Nanofabrication with Pulsed Lasers

An overview of pulsed laser-assisted methods for nanofabrication, which are currently developed in our Institute (LP3), is presented. The methods compass a variety of possibilities for material nanostructuring offered by laser–matter interactions and imply either the nanostructuring of the laser-illuminated surface itself, as in cases of direct laser ablation or laser plasma-assisted treatment of semiconductors to form light-absorbing and light-emitting nano-architectures, as well as periodic nanoarrays, or laser-assisted production of nanoclusters and their controlled growth in gaseous or liquid medium to form nanostructured films or colloidal nanoparticles. Nanomaterials synthesized by laser-assisted methods have a variety of unique properties, not reproducible by any other route, and are of importance for photovoltaics, optoelectronics, biological sensing, imaging and therapeutics

Photon assisted CVD

Various aspects of photon-matter interactions are discussed in the frame of applications to chemical vapor deposition processes. Based on the examples of carbon and tungsten deposition, the influences of photon sources like lamps, pulsed- or cw-lasers on the deposition mechanisms are outlined. Peculiarities arising from the different interactions of photons with the gas phase and/or the substrate surface and their effect on the compositional or structural characteristics of the deposited material are described