Improving wafer-scale Josephson junction resistance variation in superconducting quantum coherent circuits

Quantum bits, or qubits, are an example of coherent circuits envisioned for next-generation computers and detectors. A robust superconducting qubit with a coherent lifetime of $O$(100 $\mu$s) is the transmon: a Josephson junction functioning as a non-linear inductor shunted with a capacitor to form an anharmonic oscillator. In a complex device with many such transmons, precise control over each qubit frequency is often required, and thus variations of the junction area and tunnel barrier thickness must be sufficiently minimized to achieve optimal performance while avoiding spectral overlap between neighboring circuits. Simply transplanting our recipe optimized for single, stand-alone devices to wafer-scale (producing 64, 1x1 cm dies from a 150 mm wafer) initially resulted in global drifts in room-temperature tunneling resistance of $\pm$ 30%. Inferring a critical current $I_{\rm c}$ variation from this resistance distribution, we present an optimized process developed from a systematic 38 wafer study that results in $<$ 3.5% relative standard deviation (RSD) in critical current ($\equiv \sigma_{I_{\rm c}}/\left\langle I_{\rm c} \right\rangle$) for 3000 Josephson junctions (both single-junctions and asymmetric SQUIDs) across an area of 49 cm$^2$. Looking within a 1x1 cm moving window across the substrate gives an estimate of the variation characteristic of a given qubit chip. Our best process, utilizing ultrasonically assisted development, uniform ashing, and dynamic oxidation has shown $\sigma_{I_{\rm c}}/\left\langle I_{\rm c} \right\rangle$ = 1.8% within 1x1 cm, on average, with a few 1x1 cm areas having $\sigma_{I_{\rm c}}/\left\langle I_{\rm c} \right\rangle$ $<$ 1.0% (equivalent to $\sigma_{f}/\left\langle f \right\rangle$ $<$ 0.5%). Such stability would drastically improve the yield of multi-junction chips with strict critical current requirements.Comment: 10 pages, 4 figures. Revision includes supplementary materia

Phase-locking transition in a chirped superconducting Josephson resonator

By coupling a harmonic oscillator to a quantum system it is possible to perform a dispersive measurement that is quantum non-demolition (QND), with minimal backaction. A non-linear oscillator has the advantage of measurement gain, but what is the backaction? Experiments on superconducting quantum bits (qubits) coupled to a non-linear Josephson oscillator have thus far utilized the switching of the oscillator near a dynamical bifurcation for sensitivity, and have demonstrated partial QND measurement. The detailed backaction associated with the switching process is complex, and may ultimately limit the degree to which such a measurement can be QND. Here we demonstrate a new dynamical effect in Josephson oscillators by which the bifurcation can be accessed without switching. When energized with a frequency chirped drive with an amplitude close to a sharp, phase-locking threshold, the oscillator evolves smoothly in one of two diverging trajectories - a pointer for the state of a qubit. The observed critical behavior agrees well with theory and suggests a new modality for quantum state measurement.Comment: 5 pages, 4 figure

1/f noise of Josephson-junction-embedded microwave resonators at single photon energies and millikelvin temperatures

We present measurements of 1/f frequency noise in both linear and Josephson-junction-embedded superconducting aluminum resonators in the low power, low temperature regime - typical operating conditions for superconducting qubits. The addition of the Josephson junction does not result in additional frequency noise, thereby placing an upper limit for fractional critical current fluctuations of $10^{-8}$ (Hz$^{-1/2}$) at 1 Hz for sub-micron, shadow evaporated junctions. These values imply a minimum dephasing time for a superconducting qubit due to critical current noise of 40 -- 1400 $\mu$s depending on qubit architecture. Occasionally, at temperatures above 50 mK, we observe the activation of individual fluctuators which increase the level of noise significantly and exhibit Lorentzian spectra

Quantum Fluctuations in the Chirped Pendulum

An anharmonic oscillator when driven with a fast, frequency chirped voltage pulse can oscillate with either small or large amplitude depending on whether the drive voltage is below or above a critical value-a well studied classical phenomenon known as autoresonance. Using a 6 GHz superconducting resonator embedded with a Josephson tunnel junction, we have studied for the first time the role of noise in this non-equilibrium system and find that the width of the threshold for capture into autoresonance decreases as the square root of T, and saturates below 150 mK due to zero point motion of the oscillator. This unique scaling results from the non-equilibrium excitation where fluctuations, both quantum and classical, only determine the initial oscillator motion and not its subsequent dynamics. We have investigated this paradigm in an electrical circuit but our findings are applicable to all out of equilibrium nonlinear oscillators.Comment: 5 pages, 4 figure