Analyse expérimentale et modélisation du dépôt de films de Ti-Si-N par pulvérisation réactive r.f. magnétron

Cette thèse a pour thème l'étude expérimentale et la modélisation du dépôt de films minces de Ti-Si-N par pulvérisation réactive r.f. magnétron. Ces couches minces sont élaborées par pulvérisation d'une cible de Ti5Si3 dans un mélange réactif argon/azote. L'objectif de cette étude est de caractériser à la fois le plasma, la pulvérisation et les films minces afin de déterminer l'influence de la puissance rf et du pourcentage d'azote dans le mélange sur la structure et les propriétés des films de Ti-Si-N. Enfin, on étudie les propriétés de barrière à la diffusion du cuivre de ces films minces de Ti-Si-N pour des applications microélectronique.NANTES-BU Sciences (441092104) / SudocSudocFranceF

Perovskite based solar cells fabricated in air and nitrogen ambients

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Development of stable perovskite solar cells processed in air

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Development of stable perovskite solar cells processed in air

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Influence of surface chemistry and point defects in TiN based electrodes on electrochemical capacitive storage activity

International audienceThe effect of surface chemistry of reactive sputtered TiN electrodes in the electrochemical capacitors (ECs) was investigated. The TiN films were produced on vertically aligned carbon nanotubes. X-ray photoelectron spectroscopy analysis revealed surface defects generation with no effect on morphology. Cyclic voltammetry experiments were performed in aqueous 0.5 M K2SO4 solution and 1 M Et4NBF4 ((tetraethylammonium tetrafluoroborate)) organic electrolyte. The presence of oxygen vacancies and Ti interstitials on the top surface layer lead to enhanced electrochemical capacitive charge storage. Such findings open the way to design nitride films with optimized surface chemistry for use in the ECs

Dual Gate Microsensors and Nanomaterials for Chemical Detection

New chemical sensors are developed for suitable applications in biochemistry and biology, especially for the easy measurement of low concentrations of chemical and biological elements in liquid media. Robust devices, able to detect a small charge variation, can be associated with nanomaterials on the active surface of the sensor. Sensors based on microelectronic technologies and having high sensitivities due to their specific Dual Gate structure are shown. We demonstrate that, under optimum polarization conditions, the sensor exhibits a high sensitivity for pH variations. The integration of several types of nanomaterials on the active surface of the microsensors is also demonstrated and validated for further biological detection

Micro-sensors nano-functionalized for chemical detection

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Wide variations of SiCxNy:H thin films optical constants deposited by H2/N2/Ar/hexamethyldisilazane microwave plasma

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Bottom gate field-effect transistor for sensor device

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Micro capteur nano-fonctionnalisé pour la détection biologique

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