A Fully Parameterized Fem Model for Electromagnetic Optimization of an RF Mems Wafer Level Package

In this work, we present a fully parameterized capped transmission line model for electromagnetic optimization of a wafer level package (WLP) for RF MEMS applications using the Ansoft HFSS-TM electromagnetic simulator. All the degrees of freedom (DoF's) in the package fabrication can be modified within the model in order to optimize for losses and mismatch (capacitive and inductive couplings) introduced by the cap affecting the MEMS RF behaviour. Ansoft HFSS-TM was also validated for the simulation of capped RF MEMS devices by comparison against experimental data. A test run of capped 50 transmission lines and shorts was fabricated and tested.Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing

Parasitic Effects Reduction for Wafer-Level Packaging of RF-Mems

In RF-MEMS packaging, next to the protection of movable structures, optimization of package electrical performance plays a very important role. In this work, a wafer-level packaging process has been investigated and optimized in order to minimize electrical parasitic effects. The RF-MEMS package concept used is based on a wafer-level bonding of a capping silicon substrate to an RF-MEMS wafer. The capping silicon substrate resistivity, substrate thickness and the geometry of through-substrate electrical interconnect vias have been optimized using finite-element electromagnetic simulations (Ansoft HFSS). Test structures for electrical characterization have been designed and after their fabrication, measurement results will be compared with simulations.Comment: Submitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions

Flux Loop Measurements of the Magnetic Flux Density in the CMS Magnet Yoke

The Compact Muon Solenoid (CMS) is a general purpose detector, designed to run at the highest luminosity at the CERN Large Hadron Collider (LHC). Its distinctive features include a 4 T superconducting solenoid with 6-m-diameter by 12.5-m-length free bore, enclosed inside a 10,000-ton return yoke made of construction steel. The return yoke consists of five dodecagonal three-layered barrel wheels and four end-cap disks at each end comprised of steel blocks up to 620 mm thick, which serve as the absorber plates of the muon detection system. To measure the field in and around the steel, a system of 22 flux loops and 82 3-D Hall sensors is installed on the return yoke blocks. A TOSCA 3-D model of the CMS magnet is developed to describe the magnetic field everywhere outside the tracking volume measured with the field-mapping machine. The first attempt is made to measure the magnetic flux density in the steel blocks of the CMS magnet yoke using the standard magnet discharge with the current ramp down speed of 1.5 A/s.Comment: 7 pages, 5 figures, presented at ISCM2016 - 5th International Conference on Superconductivity and Magnetism on April 28, 2016 at Fethiye, Turke

Measuring the Magnetic Flux Density with Flux Loops and Hall Probes in the CMS Magnet Flux Return Yoke

The Compact Muon Solenoid (CMS) is a general purpose detector, designed to run at the highest luminosity at the CERN Large Hadron Collider (LHC). Its distinctive features include a 4 T superconducting solenoid with 6-m-diameter by 12.5-m-length free bore, enclosed inside a 10,000-ton return yoke made of construction steel. The flux return yoke consists of five dodecagonal three-layered barrel wheels and four end-cap disks at each end comprised of steel blocks up to 620 mm thick, which serve as the absorber plates of the muon detection system. To measure the field in and around the steel, a system of 22 flux loops and 82 3-D Hall sensors is installed on the return yoke blocks. A TOSCA 3-D model of the CMS magnet is developed to describe the magnetic field everywhere outside the tracking volume that was measured with the field-mapping machine. The voltages induced in the flux loops by the magnetic flux changing during the CMS magnet standard ramps down are measured with six 16-bit DAQ modules. The off-line integration of the induced voltages reconstructs the magnetic flux density in the yoke steel blocks at the operational magnet current of 18.164 kA. The results of the flux loop measurements during three magnet ramps down are presented and discussed.Comment: 3 pages, 6 figures, presented at the IEEE Nuclear Science Symposium 2016 (NSS) in Strasbourg, France on November 3, 2016. arXiv admin note: text overlap with arXiv:1605.0877

Measuring the Magnetic Flux Density in the CMS Steel Yoke

The Compact Muon Solenoid (CMS) is a general purpose detector, designed to run at the highest luminosity at the CERN Large Hadron Collider (LHC). Its distinctive features include a 4 T superconducting solenoid with 6-m-diameter by 12.5-m-length free bore, enclosed inside a 10000-ton return yoke made of construction steel. The return yoke consists of five dodecagonal three-layered barrel wheels and four end-cap disks at each end comprised of steel blocks up to 620 mm thick, which serve as the absorber plates of the muon detection system. Accurate characterization of the magnetic field everywhere in the CMS detector is required. To measure the field in and around the steel, a system of 22 flux-loops and 82 3-D Hall sensors is installed on the return yoke blocks. Fast discharges of the solenoid (190 s time-constant) made during the CMS magnet surface commissioning test at the solenoid central fields of 2.64, 3.16, 3.68 and 4.01 T were used to induce voltages in the flux-loops. The voltages are measured on-line and integrated off-line to obtain the magnetic flux in the steel yoke close to the muon chambers at full excitations of the solenoid. The 3-D Hall sensors installed on the steel-air interfaces give supplementary information on the components of magnetic field and permit to estimate the remanent field in steel to be added to the magnetic flux density obtained by the voltages integration. A TOSCA 3-D model of the CMS magnet is developed to describe the magnetic field everywhere outside the tracking volume measured with the field-mapping machine. The results of the measurements and calculations are presented, compared and discussed.Comment: 9 pages, 7 figures, 16 references, presented at the III International Conference on Superconductivity and Magnetism (ICSM-2012), Kumburgaz, Istanbul, Turkey, 29 April - 4 May 201

