Using Cross-Linked SU-8 to Flip-Chip Bond, Assemble, and Package MEMS Devices

This paper investigates using an SU-8 photoresist as an adhesive material for flip-chip bonding, assembling, and packaging microelectromechanical systems devices. An important factor, when using SU-8 as an adhesive material is to control ultraviolet (UV) exposure during fabrication to maximize bond strength due to material cross linking. This approach is much improved over previous efforts where SU-8 bake times and temperatures where changed to alter material cross-linking. In this paper, bake times and temperatures were maintained constant and total UV exposure energy was varied. Once fabricated, bond strength was systematically tested to determine the tensile loads needed to separate bonded structures. The resulting separation force was shown to increase with UV exposure and ranged from 0.25 (5-s exposure) to 1.25 N (15-s exposure). The separation test data were then analyzed to determine the statistical significance of varying UV exposure time and its effect on SU-8 cross-linking and bond strength. The data show that total UV exposure dose is directly correlated with the bond strength of SU-8 bonded structures. By varying only UV dose, the separation force data exhibited a statistically significant dependence on SU-8 cross linking with a 5% probability of error. Further, SU-8 etch resiliency increased by approximately 40%-60% as cross linking was increased with UV exposures ranging from 5 to 15 s

Neutral buoyancy test evaluation of hardware and extravehicular activity procedures for on-orbit assembly of a 14 meter precision reflector

A procedure that enables astronauts in extravehicular activity (EVA) to perform efficient on-orbit assembly of large paraboloidal precision reflectors is presented. The procedure and associated hardware are verified in simulated Og (neutral buoyancy) assembly tests of a 14 m diameter precision reflector mockup. The test article represents a precision reflector having a reflective surface which is segmented into 37 individual panels. The panels are supported on a doubly curved tetrahedral truss consisting of 315 struts. The entire truss and seven reflector panels were assembled in three hours and seven minutes by two pressure-suited test subjects. The average time to attach a panel was two minutes and three seconds. These efficient assembly times were achieved because all hardware and assembly procedures were designed to be compatible with EVA assembly capabilities

Integrating Nanosphere Lithography in Device Fabrication

This paper discusses the integration of nanosphere lithography (NSL) with other fabrication techniques, allowing for nano-scaled features to be realized within larger microelectromechanical system (MEMS) based devices. Nanosphere self-patterning methods have been researched for over three decades, but typically not for use as a lithography process. Only recently has progress been made towards integrating many of the best practices from these publications and determining a process that yields large areas of coverage, with repeatability and enabled a process for precise placement of nanospheres relative to other features. Discussed are two of the more common self-patterning methods used in NSL (i.e. spin-coating and dip coating) as well as a more recently conceived variation of dip coating. Recent work has suggested the repeatability of any method depends on a number of variables, so to better understand how these variables affect the process a series of test vessels were developed and fabricated. Commercially available 3-D printing technology was used to incrementally alter the test vessels allowing for each variable to be investigated individually. With these deposition vessels, NSL can now be used in conjunction with other fabrication steps to integrate features otherwise unattainable through current methods, within the overall fabrication process of larger MEMS devices. Patterned regions in 1800 series photoresist with a thickness of ~700nm are used to capture regions of self-assembled nanospheres. These regions are roughly 2-5 microns in width, and are able to control the placement of 500nm polystyrene spheres by controlling where monolayer self-assembly occurs. The resulting combination of photoresist and nanospheres can then be used with traditional deposition or etch methods to utilize these fine scale features in the overall design

Enhancing the thermal performance of temporary fabric structures for the advanced energy efficient shelter system

The focus of this research is to characterize the thermal load on temporary fabric shelters deployed in the Middle East in order to establish realistic contract specification for the thermal performance of future shelters. Three different testing methods were utilized to evaluate shelter thermal performance. Small-scale tests allowed for economical comparisons of different shelter materials and configurations

Design and Analysis of Novel Ge-GeTe PN Junction for Photovoltaics

The continuing rise in demand for energy places a similarly increasing demand to improve power production methods and efficiency. In regards to solar power generation, one major limiting factor with existing photovoltaic (PV) systems is the management of heat produced and photon interactions with the PV device. Typical devices operate within the 300-1000 nm range of the solar spectrum, greatly limiting the range of photons used for power generation. Furthermore, since infrared light

PVDF-TrFE Electroactive Polymer Mechanical-to-Electrical Energy Harvesting Experimental Bimorph Structure

