125 research outputs found
Dynamic and Static Transmission Electron Microscopy Studies on Structural Evaluation of Au nano islands on Si (100) Surface
Transmission electron microscopy (TEM) study on morphological changes in gold
nanostructures deposited on Si (100) upon annealing under different vacuum
conditions has been reported. Au thin films of thickness ~2.0 nm were deposited
under high vacuum condition (with the native oxide at the interface of Au and
Si) using thermal evaporation. In-situ, high temperature (from room temperature
(RT) to 850\degreeC) real time TEM measurements showed the evaluation of gold
nanoparticles into rectangular/square shaped gold silicide structures. This has
been attributed to selective thermal decomposition of native oxide layer.
Ex-situ annealing in low vacuum (10-2 mbar) at 850\degreeC showed no growth of
nano-gold silicide structures. Under low vacuum annealing conditions, the
creation of oxide could be dominating compared to the decomposition of oxide
layers resulting in the formation of barrier layer between Au and Si.Comment: 15 pages, 4 figure
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