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2 research outputs found
Thermal adsorption-enhanced atomic layer etching of Si 3
Author
Dougyong Sung
Hyunju Lee
+5Â more
Jehun Woo
Sejin Oh
Seungkyu Lim
Stacey F. Bent
Woo-Hee Kim
Publication venue
'American Vacuum Society'
Publication date
Field of study
No full text
Crossref
Improvement of GaN plasma etching uniformity by optimizing the coil electrode with plasma simulation and experimental validation
Author
Agarwal
Agarwal
+50Â more
Agarwal
Agarwal
Amano
Baca
Briefi
Chen
Chen
Chen
Cheng
Cheng Cheng
Cho
Despiau-Pujo
Dezhi Xiao
Dineen
Dineen
Dougyong Sung
Economou
Eddy
Han
Huang
Jaworski
Jeong
Jeong
Jie Shen
Joo
Kim
Kim
Lenci
Li
Li
Liangliang Liu
Liu
Mishra
Ochoa Brezmes
Oh
Oh
Okumura
Paul K. Chu
Pearton
Qingdong Ruan
Sarkar
Stratakos
Sun
Tian
Tinck
Vasenkov
Wang
Windisch
Yatabe
Zhu
Publication venue
'Elsevier BV'
Publication date
Field of study
No full text
Crossref
No full text
