Effect of layer thickness on thermal properties of multilayer thin films produced by PVD

Cr/CrN/CrAlN, CrN/CrAlN and Cr/CrN thin layers were deposited by PVD (Physical Vapor Deposition). The multilayers were obtained from the combined deposition of different layers Cr, CrN and CrAlN thick films on on AISI4140 steel and silicon substrates at 200 °C, and evaluated with respect to fundamental properties such as structure and thermal properties. Cr, CrN and CrAlN single layers were also prepared for comparison purposes. The structural and morphological properties of PVD layers were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM) coupled with EDS + WDS microanalyses, stresses were determined by the Newton’s rings methods using the Stoney’s equation and surface hardening and hardness profiles were evaluated by micro hardness measurements. The XRD data and HRTEM showed that both the Cr/CrN, CrN/CrAlN and Cr/CrN/CrAlN multilayer coatings exhibited B1NaCl structure with a prominent reflection along (200) plane, and CrAlN sub-layer microstructures composed of nanocrystallites uniformly embedded in an amorphous matrix. The innovation of this work was to use the thickness of three different coating types to determine the thermal properties. Furthermore, an empirical equation was developed for the thermal properties variations with temperature of AISI4140 steel coated with different multilayer coatings. The thermal conductivity of CrAlN single layered was lower than the multilayer and the bulk material AISI4140. Moreover, the influences of structure and composition of the multilayer coatings on the thermal properties are discussed. The thermal conductivity of nanoscale thin film is remarkably lower than that of bulk materials because of its various size effects.The authors wish to thank the Regional Council of Burgundy and EGIDE for their financial support, and also the technical staff of the Arts et Métiers ParisTech of Cluny: especially Romaric Masset and Pierre-Michel Barbier for the samples preparation

Experimental investigation of the mechanical micro structural and thermal properties of thin CrAIN layers deposited by PVD technique for various aluminum percentages

The thin film of chromium nitride and their derivatives obtained by the filing process physical vapor deposition attract more and more attention from industry given their high resistance to wear. This quality of these coatings may be linked to their good mechanical and tribological properties. Several experimental investigations have led to the development of CrAlN (Chronium Aluminum Nitride) hard coatings by varying the aluminum target bias voltage, in preference to the traditional CrN coating. The present work is based on the investigation of physical and mechanical properties of CrAlN coating deposited on a silicon substrate and the effect of the aluminum proportion on their variation. The results demonstrate that variation in aluminum proportion alters the resulting columnar morphology, porosity and the thermal properties. The correlation between aluminum proportions in CrAlN coatings and his thermal properties revealed that the conductivity and the diffusivity are influenced primarily by size and shape distribution of the pores and secondarily by decrease of the stitch parameter dimension

Effect of layer thickness on thermal properties of multilayer thin films produced by PVD

Cr/CrN/CrAlN, CrN/CrAlN and Cr/CrN thin layers were deposited by PVD (Physical Vapor Deposition). The multilayers were obtained from the combined deposition of different layers Cr, CrN and CrAlN thick films on on AISI4140 steel and silicon substrates at 200 °C, and evaluated with respect to fundamental properties such as structure and thermal properties. Cr, CrN and CrAlN single layers were also prepared for comparison purposes. The structural and morphological properties of PVD layers were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM) coupled with EDS + WDS microanalyses, stresses were determined by the Newton’s rings methods using the Stoney’s equation and surface hardening and hardness profiles were evaluated by micro hardness measurements. The XRD data and HRTEM showed that both the Cr/CrN, CrN/CrAlN and Cr/CrN/CrAlN multilayer coatings exhibited B1NaCl structure with a prominent reflection along (200) plane, and CrAlN sub-layer microstructures composed of nanocrystallites uniformly embedded in an amorphous matrix. The innovation of this work was to use the thickness of three different coating types to determine the thermal properties. Furthermore, an empirical equation was developed for the thermal properties variations with temperature of AISI4140 steel coated with different multilayer coatings. The thermal conductivity of CrAlN single layered was lower than the multilayer and the bulk material AISI4140. Moreover, the influences of structure and composition of the multilayer coatings on the thermal properties are discussed. The thermal conductivity of nanoscale thin film is remarkably lower than that of bulk materials because of its various size effects.The authors wish to thank the Regional Council of Burgundy and EGIDE for their financial support, and also the technical staff of the Arts et Métiers ParisTech of Cluny: especially Romaric Masset and Pierre-Michel Barbier for the samples preparation

