12 research outputs found

    POLY(P-PHENYLENE VINYLENE) AND ACENE BASED SEMICONDUCTING MATERIALS

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    Ph.DDOCTOR OF PHILOSOPH

    Dual-Mode Gas Sensor Composed of a Silicon Nanoribbon Field Effect Transistor and a Bulk Acoustic Wave Resonator: A Case Study in Freons

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    In this paper, we develop a novel dual-mode gas sensor system which comprises a silicon nanoribbon field effect transistor (Si-NR FET) and a film bulk acoustic resonator (FBAR). We investigate their sensing characteristics using polar and nonpolar organic compounds, and demonstrate that polarity has a significant effect on the response of the Si-NR FET sensor, and only a minor effect on the FBAR sensor. In this dual-mode system, qualitative discrimination can be achieved by analyzing polarity with the Si-NR FET and quantitative concentration information can be obtained using a polymer-coated FBAR with a detection limit at the ppm level. The complementary performance of the sensing elements provides higher analytical efficiency. Additionally, a dual mixture of two types of freons (CFC-113 and HCFC-141b) is further analyzed with the dual-mode gas sensor. Owing to the small size and complementary metal-oxide semiconductor (CMOS)-compatibility of the system, the dual-mode gas sensor shows potential as a portable integrated sensing system for the analysis of gas mixtures in the future

    A Highly Sensitive Humidity Sensor Based on Ultrahigh-Frequency Microelectromechanical Resonator Coated with Nano-Assembled Polyelectrolyte Thin Films

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    We developed a highly sensitive humidity sensor based on the combination of ultrahigh-frequency film bulk acoustic resonator (FBAR) and nano-assembled polyelectrolyte (PET) thin films. The water molecule absorption efficiency was optimized by forming loosely-packed PET nanostructures. Then, the humidity sensing characteristics were analyzed in terms of sensitivity, linearity, reversibility, stability and detection limit. As a result, PET-coated FBAR exhibits excellent humidity sensitivity of 2202.20 Hz/ppm, which is five orders of magnitude higher than quartz crystal microbalance (QCM). Additionally, temperature dependence was investigated with the result that PET-coated FBAR possessed a higher sensitivity at low temperature. Furthermore, we realized the selective detection of water vapor from volatile organic compounds (VOCs) with respect to the polarity property. Owing to the high sensitivity, miniaturized size and ultrahigh operating frequency, PET-coated FBAR is uniquely favorable as a wireless humidity sensor node to integrate into wireless sensor networks (WSNs)

    Detection of Volatile Organic Compounds Using Microfabricated Resonator Array Functionalized with Supramolecular Monolayers

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    This paper describes the detection of volatile organic compounds (VOCs) using an e-nose type integrated microfabricated sensor array, in which each resonator is coated with different supramolecular monolayers: <i>p</i>-<i>tert</i>-butyl calix[8]­arene (Calix[8]­arene), 2,3,7,8,12,13,17,18-octaethyl-21H,23H-porphine (Porphyrin), β-cyclodextrin (β-CD), and cucurbit[8]­uril (CB[8]). Supramolecular monolayers fabricated by Langmuir–Blodgett techniques work as specific sensing interface for different VOCs recognition which increase the sensor selectivity. Microfabricated ultrahigh working frequency film bulk acoustic resonator (FBAR) transducers (4.4 GHz) enable their high sensitivity toward monolayer gas sensing which facilitate the analyses of VOCs adsorption isotherms and kinetics. Two affinity constants (<i>K</i><sub>1</sub>, <i>K</i><sub>2</sub>) are obtained for each VOC, which indicate the gas molecule adsorption happen inside and outside of the supramolecular cavities. Additional kinetic information on adsorption and desorption rate constants (<i>k</i><sub>a</sub>, <i>k</i><sub>d</sub>) are obtained as well from exponential fitting results. The five parameters, one from the conventional frequency shift signals of mass transducers and the other four from the indirect analyses of monolayer adsorption behaviors, thus enrich the sensing matrix (Δ<i>f</i>, <i>K</i><sub>1</sub>, <i>K</i><sub>2</sub>, <i>k</i><sub>a</sub>, <i>k</i><sub>d</sub>) which can be used as multiparameter fingerprint patterns for highly selective detection and discrimination of VOCs

    Tuning the Resonant Frequency of Resonators Using Molecular Surface Self-assembly Approach

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    In this work, a new method to tune the resonant frequency of microfabricated resonator using molecular layer-by-layer (LbL) self-assembly approach is demonstrated. By simply controlling the polymer concentration and the number of layers deposited, precisely tuning the frequency of microfabricated resonators is realized. Due to its selective deposition through specific molecular recognitions, such technique avoids the high-cost and complex steps of conventional semiconductor fabrications and is able to tune individual diced device. Briefly, film bulk acoustic resonator (FBAR) is used to demonstrate the tuning process and two types of LbL deposition methods are compared. The film thickness and morphology have been characterized by UV–vis reflection spectra, ellipsometer and AFM. As a result, the maximum resonant frequency shift of FBAR reaches more than 20 MHz, meaning 1.4% tunability at least. The minimum frequency shift is nearly 10 kHZ per bilayer, indicating 7 ppm tuning resolution. Pressure cooker test (PCT) is performed to evaluate the reliability of LbL coated FBAR. Furthermore, applications for wireless broadband communication and chemical sensors of LbL coated FBAR have been demonstrated
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