4 research outputs found
Mid-infrared sub-wavelength grating mirror design: tolerance and influence of technological constraints
High polarization selective Si/SiO2 mid-infrared sub-wavelength grating
mirrors with large bandwidth adapted to VCSEL integration are compared. These
mirrors have been automatically designed for operation at \lambda = 2.3 m
by an optimization algorithm which maximizes a specially defined quality
factor. Several technological constraints in relation with the grating
manufacturing process have been imposed within the optimization algorithm and
their impact on the optical properties of the mirror have been evaluated.
Furthermore, through the tolerance computation of the different dimensions of
the structure, the robustness with respect to fabrication errors has been
tested. Finally, it appears that the increase of the optical performances of
the mirror imposes a less tolerant design with severer technological
constraints resulting in a more stringent control of the manufacturing process.Comment: The final publication is available at
http://iopscience.iop.org/2040-8986/13/12/125502