9 research outputs found

    Optical band gaps and composition dependence of hafnium–aluminate thin films grown by atomic layer chemical vapor deposition

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    We report the optical properties of unannealed hafnium–aluminate HfAlO films grown by atomic layer chemical vapor deposition ALCVD and correlate them with the aluminum contents in the films. Vacuum ultraviolet spectroscopic ellipsometry VUV-SE , high-resolution transmission electron microscopy HRTEM , channeling Rutherford backscattering spectrometry RBS , and resonant nuclear reaction analysis NRA were employed to characterize these films. In the analyses of ellipsometry data, a double Tauc–Lorentz dispersion produces a best fit to the experimental VUV-SE data. As a result, the determined complex pseudodielectric functions of the films clearly exhibit a dependency on the aluminum densities measured by RBS and NRA. We show that the optical fundamental band gap Eg shifts from 5.56±0.05 eV for HfO2 to 5.92±0.05 eV for HfAlO. The latter was grown by using an equal number of pulses of H2O/HfCl4 and H2O/TMA trimethylaluminum precursors in each deposition cycle for HfO2 and Al2O3, respectively. The shift of Eg to higher photon energies with increasing aluminum content indicates that intermixing of HfO2 and Al2O3 occurred during the ALCVD growth process. We found that Eg varies linearly with the mole fraction x of Al2O3 in the alloy HfO2 x Al2O3 1−x, but has a parabolic dependency with the aluminum density. We also observed a consistent decrease in the magnitudes of the real 1 and imaginary 2 part of of HfAlO films with respect to those of HfO2 as the Al density increased. The absence of the 5.7 eV peak in the spectrum, which was previously reported for polycrystalline HfO2 films, indicates that these films are amorphous as confirmed by their HRTEM images

    Optical band gaps and composition dependence of hafnium–aluminate thin films grown by atomic layer chemical vapor deposition

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    We report the optical properties of unannealed hafnium–aluminate HfAlO films grown by atomic layer chemical vapor deposition ALCVD and correlate them with the aluminum contents in the films. Vacuum ultraviolet spectroscopic ellipsometry VUV-SE , high-resolution transmission electron microscopy HRTEM , channeling Rutherford backscattering spectrometry RBS , and resonant nuclear reaction analysis NRA were employed to characterize these films. In the analyses of ellipsometry data, a double Tauc–Lorentz dispersion produces a best fit to the experimental VUV-SE data. As a result, the determined complex pseudodielectric functions of the films clearly exhibit a dependency on the aluminum densities measured by RBS and NRA. We show that the optical fundamental band gap Eg shifts from 5.56±0.05 eV for HfO2 to 5.92±0.05 eV for HfAlO. The latter was grown by using an equal number of pulses of H2O/HfCl4 and H2O/TMA trimethylaluminum precursors in each deposition cycle for HfO2 and Al2O3, respectively. The shift of Eg to higher photon energies with increasing aluminum content indicates that intermixing of HfO2 and Al2O3 occurred during the ALCVD growth process. We found that Eg varies linearly with the mole fraction x of Al2O3 in the alloy HfO2 x Al2O3 1−x, but has a parabolic dependency with the aluminum density. We also observed a consistent decrease in the magnitudes of the real 1 and imaginary 2 part of of HfAlO films with respect to those of HfO2 as the Al density increased. The absence of the 5.7 eV peak in the spectrum, which was previously reported for polycrystalline HfO2 films, indicates that these films are amorphous as confirmed by their HRTEM images

    Critical review of the current status of thickness measurements for ultrathin SiO2 on Si Part V: Results of a CCQM pilot study

