High Accuracy and Automatic Measurement of the Pattern Linewidth on Very Large Scale Integrated Circuits

High accuracy measurement of pattern linewidth is particularly important in Very Large Scale Integrated Circuits (VLSI) manufacturing. The measurement of pattern linewidth has been done by optical methods. However, the optical methods have several problems: as the measured value depends on slope angle at pattern edge, thickness and optical property of film and also substrate, there exists a large difference in size (0.3 μm) between the defined edge and the true edge in case of photoresist linewidth measurements. Especially, the optical methods have severe problems to measure bottom of pattern edge and are unsuitable to measure pattern linewidth in VLSI\u27s manufacturing. The secondary electron signal obtained by electron beam irradiation can be used to measure pattern linewidth with high accuracy. In order to avoid radiation damage and contamination during in-process measurement, low primary electron energy (1 keV) and low dosage of primary electrons (1X1020electrons/cm2) are used. As secondary electron signal includes much random noise, signal averaging and smoothing methods for random noise reduction are utilized. The automatic detection of bottom edge from secondary electron profile is achieved by detecting the increasing point of line profile which corresponds to the cross point of the average line and the slope line. The linewidths obtained by this method agree with the linewidths calculated from the pattern pitch of cross section image obtained by scanning electron microscopy(SEM) within the error of 0.04μm

Orbital Ordering in ferromagnetic Lu2V2O7

We have observed the orbital ordering in the ferromagnetic Mott-insulator Lu2V2O7 by the polarized neutron diffraction technique. The orbital ordering pattern determined from the observed magnetic form factors can be explained in terms of a linear combination of wave functions |yz>, |zx> and |xy>; |0> = (1/3)^(1/2) |xy> + (1/3)^(1/2)|yz> + (1/3)^(1/2) |zx> which is proportional to |(x + y + z)^2 - r^2>; where each orbital is extended toward the center-of-mass of the V tetrahedron. We discuss the stability of the ferromagnetic Lu2V2O7, using a Hubbard Hamiltonian with these three orbitals.Comment: 17pages. to be published in J. Phys. Soc. Jpn. 74 (2005

Thermally-induced magnetic phases in an Ising spin Kondo lattice model on a kagome lattice at 1/3-filling

Numerical investigation on the thermodynamic properties of an Ising spin Kondo lattice model on a kagome lattice is reported. By using Monte Carlo simulation, we investigated the magnetic phases at 1/3-filling. We identified two successive transitions from high-temperature paramagnetic state to a Kosterlitz-Thouless-like phase in an intermediate temperature range and to a partially disordered phase at a lower temperature. The partially disordered state is characterized by coexistence of antiferromagnetic hexagons and paramagnetic sites with period $\sqrt3 \times \sqrt3$. We compare the results with those for the triangular lattice case.Comment: 4 pages, 2 figure

Damage spreading in two dimensional geometrically frustrated lattices: the triangular and kagome anistropic Heisenberg model

The technique of damage spreading is used to study the phase diagram of the easy axis anisotropic Heisenberg antiferromagnet on two geometrically frustrated lattices. The triangular and kagome systems are built up from triangular units that either share edges or corners respectively. The triangular lattice undergoes two sequential Kosterlitz-Thouless transitions while the kagome lattice undergoes a glassy transition. In both cases, the phase boundaries obtained using damage spreading are in good agreement with those obtained from equilibrium Monte Carlo simulations.Comment: 7 pages, 4 figure

Frustration-induced Dodecamer Ordering in the Double-Exchange Spin Ice Model on the Kagom\'e Lattice

We investigate a detail of a dodecamer cluster ordering in a double-exchange spin ice model on a kagom\'e lattice. In frustrated systems, ordinary spin orderings are suppressed and macroscopic degeneracy remains down to low temperatures. In some frustrated systems, the degeneracy is lifted due to residual interactions and cluster orderings are stabilized. In the present model, the spin ice state is first formed at intermediate temperatures, and further entropies are released at lower temperatures as the dodecamer phase emerges. Since the spin symmetry is not broken in the dodecamer phase, there still exists macroscopic degeneracy. At further low temperatures, a possible spin ordering due to inter-dodecamer interactions is proposed. We discuss that such a multiple-site clustering larger than a bond-pair might be generic to frustrated systems where macroscopic degeneracy is lifted by residual interactions.Comment: 18 pages, 11 figure

The effect of coating properties on the performance of a-C:H and ta-C films

DLC films cover a wide range of different carbon based coatings, starting from soft to extremely hard diamond-like carbon films. In this study two different types of DLC films have been studied in respect of their stress and strain characteristics and tribological performance. The coatings are hydrogenated amorphous carbon (a-C:H) coatings deposited by PECVD and tetrahedral amorphous carbon (ta-C) coating deposited by filtered arc technique. In order to evaluate the mechanical behaviour of the coatings under load, 3D FE modelling was carried out in combination with scratch testing. Also the tribological performance was evaluated with pin-on-disc tests using stepwise increasing normal load. The 3D FEM model was developed for calculating the stress and strain distributions of DLC coated systems and to evaluate how coating thickness and elastic properties affect the stress-strain state at crack initiation location. The simulation was compared to the findings to experimental observations in scratch test contact conditions, when the spherical diamond tip was moving with increased load on a coated surface. The coating performance was evaluated with scratch testing to detect the crack generation as well as the coating adhesion. When combining the simulated coating characteristics with empirical observation of coating fracture patterns the coating fracture performance and tolerance to cracking could be evaluated. A major effect of the coating elastic modulus on the stress and fracture behaviour of the coatings was observed. In the tribological testing the both coatings had a low friction performance. In the tribological testing with stepwise increasing load, the critical load for coating delamination was higher for the a-C:H coating, which is in accordance with the results of FE modelling of coating stress state

Anisotropic Release of the Residual Zero-point Entropy in the Spin Ice Compound Dy2Ti2O7: Kagome-ice Behavior

We report the specific heat and entropy of single crystals of the spin ice compound Dy2Ti2O7 at temperatures down to 0.35 K. We apply magnetic fields along the four characteristic directions: [100], [110], [111] and [112]. Because of Ising anisotropy, we observe anisotropic release of the residual zero-point entropy, attributable to the difference in frustration dimensionality. In the high magnetic field along these four directions, the residual entropy is almost fully released and the activation entropy reaches Rln2. However, in the intermediate field region, the entropy in fields along the [111] direction is different from those for the other three field directions. For the [111] direction the frustration structure changes from that of three-dimensional(3D) pyrochlore to that of two-dimensional(2D) Kagome-like lattice with constraint due to the ice rule, leading to different values of zero-point entropy.Comment: 4 pages, 4 figures, to appear in Phys. Rev.