49 research outputs found

    Rutile formation and oxygen diffusion in oxygen-PIII treated Titanium

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    Rutile formation and oxygen diffusion in oxygen-PIII treated Titanium / G. Thorwarth, S. Mändl, B. Rauschenbach. – In: Surface and coatings technology. 136. 2001. S. 236-24

    Thin film deposition using energetic ions

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    One important recent trend in deposition technology is the continuous expansion of available processes towards higher ion assistance with the subsequent beneficial effects to film properties. Nowadays, a multitude of processes, including laser ablation and deposition, vacuum arc deposition, ion assisted deposition, high power impulse magnetron sputtering and plasma immersion ion implantation, are available. However, there are obstacles to overcome in all technologies, including line-of-sight processes, particle contaminations and low growth rates, which lead to ongoing process refinements and development of new methods. Concerning the deposited thin films, control of energetic ion bombardment leads to improved adhesion, reduced substrate temperatures, control of intrinsic stress within the films as well as adjustment of surface texture, phase formation and nanotopography. This review illustrates recent trends for both areas; plasma process and solid state surface processes. © 2010 by the authors

    Textured Titanium oxide thin films produced by vacuum arc deposition

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    Textured Titanium oxide thin films produced by vacuum arc deposition / S. Mändl, G. Thorwarth, B. Rauschenbach. – In: Surface and coatings technology. 133/134. 2000. S. 283-28

    Plasma immersion ion implantation using Titanium and oxygen ions

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    Plasma immersion ion implantation using Titanium and oxygen ions / G. Thorwarth, S. Mändl, B. Rauschenbach. – In: Surface and coatings technology. 128/129. 2000. S. 116-12

    Influence of ion energy on Titanium oxide formation by vacuum arc deposition and implantation

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    Influence of ion energy on Titanium oxide formation by vacuum arc deposition and implantation / G. Thorwarth ... – In: Nuclear instruments and methods in physics research. B. 178. 2001. S. 148-15
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