324 research outputs found
Vacuum-packaged micro fuel reformer for high thermal efficiency and low package temperature
MEMS 2008, Tucson, AZ, USA, January 13-17, 200
Fabrication of microprobes on a ultrathick glass substrate with narrow-pitch electrical feedthroughs for next-generation lsi burn-in tests
MEMS 2008, Tucson, AZ, USA, January 13-17, 200
2.45 GHz Passive Wireless Temperature Monitoring System Featuring Parallel Sensor Interrogation and Resolution Evaluation
IEEE SENSORS 2006, EXCO, Daegu, Korea / October 22-25, 200
Debris-free in-air laser dicing for multi-layer MEMS by perforated internal transformation and thermally-induced crack propagation
MEMS 2008, Tucson, AZ, USA, January 13-17, 200
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