Field Emission for resonance sensing in MEMS/NEMS

In the past decades, there is a considerable interest in the sensor community to move from micron to nano-devices, typically scaling of resonators such as cantilever beams

Dynamical two-mode squeezing of thermal fluctuations in a cavity opto-mechanical system

We report the experimental observation of two-mode squeezing in the oscillation quadratures of a thermal micro-oscillator. This effect is obtained by parametric modulation of the optical spring in a cavity opto-mechanical system. In addition to stationary variance measurements, we describe the dynamic behavior in the regime of pulsed parametric excitation, showing enhanced squeezing effect surpassing the stationary 3dB limit. While the present experiment is in the classical regime, our technique can be exploited to produce entangled, macroscopic quantum opto-mechanical modes

Control of Recoil Losses in Nanomechanical SiN Membrane Resonators

In the context of a recoil damping analysis, we have designed and produced a membrane resonator equipped with a specific on-chip structure working as a "loss shield" for a circular membrane. In this device the vibrations of the membrane, with a quality factor of $10^7$, reach the limit set by the intrinsic dissipation in silicon nitride, for all the modes and regardless of the modal shape, also at low frequency. Guided by our theoretical model of the loss shield, we describe the design rationale of the device, which can be used as effective replacement of commercial membrane resonators in advanced optomechanical setups, also at cryogenic temperatures

Through-membrane electron-beam lithography for ultrathin membrane applications

We present a technique to fabricate ultrathin (down to 20 nm) uniform electron transparent windows at dedicated locations in a SiN membrane for in situ transmission electron microscopy experiments. An electron-beam (e-beam) resist is spray-coated on the backside of the membrane in a KOH- etched cavity in silicon which is patterned using through-membrane electron-beam lithography. This is a controlled way to make transparent windows in membranes, whilst the topside of the membrane remains undamaged and retains its flatness. Our approach was optimized for MEMS-based heating chips but can be applied to any chip design. We show two different applications of this technique for (1) fabrication of a nanogap electrode by means of electromigration in thin free-standing metal films and (2) making low-noise graphene nanopore devices

Calibrated quantum thermometry in cavity optomechanics

Cavity optomechanics has achieved the major breakthrough of the preparation and observation of macroscopic mechanical oscillators in peculiarly quantum states. The development of reliable indicators of the oscillator properties in these conditions is important also for applications to quantum technologies. We compare two procedures to infer the oscillator occupation number, minimizing the necessity of system calibrations. The former starts from homodyne spectra, the latter is based on the measurement of the motional sidebands asymmetry in heterodyne spectra. Moreover, we describe and discuss a method to control the cavity detuning, that is a crucial parameter for the accuracy of the latter, intrinsically superior procedure

Animal thermoregulation: a review of insulation, physiology and behaviour relevant to temperature control in buildings

Birds and mammals have evolved many thermal adaptations that are relevant to the bioinspired design of temperature control systems and energy management in buildings. Similar to many buildings, endothermic animals generate internal metabolic heat, are well insulated, regulate their temperature within set limits, modify microclimate and adjust thermal exchange with their environment. We review the major components of animal thermoregulation in endothermic birds and mammals that are pertinent to building engineering, in a world where climate is changing and reduction in energy use is needed. In animals, adjustment of insulation together with physiological and behavioural responses to changing environmental conditions fine-tune spatial and temporal regulation of body temperature, while also minimizing energy expenditure. These biological adaptations are characteristically flexible, allowing animals to alter their body temperatures to hourly, daily, or annual demands for energy. They exemplify how buildings could become more thermally reactive to meteorological fluctuations, capitalising on dynamic thermal materials and system properties. Based on this synthesis, we suggest that heat transfer modelling could be used to simulate these flexible biomimetic features and assess their success in reducing energy costs while maintaining thermal comfort for given building types

Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators

Very good crystallinity and highly c-axis-oriented aluminum nitride (AlN) thin films are sputtered on titanium (Ti) to fabricate thin piezoelectric cantilevers. Raman spectroscopy measurements and X-ray diffraction (XRD) indicate the high quality of these AlN films. A fabrication process, fully CMOS compatible, is developed to realize slender piezoelectric microcantilevers. Actuation enhancement for the AlN piezoelectric cantilevers is achieved by coating the slender beams with a thin PECVD silicon nitride (SiN) layer. Very good linearity and high displacement, up to 19.5 nm for 200 μm long cantilevers and 4.25 nm for 100 μm long cantilevers for 1 V actuation at quasi-static mode, are obtained with a 500 nm SiN top layer. These displacement values are three times larger than our previously reported values for cantilevers without SiN layer coating. This makes these cantilevers, without the need of employing nonstandard metals such as platinum (Pt), very promising for micro/nanoactuators

QUB : a fast dynamic method for in-situ measurement of the whole building heat loss

QUB is an innovative method enabling the experimental measurement of the total heat loss coefficient (HLC) of a building envelope in one night only. It is based on a simple theory, yet can be demonstrated to be accurate even in a short time and in real buildings, as long as certain experimental conditions are fulfilled. This study combines analytical and numerical approaches to exactly solve the temperature response of an equivalent building submitted to a QUB test. This allows understanding that even with a short time experiment (less than a night), a reasonable accuracy on the estimated HLC can be obtained. The experiment has to be designed following a simple heating power criterion. Calculation is then tested experimentally in various cases whether in climate chamber or in real field, and whether on light weight/not insulated building or a heavy weighte/highly insulated building. Results show that the QUB method performed by fulfilling this criterion is a promising method to estimate the HLC of a real building in the field with a reasonable accuracy in one night

Control of Recoil Losses in Nanomechanical SiN Membrane Resonators

In the context of a recoil damping analysis, we have designed and produced a membrane resonator equipped with a specific on-chip structure working as a "loss shield" for a circular membrane. In this device the vibrations of the membrane, with a quality factor of $10^7$, reach the limit set by the intrinsic dissipation in silicon nitride, for all the modes and regardless of the modal shape, also at low frequency. Guided by our theoretical model of the loss shield, we describe the design rationale of the device, which can be used as effective replacement of commercial membrane resonators in advanced optomechanical setups, also at cryogenic temperatures

Silicon Nitride MOMS Oscillator for Room Temperature Quantum Optomechanics

IEEE Optomechanical SiN nano-oscillators in high-finesse Fabry-Perot cavities can be used to investigate the interaction between mechanical and optical degree of freedom for ultra-sensitive metrology and fundamental quantum mechanical studies. In this paper, we present a nano-oscillator made of a high-stress round-shaped SiN membrane with an integrated on-chip 3-D acoustic shield properly designed to reduce mechanical losses. This oscillator works in the range of 200 kHz to 5 MHz and features a mechanical quality factor of Q ≃10⁷ and a Q-frequency product in excess of 6.2 x 10¹² Hz at room temperature, fulfilling the minimum requirement for quantum ground-state cooling of the oscillator in an optomechanical cavity. The device is obtained by MEMS deep reactive-ion etching (DRIE) bulk micromachining with a two-side silicon processing on a silicon-on-insulator wafer. The microfabrication process is quite flexible such that additional layers could be deposited over the SiN membrane before the DRIE steps, if required for a sensing application. Therefore, such oscillator is a promising candidate for quantum sensing applications in the context of the emerging field of quantum technologies