Etude des propriétés microstructurales, mécaniques, thermiques et de la porosité des couches minces de CrAlN déposées par PVD sous différents pourcentages d’aluminium

Several experimental investigations have led to the development of CrAlN (Chrome Aluminum Nitride) hard coatings by varying the aluminum target bias voltage, in preference to the traditional CrN coating. The present work enabled characterisation by physical and mechanical techniques (XRD, AFM, MEB, nano-indentation, Young’s modulus, thermal propriety, Stress, porosity, etc.). Moreover, in order to find improved the adhesion of the different deposition condition of the coatings. The results obtained in this work demonstrate that variation in proportion to aluminum alter the resulting columnar morphology and porosity of the coatings. The thermal properties and the physical property are greatly affected by these morphological alterations. The comparison between the different coating microstructures of CrAlN coatings (columnar and fine-grained) reveals advantages for the fine-grained structure. The results are better wear protection and less profile deviation. Correlation between aluminum proportions in CrAlN coatings and his thermal properties revealed that the conductivity and the diffusivity are influenced primarily by size and shape distribution of the pores and secondarily by decrease of the stitch parameter dimension

Experimental investigation of the mechanical micro structural and thermal properties of thin CrAIN layers deposited by PVD technique for various aluminum percentages

The thin film of chromium nitride and their derivatives obtained by the filing process physical vapor deposition attract more and more attention from industry given their high resistance to wear. This quality of these coatings may be linked to their good mechanical and tribological properties. Several experimental investigations have led to the development of CrAlN (Chronium Aluminum Nitride) hard coatings by varying the aluminum target bias voltage, in preference to the traditional CrN coating. The present work is based on the investigation of physical and mechanical properties of CrAlN coating deposited on a silicon substrate and the effect of the aluminum proportion on their variation. The results demonstrate that variation in aluminum proportion alters the resulting columnar morphology, porosity and the thermal properties. The correlation between aluminum proportions in CrAlN coatings and his thermal properties revealed that the conductivity and the diffusivity are influenced primarily by size and shape distribution of the pores and secondarily by decrease of the stitch parameter dimension

Investigation of vanadium and nitride alloys thin layers deposited by PVD

Lien vers la version éditeur: http://dx.doi.org/10.1051/epjconf/20122900042In this work we present the technique of magnetron vapor deposition and the effect of several deposition parameters on the structural and morphological properties of prepared thin films. It was noted that the deposition time has an effect on the crystallinity, mechanical properties such as residual stress, roughness surface and the layer composition from target products. Studies were carried out on layers of vanadium (V) and the nitride vanadium (VN)

Porosity - Process, Technologies and Applications

This book discusses multiways in the porous materials. It involves materials with a large number of holes, and it highlights the synthesis, structure, and surface properties of porous materials closely related to more applications, such as support, catalyst, energy storage, chemical reactions, and optical applications. It studies the effect of the filling materials, the thermal treatments, and the porous density in the improvement of physical properties, electrical and energy efficiency, and the generation of new materials. Some synthetic process will be discussed with the effect of some parameters on the final characteristics of the prepared porous structures

Etude des propriétés microstructurales, mécaniques, thermiques et de la porosité des couches minces de CrAlN déposées par PVD sous différents pourcentages d’aluminium

Several experimental investigations have led to the development of CrAlN (Chrome Aluminum Nitride) hard coatings by varying the aluminum target bias voltage, in preference to the traditional CrN coating. The present work enabled characterisation by physical and mechanical techniques (XRD, AFM, MEB, nano-indentation, Young’s modulus, thermal propriety, Stress, porosity, etc.). Moreover, in order to find improved the adhesion of the different deposition condition of the coatings. The results obtained in this work demonstrate that variation in proportion to aluminum alter the resulting columnar morphology and porosity of the coatings. The thermal properties and the physical property are greatly affected by these morphological alterations. The comparison between the different coating microstructures of CrAlN coatings (columnar and fine-grained) reveals advantages for the fine-grained structure. The results are better wear protection and less profile deviation. Correlation between aluminum proportions in CrAlN coatings and his thermal properties revealed that the conductivity and the diffusivity are influenced primarily by size and shape distribution of the pores and secondarily by decrease of the stitch parameter dimension