸ75 m diameter͒ and the difficulty of obtaining good coupling between the sample and the sensing coil. As a result, measurement sensitivity and poor signal-to-background ratios tend to be serious concerns which limit the applicability of these experiments. We present here a new approach to high-pressure ac magnetic susceptibility experiments that involve specially fabricated diamond anvils with diamond encapsulated sensing microcoils which are located just 10-20 m from the high-pressure sample. We also present some test results taken with a gadolinium sample in order to demonstrate the viability of this high-pressure ac susceptibility technique

Original scientific paper Qualitative TLC determination of some polycyclic aromatic

Abstract: The presence of polycyclic or polynuclear aromatic hydrocarbons (PAHs) were investigated in sugar-beet from a local sugar factory in the district of Vojvodina. The sugar-beet was cultivated on areas near roads with intensive traffic. The procedure for the preparation and determination of these compounds included saponification of the sample, several liquid–liquid extraction systems and a silica gel column clean-up. The purified sample solution was analysed by thin layer chromatography (TLC) on silica gel with cyclohexane as the developing solvent. Benzo(b)fluoranthene and benzo(a)anthracene and/or benzo(a)pyrene were detected at concentrations greater than the allowed limits in food

Endovascular Catheter for Magnetic Navigation under MR Imaging Guidance: Evaluation of Safety In Vivo at 1.5T

BACKGROUND AND PURPOSE: Endovascular navigation under MR imaging guidance can be facilitated by a catheter with steerable microcoils on the tip. Not only do microcoils create visible artifacts allowing catheter tracking, but also they create a small magnetic moment permitting remote-controlled catheter tip deflection. A side product of catheter tip electrical currents, however, is the heat that might damage blood vessels. We sought to determine the upper boundary of electrical currents safely usable at 1.5T in a coil-tipped microcatheter system. MATERIALS AND METHODS: Alumina tubes with solenoid copper coils were attached to neurovascular microcatheters with heat shrink-wrap. Catheters were tested in carotid arteries of 8 pigs. The catheters were advanced under x-ray fluoroscopy and MR imaging. Currents from 0 mA to 700 mA were applied to test heating and potential vascular damage. Postmortem histologic analysis was the primary endpoint. RESULTS: Several heat-mitigation strategies demonstrated negligible vascular damage compared with control arteries. Coil currents ≤300 mA resulted in no damage (0/58 samples) compared with 9 (25%) of 36 samples for > 300-mA activations (P = .0001). Tip coil activation ≤1 minute and a proximal carotid guide catheter saline drip > 2 mL/minute also had a nonsignificantly lower likelihood of vascular damage. For catheter tip coil activations ≤300 mA for ≤1 minute in normal carotid flow, 0 of 43 samples had tissue damage. CONCLUSIONS: Activations of copper coils at the tip of microcatheters at low currents in 1.5T MR scanners can be achieved without significant damage to blood vessel walls in a controlled experimental setting. Further optimization of catheter design and procedure protocols is necessary for safe remote control magnetic catheter guidance