ТЕХНОЛОГИИ ФОРМИРОВАНИЯ НАНОРАЗМЕРНЫХ СТРУКТУР ДЛЯ ПРИМЕНЕНИЯ В ДИСПЛЕЙНЫХ И ОПТИЧЕСКИХ УСТРОЙСТВАХ

The electroplating technology of composite nanostructured coatings for advanced optical systems is described. Preparation of patterned profiles and substrates by codeposition process with inert nanoparticles is represented. Trenches coated with nanocomposite materials are investigated, as well as the influence of technological conditions on the properties of the coatings. The prospects of these materials and technologies for advanced applications such as roll-to-roll technology (holographic matrixes), nanoimprint, optical retarders and nanograting, polarizers, functional optical layers, microoptoelectromechanical systems are considered.Рассмотрены технологии электроосаждения наноструктурированых покрытий для решения проблем наноформирования сложных современных оптических систем. Описывается получение пленок на основе различных металлов и их соосаждение с частицами дисперсной фазы. Исследованы особенности заполнения наноразмерных окон, а также влияние технологических режимов на свойства полученных покрытий. Описаны перспективы применения этих материалов и технологий в современных комплексных системах, таких как голографические матрицы, поляризаторы, оптические функциональные слои, фазовые пластины (Optical Retarders), микрооптоэлектромеханические системы (МОЭМС)

APPLICATIONS OF UV-LIGA AND GRAYSCALE LITHOGRAPHY FOR DISPLAY TECHNOLOGIES

In the article MEMS technologies for display production and application presented. UV-LIGA and greyscale lithography based on SU-8 resist approaches were shown. Methods, technologies and structures of heterogeneous materials with soft magnetic properties, pros and cons are discussed. Unique specific parameters of soft magnetic composite material were achieved: magnetic induction of saturation – 2,1 Т, working frequency range – up to 1 MHz, permeability – up to 3000, total loss – 8 W/kg, Curie temperature – above 800 ºС. Electroplating allows deposition of soft magnetic alloys on the conductive substrate. Metals like Fe, Ni, Co with additives like B, P were used to get the best soft magnetic properties. Special codeposition process was developed to allow insertion of soft magnetic composite powder filaments into soft magnetic matrix formed during. It allows developing magnetic micromotors for display production. Simulation of the hybrid step micromotors was carried out in Ansys Maxwell 19. It was demonstrated that it is possible to get 10 mN m tourqe under 25 μm rotor-stator air gap. Only presented microtechnologies can provide such accuracy of the mciromotors elements. As for greyscale photolithography, special grey mask were developed and it was demonstrated the possibility to produce controllable real 3D relief on the SU-8 photoresist. Thus, microtechnologies should be integrated into display technology to provide cost effective production and advanced properties of final products.In the article MEMS technologies for display production and application presented. UV-LIGA and greyscale lithography based on SU-8 resist approaches were shown. Methods, technologies and structures of heterogeneous materials with soft magnetic properties, pros and cons are discussed. Unique specific parameters of soft magnetic composite material were achieved: magnetic induction of saturation – 2,1 Т, working frequency range – up to 1 MHz, permeability – up to 3000, total loss – 8 W/kg, Curie temperature – above 800 ºС. Electroplating allows deposition of soft magnetic alloys on the conductive substrate. Metals like Fe, Ni, Co with additives like B, P were used to get the best soft magnetic properties. Special codeposition process was developed to allow insertion of soft magnetic composite powder filaments into soft magnetic matrix formed during. It allows developing magnetic micromotors for display production. Simulation of the hybrid step micromotors was carried out in Ansys Maxwell 19. It was demonstrated that it is possible to get 10 mN m tourqe under 25 μm rotor-stator air gap. Only presented microtechnologies can provide such accuracy of the mciromotors elements. As for greyscale photolithography, special grey mask were developed and it was demonstrated the possibility to produce controllable real 3D relief on the SU-8 photoresist. Thus, microtechnologies should be integrated into display technology to provide cost effective production and advanced properties of final products

Applications of UV-LIGA and grayscale lithography for display technologies

In the article MEMS technologies for display production and application presented. UV-LIGA and greyscale lithography based on SU-8 resist approaches were shown. Methods, technologies and structures of heterogeneous materials with soft magnetic properties, pros and cons are discussed. Unique specific parameters of soft magnetic composite material were achieved: magnetic induction of saturation – 2,1 Т, working frequency range – up to 1 MHz, permeability – up to 3000, total loss – 8 W/kg, Curie temperature – above 800 єС. Electroplating allows deposition of soft magnetic alloys on the conductive substrate. Metals like Fe, Ni, Co with additives like B, P were used to get the best soft magnetic properties. Special codeposition process was developed to allow insertion of soft magnetic composite powder filaments into soft magnetic matrix formed during. It allows developing magnetic micromotors for display production. Simulation of the hybrid step micromotors was carried out in Ansys Maxwell 19. It was demonstrated that it is possible to get 10 mN m tourqe under 25 μm rotor-stator air gap. Only presented microtechnologies can provide such accuracy of the mciromotors elements. As for greyscale photolithography, special grey mask were developed and it was demonstrated the possibility to produce controllable real 3D relief on the SU-8 photoresist. Thus, microtechnologies should be integrated into display technology to provide cost effective production and advanced properties of final products

Electromagnetic MEMS motors for display technologies

The fourth revolution of the industry is powered by a wide range breakthrough, new technology, innovative ideas and creative activities. All these things were naturally born, mostly, by the interdisciplinary science and technology. Soft magnetic composites are the bright example of the different technologies integration to get final commercial technologies to get the final products with enhanced properties. Micro displacement and micro positioning became a very important factor for new display technologies such as inkjet, 3D printing, nanoimprint. New generation of technologies allows increasing productivity and improving quality. MEMS micromotors are the core of such instruments for display production

Electrochemical codeposition of nanostructured materials for highly reliable systems

This paper describes one of the approaches to solve the problem of wear and friction of mechanically moving and load carrying elements of micro and nano dimensions. The electrochemical electroplating technology of metals and alloys with inert hard nanoparticles is presented. Codeposition model of nanocomposite plating is developed. The influence of process parameters on the mechanical properties of particle-reinforced coatings is described. The use of nanocomposite materials to improve the mechanical properties of micro and nano components in modern integrated systems is investigated. The outlook of these materials and technologies for advanced micro- and nanoelectromechanical systems of high reliability and their application is considered. A method for manufacturing of holographic films with high runability for roll- to-roll technology is described

TECHNOLOGIES OF NANOSIZED STRUCTURES FOR DISPLAY AND OPTICAL APPLICATIONS

The electroplating technology of composite nanostructured coatings for advanced optical systems is described. Preparation of patterned profiles and substrates by codeposition process with inert nanoparticles is represented. Trenches coated with nanocomposite materials are investigated, as well as the influence of technological conditions on the properties of the coatings. The prospects of these materials and technologies for advanced applications such as roll-to-roll technology (holographic matrixes), nanoimprint, optical retarders and nanograting, polarizers, functional optical layers, microoptoelectromechanical systems are considered