34 research outputs found
Recent Developments with Respect to the Automated Processing and Analysis of Engineering Survey Data
Contact-free investigation of the EL2-defect in the surface of GaAs wafers
The EL2 as the most important intrinsic defect in semi-insulating
GaAs was already deeply studied in the past. All investigation
methods applied so far to semi-insulating GaAs explore the entire
depth of the sample and are therefore not suitable to analyse
e.g. influences of surface treatments. In this work the detection
of EL2 in the surface of samples by the application of microwave
detected photo induced current transient spectroscopy will be
presented. A correlation between height and sign of the signals
and the concentration of acceptors, furthermore of the compensation
ratio of the EL2, the position of the Fermi level as well as
the specific resistivity was found. The results can be simulated
by solving rate equations for the measurement process
Two-dimensional imaging of O2, H2O2, and glucose distributions by an array of 400 individually addressable microelectrodes
A monolithic array of 400 individually addressable microelectrodes was fabricated in a modified CMOS process. The platinum electrodes, each 36 µm x 36 µm in size, were arranged in a square matrix of overall area 1 cm². Individual addressing of each electrode in the array was realized by two on-chip shift registers coupled with array control logic. In the electrochemical scanning mode, the 400 electrode signals were read successively. The array was used in supporting electrolyte solutions for imaging of oxygen distributions detected amperometrically at -0.8 V vs Ag/AgCl. Hydrogen peroxide and glucose distributions were imaged amperometrically at +0.8 V vs Ag/AgCl. Prior to imaging glucose distributions, the enzyme glucose oxidase was entrapped into the conducting polymer polypyrrole siumultaneously on all array electrodes. Two minutes was needed for a successive readout of all 400 microelectrode signals