Development of optical wave guides by sol-gel techniques for laser patterning

ORMOCERs with high optical performance and chemical stability are synthesized via the sol-gel process. Methacrylate group substitutated silanes are copolymerized with methacrylic acid which acts as a chemical link between Zr as second inorganic network former. Chemical stable complex formation is proved by IR analysis and 13C NMR investigations. This material is laser patternable by the addition of a suitable photoinitiator and is characerized by high dielectric strength and low optical loss for applications in opticsl and non-linear optics

Organic-inorganic composite materials : optical properties of laser patterned and protective coated waveguides

A composite material based on organically modified Si alkoxides and modified alkoxides from Zr were prepared. The index of refraction of the system was tailored by the variation of the modified Zr component. Channel waveguides were prepared by a laserwriting technique based on the ability to photopolymerize this material. To decrease optical loss caused by effects of the waveguide surface and to be independent of the used substrate, a buffer layer and a protective layer of the same material of lower index of refraction was combined with a waveguiding film and optical losses were determined

Entwicklung und Integration eines Hochratensputterprozesses für Blei-Zirkonat-Titanat-Dünnschichten

Compared to aluminium nitride and zinc oxide, lead zirconate titanate (PZT) has superior piezoelectric properties and is therefore of great interest in microsystems technology. This Paper describes the synthesis of functional piezoelectric PZR thin films using so-called gasflow sputtering (GFS) technique. In addition to other advantages, the GFS process features a very high deposition rate compared to conventional PZT sputter processes. For the characterization of deposited PZT films a series of analysis methods was applied to describe both the properties and the piezoelectric behavior demonstrating the potential of these PZT layers