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Atomic-scale characterization of contact interfaces between thermally self-assembled Au islands and few-layer MoS2 surfaces on SiO2

The interaction between metallic nanoparticles and transition metal chalcogenides (TMDs) can realize new functionalities in thriving technologies such as optoelectronics and nanoengineering. Here we have investigated the self-assembly of triangular-shaped crystalline Au nanoislands on MoS2 flakes mechanically exfoliated or grown by chemical vapor deposition (CVD). The density and size of the islands are determined by substrate temperature, deposition flux, and subsurface morphology. The thickness of the MoS2 layers is measured by Raman spectroscopy, which also enables the evaluation of the strain and doping distributions induced by the Au islands. Top and cross-sectional images of the Au-MoS2 interface are obtained by scanning electron microscopy (SEM) and high-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM). Sub-nanometer resolution of the Au, Mo and S layers reveals that the MoS2 flakes follow the corrugation of the SiO2 substrate, with flattening and wrinkling effects induced by the growth of the Au islands on top