Correction of pattern size deviations in the fabrication of photomasks made with a laser direct-writer

When using Heidelberg DWL66+ laser writer to fabricate the photomask, the pattern feature dimensions may have deviations. These deviations can be caused by the lithography process and the undercut in the metal etch process. The same deviation value of 0.8µm was found to appear in all the patterns independent of the pattern original size and local pattern density. To overcome this universal deviation, a universal bias is suggested to be applied to the original patterns during the data preparation for the lithography process. In order to ensure this pre-exposure bias method can work, both the laser direct-write exposure conditions (laser power, filters, focus parameters) and the metal etch time should be kept consistent

NuSTAR Hard X-ray View of Low-luminosity Active Galactic Nuclei: High-energy Cutoff and Truncated Thin Disk

We report the analysis of simultaneous XMM-Newton+NuSTAR observations of two low-luminosity Active Galactic Nuclei (LLAGN), NGC 3998 and NGC 4579. We do not detect any significant variability in either source over the ~3 day length of the NuSTAR observations. The broad-band 0.5-60 keV spectrum of NGC 3998 is best fit with a cutoff power-law, while the one for NGC 4579 is best fit with a combination of a hot thermal plasma model, a power-law, and a blend of Gaussians to fit an Fe complex observed between 6 and 7 keV. Our main spectral results are the following: (1) neither source shows any reflection hump with a $3\sigma$ reflection fraction upper-limits $R<0.3$ and $R<0.18$ for NGC 3998 and NGC 4579, respectively; (2) the 6-7 keV line complex in NGC 4579 could either be fit with a narrow Fe K line at 6.4 keV and a moderately broad Fe XXV line, or 3 relatively narrow lines, which includes contribution from Fe XXVI; (3) NGC 4579 flux is 60% brighter than previously detected with XMM-Newton, accompanied by a hardening in the spectrum; (4) we measure a cutoff energy $E_{\rm cut}=107_{-18}^{+27}$ keV in NGC 3998, which represents the lowest and best constrained high-energy cutoff ever measured for an LLAGN; (5) NGC 3998 spectrum is consistent with a Comptonization model with either a sphere ($\tau\approx3\pm1$) or slab ($\tau\approx1.2\pm0.6$) geometry, corresponding to plasma temperatures between 20 and 150 keV. We discuss these results in the context of hard X-ray emission from bright AGN, other LLAGN, and hot accretion flow models.Comment: 14 pages, 11 figures, 4 tables, accepted for publication in Ap

Steady-state dynamic behavior of an auxiliary bearing supported rotor system

This paper investigates the steady-state responses of a rotor system supported by auxiliary bearings in which there is a clearance between the rotor and the inner race of the bearing. A simulation model based upon the rotor of a production jet engine is developed and its steady-state behavior is explored over a wide range of operating conditions for various parametric configurations. Specifically, the influence of rotor imbalance, support stiffness, and damping is studied. It is found that imbalance may change the rotor responses dramatically in terms of frequency contents at certain operating speeds. Subharmonic responses of 2nd order through 10th order are all observed except the 9th order. Chaotic phenomenon is also observed. Jump phenomena (or double-valued responses) of both hard-spring type and soft-spring type are shown to occur at low operating speeds for systems with low auxiliary bearing damping or large clearance even with relatively small imbalance. The effect of friction between the shaft and the inner race of the bearing is also discussed

Functional photoacoustic tomography for non-invasive imaging of cerebral blood oxygenation and blood volume in rat brain in vivo

Based on the multi-wavelength laser-based photoacoustic tomography, non-invasive in vivo imaging of functional parameters, including the hemoglobin oxygen saturation and the total concentration of hemoglobin, in small-animal brains was realized. The high sensitivity of this technique is based on the spectroscopic differences between oxy- and deoxy-hemoglobin while its spatial resolution is bandwidth-limited by the photoacoustic signals rather than by the optical diffusion as in optical imaging. The point-by-point distributions of blood oxygenation and blood volume in the cerebral cortical venous vessels, altered by systemic physiological modulations including hyperoxia, normoxia and hypoxia, were visualized successfully through the intact skin and skull. This technique, with its prominent intrinsic advantages, can potentially accelerate the progress in neuroscience and provide important new insights into cerebrovascular physiology and brain function that are of great significance to the neuroscience community

Deep penetrating photoacoustic tomography in biological tissues

Photoacoustic tomography (PAT) in a circular scanning configuration was developed to image the deeply embedded optical heterogeneity in biological tissues. Based on the intrinsic contrast between blood and chicken breast muscle, an embedded blood object that was 5 cm deep in the tissue was detected using pulsed laser light at a wavelength of 1064 nm. Compared with detectors for flat active surfaces, cylindrically focused ultrasonic transducers can reduce the interference generated from the off-plane photoacoustic sources and make the image in the scanning plane clearer. While the optical penetration was optimized with near-infrared laser pulses of 800 nm in wavelength, the optical contrast was enhanced by indocyanine green (ICG) whose absorption peak matched the laser wavelength. This optimized PAT was able to image fine objects embedded at a depth of up to 5.2-cm, which is 6.2 times the 1/e optical penetration depth, in chicken breast muscle, at a resolution of < ~750 microns with a sensitivity of <7 pmol of ICG in blood. The resolution was found to deteriorate slowly with increasing imaging depth