Development of low frequencies, insulating thick diaphragms for power MEMS applications

Major challenges of micro thermal machines are the thermal insulation and mechanical tolerance in the case of sliding piston. Switching from piston to membrane in microengines can alleviate the latest and lead to planar architectures. However, the thermal isolation would call for very thick structures which are associated to too high resonant frequencies which are detrimental to the engine performances. A thermal and mechanical compromise is to be made. On the contrary, based on fluid structure interaction, using an incompressible fluid contained in a cavity sealed by deformable diaphragm it would be possible to design a thick, low frequency insulating diaphragm. The design involves a simple planar geometry that is easy to manufacture with standard microelectronics methods. An analytical fluid structure model is proposed and theoretically validated. Experimental structures are realized and tested. The model is in agreement with the experimental results. A dimensionless model is proposed to design hybrid fluid structures for micromachines

Inertial tolerancing and capability indices in an assembly production

International audienceTraditional tolerancing considers the conformity of a batch when the batch satisfies the specifications. The characteristic is considered for itself and not according to its incidence in the assembly. Inertial tolerancing proposes another alternative of tolerancing in order to guarantee the final assembly characteristic. The inertia I2 = σ2 + δ2 is not toleranced by a tolerance interval but by a scalar representing the maximum inertia that the characteristic should not exceed. We detail how to calculate the inertial tolerances according to two cases, one aims to guarantee an inertia of the assembly characteristic the other a tolerance interval on the assembly characteristic by a Cpk capability index, in the particular but common case of uniform tolerances or more general with non uniform tolerances. An example will be detailed to show the results of the different tolerancing methods

Coupled thermodynamic-dynamic semi-analytical model of Free Piston Stirling engines.

International audienceThe study of free piston Stirling engine (FPSE) requires both accurate thermodynamic and dynamic modelling to predict its performances. The steady state behaviour of the engine partly relies on non linear dissipative phenomena such as pressure drop loss within heat exchangers which is dependant on the temperature within the associated components. An analytical thermodynamic model which encompasses the effectiveness and the flaws of the heat exchangers and the regenerator has been previously developed and validated. A semi-analytical dynamic model of FPSE is developed and presented in this paper. The thermodynamic model is used to define the thermal variables that are used in the dynamic model which evaluates the kinematic results. Thus, a coupled iterative strategy has been used to perform a global simulation. The global modelling approach has been validated using the experimental data available from the NASA RE-1000 Stirling engine prototype. The resulting coupled thermodynamic-dynamic model using a standardized description of the engine allows efficient and realistic preliminary design of FPSE

Analytical model of Stirling cycle engines.

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Global design and optimization of a membrane micro Stirling generator.

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Scaling laws for free piston Stirling engine design: Benefits and challenges of miniaturization

International audienceThis work explores the scaling effects for FPSE (free piston Stirling engines), which are known for their simple architecture and potentially high thermodynamic performances. Scaling laws are given and their potential for miniaturization is highlighted. A simple model which allows the design of the geometrical parameters of the heat exchangers, the regenerator and the masses of the pistons is proposed. It is based on the definition of six characteristic dimensionless groups. They are derived from the physics underlying the behavior of the free piston Stirling machine and their relevancy is backed up by comparisons between documented Stirling engines from the literature. Keeping constant values for each group throughout the scaling range theoretically ensures constant performance. The main losses of Stirling engine (heat conduction loss, reheat loss in the regenerator, pressure drop and gas-spring hysteresis) can be expressed as a function of the geometrical and operating parameters. Additionally, the consequences of leakage due to the manufacturing precision of pistons architectures are underlined. From the proposed scaling laws, potential power and efficiency of Stirling cycle engines at a millimeter scale can be anticipated. It appears that the power density increases with miniaturization. It is also shown that the dynamic masses related to the engine size are increased when scaling down and that the gap leakage presents the highest detrimental effects on the efficiency. These results call for dedicated architectures for micro-engines

Analytical model for Stirling cycle machine design.

International audienceIn order to study further the promising free piston Stirling engine architecture, there is a need of an analytical thermodynamic model which could be used in a dynamical analysis for preliminary design. To aim at more realistic values, the models have to take into account the heat losses and irreversibilities on the engine. An analytical model which encompasses the critical flaws of the regenerator and furthermore the heat exchangers effectivenesses has been developed. This model has been validated using the whole range of the experimental data available from the General Motor GPU-3 Stirling engine prototype. The effects of the technological and operating parameters on Stirling engine performance have been investigated. In addition to the regenerator influence, the effect of the cooler effectiveness is underlined