Research of electrostrictive polymers has generated new opportunities for harvesting energy from the surrounding environment and converting it into usable electrical energy. Electroactive polymer (EAP) research is one of the new opportunities for harvesting energy from the natural environment and converting it into usable electrical energy. Piezoelectric ceramic based energy harvesting devices tend to be unsuitable for low-frequency mechanical excitations such as human movement. Organic polymers are typically softer and more flexible therefore translated electrical energy output is considerably higher under the same mechanical force. In addition, cantilever geometry is one of the most used structures in piezoelectric energy harvesters, especially for mechanical energy harvesting from vibrations. In order to further lower the resonance frequency of the cantilever microstructure, a proof mass can be attached to the free end of the cantilever. Mechanical analysis of an experimental bimorph structure was provided and led to key design rules for post-processing steps to control the performance of the energy harvester. In this work, methods of materials processing and the mechanical to electrical conversion of vibrational energy into usable energy were investigated. Materials such as polyvinyledenedifluoridetetra-fluoroethylene P(VDF-TrFE) copolymer films (1um thick or less) were evaluated and presented a large relative permittivity and greater piezoelectric β-phase without stretching. Further investigations will be used to identify suitable micro-electromechanical systems (MEMs) structures given specific types of low-frequency mechanical excitations (10-100Hz)

Standardized Testing of Non-Standard Photovoltaic Pavement Surfaces

Emerging photovoltaic products have expanded the applications for the technologies into markets previously unconsidered for what was thought to be a delicate electronic product. One company leading this effort, Solar Roadways, Incorporated, is producing pavement replacing photovoltaic systems and proposing their use in everything from sidewalks to runways. Current pavement testing methods cannot be applied to these non-homogenous structures to identify if they can support the required loads. However, the standards called out specifically for pavements may be able to be translated to these products and their non-homogenous structures and non-standard materials to identify if they are able to perform similarly to standard pavements. This research modified existing test standards in several ways: rigid pavements standards for advanced loading, structural adhesive standards for shear loading, structure specific standards for moisture conditioning, and application specific standards for freeze/thaw cycling. These modifications are due to the fact that the materials in these emerging products do not have established tests to evaluate their performance in non-traditional applications. The future of electronics is dependent on product unique applications. This, in turn, requires finding methods of testing them based on application, extrapolation, or correlation to traditional material testing which enables faster product development and subsequent roll out

Design of FerroElectric MEMS energy harvesting devices

Waste heat is a widely available but little used source of power. Converting a thermal gradient into electricity is conventionally done using the Seebeck effect, but devices that use this effect are naturally inefficient. An alternate approach uses microelectromechanical systems (MEMS) to generate movement and time-varying temperature from a constant temperature gradient. Ferroelectric materials can harvest electricity from moving structures and temperature variations. This concept was realized using traditional silicon microprocessing techniques. A silicon on insulator (SOI) wafer was backside Deep Reactive Ion Etched (DRIE) to form a one mm2 by 7 micron thick silicon/silicon dioxide membrane. Lead zirconate titanate (PZT) was deposited on the membrane and acts as a ferroelectric material. Heating the bulk of the SOI substrate causes an increase in stress and upward deflection of the membrane. The membrane then enters into contact with a cold sink fixed above the substrate. Cooling of the membrane from contact with the cold sink causes actuation downwards of the membrane. The alternating heating and cooling of the PZT layer generates electricity from the pyroelectric effect. The actuation of the membrane generates stress on the PZT layer resulting in electricity from the piezoelectric effect

Electrostrictive Polymers for Mechanical-to-Electrical Energy Harvesting

Research of electrostrictive polymers has generated new opportunities for harvesting energy from the surrounding environment and converting it into usable electrical energy. Piezoelectric ceramic based devices have long been used in energy harvesting for converting mechanical motion to electrical energy. Nevertheless, those materials tend to be unsuitable for low-frequency mechanical excitations such as human movement. Since organic polymers are typically softer and more flexible, the translated electrical energy output is considerably higher under the same mechanical force. Currently, investigations in using electroactive polymers for energy harvesting, and mechanical-to-electrical energy conversion, are beginning to show potential for this application. In this paper we discuss methods of energy harvesting using membrane structures and various methods used to convert it into usable energy. Since polymers are typically used in capacitive energy harvesting designs, the uses of polymer materials with large relative permittivities have demonstrated success for mechanical to electrical energy conversion. Further investigations will be used to identify suitable micro-electro mechanical systems (MEMs) structures given specific types of low-frequency mechanical excitations (10-100Hz)