Verfahren zur Herstellung von piezokeramischen Mikroformteilen

A process was developed, in which piezoceramic micro-components can be produced directly from liquid lead-zirconate-titanate (PZT) precursors. The sols are synthesized by a modified sol-gel-technique and can be additionally hardenable by photo-induced polymerisation. Electrophoretic deposition (EPD) is used as shaping method. By this process, piezoceramic components for applications in microsystem technology can be produced The process is devided into the sol-synthesis and then the direct electrophoretic deposition of the sols into a microstructured PMMA-mould followed by drying and de-moulding of the shaped gel-body. After pyrolysing the organics and sintering, microstructured piezoceramic components are obtained. The advantage of this new direct shaping process in contrast to the conventional way of using suspensions of ceramic powders, which are then shaped e.d. by pressing, lies in the elimination of several process steps. (orig.)SIGLEAvailable from FIZ Karlsruhe / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekDEGerman

Micro-fabrication of ceramics : additive manufacturing and conventional technologies

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