Investigation of the conditions for the formation of SiCN-based coatings in arc discharge with self-heated hollow cathode

Method for low-temperature (<200°C) deposition of SiCN-based coatings in a large volume chamber (0.3 m 3 ) by decomposition of organosilicon precursor in nitrogen-argon plasma of discharge with self-heated hollow cathode and remote anode (40 cm) at pressure of ∼1 mTorr was investigated. The analysis of the composition of coatings by IR spectroscopy and the analysis of plasma composition are carried out by optical emission spectroscopy. The influence of discharge current (10-40 A) and the flow of gas mixture (5-15 sccm hexamethyldisilazane and 60 sccm Ar-N 2 mixture) on plasma composition and elemental composition of coatings was investigated. It is shown that the degree of decomposition of precursor molecules is increased with growth of the current and with increase of Ar content in the gas mixture. © 2018 Web Portal IOP. All rights reserved.The study was financially supported by the Russian Science Fund, grant No. 18-79-00233

Comparative Analysis of Properties of the Carbon-Based Coatings Obtained through Various PVD and CVD Deposition Methods

The paper examines carbon 0.5-1 thick coatings obtained through various physical vapour deposition and chemical vapour deposition methods on stainless steel and tool steel substrates. Their composition, morphology and physical properties have also been studied. The correlations of erosive wear resistance and H3/E2 ratio (where H is hardness and E is elastic modulus) have been identified for carbon coatings in regards to the production method. Ta-C carbon coatings demonstrate high resistance to dynamic loads with erosive wear in a sand-blast machine. © Published under licence by IOP Publishing Ltd

Study of the ion plasma flow generated by a high-current vacuum arc

The vacuum arc discharge is intensively explored for a long time. It acts as a source of multiply charged plasma. The results of the special type plasma gun (5-10 kA, 12 μs) ion flow study with high temporal resolution and the electrode erosion dependences on the amplitude of the current pulse are presented in the research. The ion flow intensity had good reproducibility from series to series, while the values of total mass erosion differ significantly for different series of experiments under the same conditions. The ion erosion was measured to be significantly higher than that for arc sources with currents up to 1 kA. © 2019 IOP Publishing Ltd. All rights reserved.Russian Foundation for Basic Research, RFBR: 17-02-00346, 18-08-00547Russian Academy of Sciences, RAS18-2-2-16This work was supported in part by RFBR (grant Nos. 17-02-00346, 18-08-00547, 19-08-00783, 19-58-53006), by RAS Program (project No. 11) and UB RAS Program (project No. 18-2-2-16)

Carbon, nitrogen, and oxygen ion implantation of stainless steel

Ion implantation experiments of C, N, and O into stainless steel have been performed, with beam-line and plasma source ion implantation methods. Acceleration voltages were varied between 27 and 50 kV, with pulsed ion current densities between 1 and 10 mA/cm{sup 2}. Implanted doses ranged from 0.5 to 3 {times} 10{sup 18}cm{sup -2}, while workpiece temperatures were maintained between 25 and 800 C. Implant concentration profiles, microstructure, and surface mechanical properties of the implanted materials are reported

The effect of irradiation with nitrogen ions on the properties of pyrolytic graphite

yesThe effect of irradiation with nitrogen ions on the elemental composition, surface topography, and structure of the near-surface layer of pyrolytic graphite are investigatedBelgorod State Universit

The effect of irradiation with nitrogen ions on the properties of pyrolytic graphite

The effect of irradiation with nitrogen ions on the elemental composition, surface topography, and structure of the near-surface layer of pyrolytic graphite are investigatedyesBelgorod State Universit