Prediction of machining accuracy based on geometric error estimation of tool rotation profile in five-axis multi-layer flank milling process

In five-axis multi-layer flank milling process, the geometric error of tool rotation profile caused by radial dimension error and setup error has great influence on the machining accuracy. In this work, a new comprehensive error prediction model considering the inter-layer interference caused by tool rotation profile error is established, which incorporates a pre-existing prediction model dealing with a variety of errors such as geometric errors of machine tool, workpiece locating errors, and spindle thermal deflection errors. First, a series of tool contact points on the tool swept surface in each single layer without overlapping with others are calculated. Second, the position of the tool contact points on the overlapped layers is updated based on the detection and calculation of inter-layer interferences. Third, all evaluated tool contact points on the final machined surface are available for completing the accuracy prediction of the machined surface. A machining experiment has been carried out to validate this prediction model and the results show the model is effective

Investigation of ultra-thin Al₂O₃ film as Cu diffusion barrier on low-k (k=2.5) dielectrics

Ultrathin Al(2)O(3) films were deposited by PEALD as Cu diffusion barrier on low-k (k=2.5) material. The thermal stability and electrical properties of the Cu/low k system with Al(2)O(3) layers with different thickness were studied after annealing. The AES, TEM and EDX results revealed that the ultrathin Al(2)O(3) films are thermally stable and have excellent Cu diffusion barrier performance. The electrical measurements of dielectric breakdown and TDDB tests further confirmed that the ultrathin Al(2)O(3) film is a potential Cu diffusion barrier in the Cu/low-k interconnects system

(9S,13R,14S)-7,8-Didehydro-4-(4-fluoro­benz­yloxy)-3,7-dimeth­oxy-17-methyl­morphinan-6-one sesquihydrate

In the title sinomenine derivative, C26H28FNO4·1.5H2O, the dihedral angle between the two aromatic rings is 55.32 (6)°. The N-containing ring has an approximate chair conformation, while other two rings have approximate envelope and half-chair conformations. One water mol­ecule is located on a twofold symmetry axis. In the crystal, the water mol­ecules form O—H⋯O and O—H⋯N hydrogen bonds, bridging symmetry-related main mol­ecules