21 research outputs found
Voting Power in the EU Council of Ministers and Fair Decision Making in Distributive Politics
Een kader voor de organisatie van vraaggestuurde ondersteuning voor mensen met een handicap en hun omgeving. Onderzoek in opdracht van het Vlaams Fonds voor Sociale Integratie van Personen met een Handicap
Centrum voor Orthopedagogiek.status: publishe
Bottom-ARC optimization methodology for 0.25 mu m lithography and beyond
This paper reports on an optimization methodology for BARC/resist processes in order to obtain best CD-control on various substrate topographies. A selection of resist and BARC materials is studied by means of simulations and experiments. Two BARC properties, turned out to be of major importance: planarization effects on topography and etch behaviour. The topography itself is very important too: step height and lateral dimensions have a severe influence on CD control. Based on a new evaluation technique, the use of topographical swing curves, the optimum thickness of the BARC layer and of the resist layer are determined