Validation of the CMS Magnetic Field Map

The Compact Muon Solenoid (CMS) is a general purpose detector, designed to run at the highest luminosity at the CERN Large Hadron Collider (LHC). Its distinctive features include a 4 T superconducting solenoid with 6-m-diameter by 12.5-m-length free bore, enclosed inside a 10,000-ton return yoke made of construction steel. The return yoke consists of five dodecagonal three-layered barrel wheels and four end-cap disks at each end comprised of steel blocks up to 620 mm thick, which serve as the absorber plates of the muon detection system. To measure the field in and around the steel, a system of 22 flux loops and 82 3-D Hall sensors is installed on the return yoke blocks. A TOSCA 3-D model of the CMS magnet is developed to describe the magnetic field everywhere outside the tracking volume measured with the field-mapping machine. The magnetic field description is compared with the measurements and discussed.Comment: 7 pages, 5 figures, presented at 4th International Conference on Superconductivity and Magnetism 2014, April 27 - May 2, 2014, Antalya, Turkey. arXiv admin note: substantial text overlap with arXiv:1605.08778; text overlap with arXiv:1212.165

Developing the Technique of Measurements of Magnetic Field in the CMS Steel Yoke Elements With Flux-Loops and Hall Probes

Compact muon solenoid (CMS) is a general-purpose detector designed to run at the highest luminosity at the CERN large hadron collider (LHC). Its distinctive features include a 4 T superconducting solenoid with 6 m diameter by 12.5 m long free bore, enclosed inside a 10000-ton return yoke made of construction steel. Accurate characterization of the magnetic field everywhere in theCMSdetector, including the large ferromagnetic parts of the yoke, is required. To measure the field in and around ferromagnetic parts, a set of flux-loops and Hall probe sensors will be installed on several of the steel pieces. Fast discharges of the solenoid during system commissioning tests will be used to induce voltages in the flux-loops that can be integrated to measure the flux in the steel at full excitation of the solenoid. The Hall sensors will give supplementary information on the axial magnetic field and permit estimation of the remanent field in the steel after the fast discharge. An experimental R&D program has been undertaken, using a test flux-loop, two Hall sensors, and sample disks made from the same construction steel used for the CMS magnet yoke. A sample disc, assembled with the test flux-loop and the Hall sensors, was inserted between the pole tips of a dipole electromagnet equipped with a computer-controlled power supply to measure the excitation of the steel from full saturation to zero field. The results of the measurements are presented and discussed.Comment: 6 pages, 8 figures, 6 reference

Analysis of eddy current distributions in the CMS magnet yoke during the solenoid discharge

Flux loops have been installed on selected segments of the magnetic flux return yoke of the 4 T superconducting coil of the Compact Muon Solenoid (CMS) detector under construction at CERN. Voltages induced in the loops during discharge of the solenoid will be sampled online during the entire discharge and integrated offline to provide a measurement of the initial magnetic flux density in steel at the maximum field to an accuracy of a few percent. Although the discharge of the solenoid is rather slow (190 s time constant), the influence of eddy currents induced in the yoke elements should be estimated. The calculation of eddy currents is performed with Vector Fields' program ELEKTRA. The results of the calculations are reported.Flux loops have been installed on selected segments of the magnetic flux return yoke of the 4 T superconducting coil of the Compact Muon Solenoid (CMS) detector under construction at CERN. Voltages induced in the loops during discharge of the solenoid will be sampled online during the entire discharge and integrated offline to provide a measurement of the initial magnetic flux density in steel at the maximum field to an accuracy of a few percent. Although the discharge of the solenoid is rather slow (190 s time constant), the influence of eddy currents induced in the yoke elements should be estimated. The calculation of eddy currents is performed with Vector Fields' program ELEKTRA. The results of the calculations are reported

Design, construction, and quality tests of the large Al-alloy mandrels for the CMS coil

The Compact Muon Solenoid (CMS) is one of the general-purpose detectors to be provided for the LHC project at CERN. The design field of the CMS superconducting magnet is 4 T, the magnetic length is 12.5 m and the free bore is 6 m. Almost all large indirectly cooled solenoids constructed to date (e.g., Zeus, Aleph, Delphi, Finuda, Babar) comprise Al-alloy mandrels fabricated by welding together plates bent to the correct radius. The external cylinder of CMS will consist of five modules having an inner diameter of 6.8 m, a thickness of 50 mm and an individual length of 2.5 m. It will be manufactured by bending and welding thick plates (75 mm) of the strain hardened aluminum alloy EN AW-5083-H321. The required high geometrical tolerances and mechanical strength (a yield strength of 209 MPa at 4.2 K) impose a critical appraisal of the design, the fabrication techniques, the welding procedures and the quality controls. The thick flanges at both ends of each module will be fabricated as seamless rolled rings, circumferentially welded to the body of the modules. The developed procedures and manufacturing methods will be validated by the construction of a prototype mandrel of full diameter and reduced length (670 mm). (7 refs)