A modified squeeze equation for predicting the filling ratio of nanoimprint lithography

Abstract A numerical method using the modified squeeze model is proposed in this paper in order to overcome the limitation of the established squeeze equation and obtain filling ratios for nanoimprint lithography (NIL). Because the imprinting velocity is overestimated when the ratio of indenter width to polymer thickness is close to unity, the modified equation is critical. For verification, the numerical results are compared with the experimental data according to the various stamp geometries and pressure variation rates, for which a maximum difference of 10% is indicated. Based on these results, additional studies are conducted using the modified squeeze equation in order to obtain filling ratios according to the polymer thickness and temperature. The filling rates are enhanced through the increases in the temperature and the polymer thickness. The results demonstrate that the modified squeeze equation can be used to obtain and predict the filling ratio of sub-nanoscale NIL fabrication. It is expected that this study will assist in optimizing the experimental conditions and approaches for roll-to-roll NIL and step-and-flash NIL