Sputtering of pure boron using a magnetron without a radio-frequency supply

Boron at room temperature is insulating and therefore conventionally sputtered using radio-frequency power supplies including their power-matching networks. In this contribution, we show that through a suitable ignition assistance, via temporary application of a high voltage (∼600 V) to the substrate holder or auxiliary electrode, the magnetron discharge can be ignited using a conventional mid-frequency power supply without matching network. Once the discharge is ignited, the assisting voltage can be reduced to less than 50 V, and after the boron target surface is at elevated temperature, thereby exhibiting sufficient conductivity, the assisting voltage can be turned off. The deposition of boron and boron nitride films has been demonstrated with a deposition rate of approximately 400 nm/h for a power of 250 W

Opportunities for mesoscopics in thermometry and refrigeration: Physics and applications

This review presents an overview of the thermal properties of mesoscopic structures. The discussion is based on the concept of electron energy distribution, and, in particular, on controlling and probing it. The temperature of an electron gas is determined by this distribution: refrigeration is equivalent to narrowing it, and thermometry is probing its convolution with a function characterizing the measuring device. Temperature exists, strictly speaking, only in quasiequilibrium in which the distribution follows the Fermi-Dirac form. Interesting nonequilibrium deviations can occur due to slow relaxation rates of the electrons, e.g., among themselves or with lattice phonons. Observation and applications of nonequilibrium phenomena are also discussed. The focus in this paper is at low temperatures, primarily below 4 K, where physical phenomena on mesoscopic scales and hybrid combinations of various types of materials, e.g., superconductors, normal metals, insulators, and doped semiconductors, open up a rich variety of device concepts. This review starts with an introduction to theoretical concepts and experimental results on thermal properties of mesoscopic structures. Then thermometry and refrigeration are examined with an emphasis on experiments. An immediate application of solid-state refrigeration and thermometry is in ultrasensitive radiation detection, which is discussed in depth. This review concludes with a summary of pertinent fabrication methods of presented devices.Comment: Close to the version published in RMP; 59 pages, 35 figure

Controlled Transformation of Electrical, Magnetic and Optical Material Properties by Ion Beams

Key circumstance of radical progress for technology of XXI century is the development of a technique which provides controllable producing three-dimensional patterns incorporating regions of nanometer sizes and required physical and chemical properties. Our paper for the first time proposes the method of purposeful direct transformation of the most important substance physical properties, such as electrical, magnetic, optical and others by controllable modification of solid state atomic constitution. The basis of the new technology is discovered by us effect of selective atom removing out of thin di- and polyatomic films by beams of accelerated particles. Potentials of that technique have been investigated and confirmed by our numerous experiments. It has been shown, particularly, that selective atom removing allows to transform in a controllable way insulators into metals, non-magnetics into magnetics, to change radically optical features and some other properties of materials. The opportunity to remove selectively atoms of a certain sort out of solid state compounds is, as such, of great interest in creating technology associated primarily with needs of nanoelectronics as well as many other "nano-problems" of XXI century.Comment: 22 pages, PDF, 9 figure

languages in IBM

and descriptio

An Introduction to Array Logic

Abstract: After a discussion of the reasons for choosing to implement logic in array form. a detailed description of the nature of array logic is given. Topics specifically discussed include general array structures and implementation, influence of decoder partitioning