18 research outputs found
Structural, optical and electrical properties of hydrogenated amorphous silicon germanium (a-Si1-xGex) deposited by DC magnetron sputtering at high rate
International audienc
Silicon Germanium alloy (Si1-xGex) with x<7% as active layer in thin film transistors
International audienc
Effect of hydrogen and germanium concentrations on hydrogenated amorphous silicon germanium
International audienc
Effect of adding argon in silane-hydrogen mixture during the deposition of doped and doped µc-SI and µc-SIGe films : Crystalline content and TFT performance
International audienc
Low temperature deposition of microcrystalline silicon germanium Si1-xGex by RF-PECVD
WOSInternational audienc
Low germanium fraction in microcrystalline silicon germanium Si1-XGeX
International audienc
The annealing temperature effect on the electrical properties of boron-doped hydrogenated amorphous silicon a-Si:H(B)
WOSInternational audienc
The annealing temperature effect on the electrical properties of boron-doped hydrogenated amorphous silicon a-Si:H(B)
International audienc
Amélioration des performances électriques des transistors en couches minces (TFTs) à base de l'alliage Si Ge
International audienc
Effect of total gas pressure in sputtered hydrogenated amourphous silicon
International audienc