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    Results are reported from a pilot study under the Consultative Committee for Amount of Substance (CCQM) to compare measurements of and resolve any relevant measurement issues in the amount of thermal oxide on (100) and (111) orientation silicon wafer substrates in the thickness range 1.5–8 nm. As a result of the invitation to participate in this activity, 45 sets of measurements have been made in different laboratories using 10 analytical methods: medium—energy ion scattering spectrometry (MEIS), nuclear reaction analysis (NRA), RBS, elastic backscattering spectrometry (EBS), XPS, SIMS, ellipsometry, grazing—incidence x-ray reflectometry (GIXRR), neutron reflectometry and transmission electron microscopy (TEM). The measurements are made on separate sets of 10 carefully prepared samples, all of which have been characterized by a combination of ellipsometry and XPS using carefully established reference conditions and reference parameters. The results have been assessed against the National Physical Laboratory (NPL) data and all show excellent linearity. The data sets correlate with the NPL data with average root-mean-square scatters of 0.15 nm, half being better than 0.1 nm and a few at or better than 0.05 nm. Each set of data allows a relative scaling constant and a zero thickness offset to be determined. Each method has an inherent zero thickness offset between 0 nm and 1 nm and it is these offsets, measured here for the first time, that have caused many problems in the past. There are three basic classes of offset: water and carbonaceous contamination equivalent to ∼ 1 nm as seen by ellipsometry; adsorbed oxygen mainly from water at an equivalent thickness of 0.5 nm as seen by MEIS, NRA, RBS and possibly GIXRR; and no offset as seen by XPS using the Si 2p peaks. Each technique has a different uncertainty for the scaling constant and consistent results have been achieved. X-ray photoelectron spectroscopy has large uncertainties for the scaling constant but a high precision and critically, if used correctly, has zero offset. Thus, a combination of XPS and the other methods allows the XPS scaling constant to be determined with low uncertainty, traceable via the other methods. The XPS laboratories returning results early were invited to test a new reference procedure. All showed very significant improvements. The reference attenuation lengths thus need scaling by 0.986 ± 0.009 (at an expansion factor of 2), deduced from the data for the other methods. Several other methods have small offsets and, to the extent that these can be shown to be constant or measurable, these methods will also show low uncertainty. Recommendations are provided for parameters for XPS, MEIS, RBS and NRA to improve their accurac

    Critical review of the current status of thickness measurements for ultrathin SiO on Si Part V: Results of a CCQM pilot study

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    A study was carried out for the measurement of ultrathin SiO on (100) and (111) orientation silicon wafer in the thickness range 1.5-8 nm. XPS, medium-energy ion scattering spectrometry (MEIS), nuclear reaction analysis (NRA), RBS, elastic backscattering spectrometry (EBS), SIMS, ellipsometry, gazing-incidence x-ray reflectometry (GIXRR), neutron reflectometry and transmission electron microscopy (TEM) were used for the measurements. Water and carbonaceous contamination about 1 nm were observed by ellipsometry and adsorbed oxygen mainly from water at thickness of 0.5 nm were seen by MEIS, NRA, RBS and GIXRR. The different uncertainty of the techniques for the scaling constant were also discussed

    Critical review of the current status of thickness measurements for ultrathin SiO \u3csub\u3e2\u3c/sub\u3e on Si Part V:results of a CCQM pilot study

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    \u3cp\u3eA study was carried out for the measurement of ultrathin SiO \u3csub\u3e2\u3c/sub\u3e on (100) and (111) orientation silicon wafer in the thickness range 1.5-8 nm. XPS, medium-energy ion scattering spectrometry (MEIS), nuclear reaction analysis (NRA), RBS, elastic backscattering spectrometry (EBS), SIMS, ellipsometry, gazing-incidence x-ray reflectometry (GIXRR), neutron reflectometry and transmission electron microscopy (TEM) were used for the measurements. Water and carbonaceous contamination about 1 nm were observed by ellipsometry and adsorbed oxygen mainly from water at thickness of 0.5 nm were seen by MEIS, NRA, RBS and GIXRR. The different uncertainty of the techniques for the scaling constant were also discussed.\u3c/p\u3
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