Method for sequentially processing a multi-level interconnect circuit in a vacuum chamber

An apparatus is disclosed which includes a vacuum system having a vacuum chamber in which wafers are processed on rotating turntables. The vacuum chamber is provided with an RF sputtering system and a dc magnetron sputtering system. A gas inlet introduces various gases to the vacuum chamber and creates various gas plasma during the sputtering steps. The rotating turntables insure that the respective wafers are present under the sputtering guns for an average amount of time such that consistency in sputtering and deposition is achieved. By continuous and sequential processing of the wafers in a common vacuum chamber without removal, the adverse affects of exposure to atmospheric conditions are eliminated providing higher quality circuit contacts and functional device

Method for sequentially processing a multi-level interconnect circuit in a vacuum chamber

The processing of wafer devices to form multilevel interconnects for microelectronic circuits is described. The method is directed to performing the sequential steps of etching the via, removing the photo resist pattern, back sputtering the entire wafer surface and depositing the next layer of interconnect material under common vacuum conditions without exposure to atmospheric conditions. Apparatus for performing the method includes a vacuum system having a vacuum chamber in which wafers are processed on rotating turntables. The vacuum chamber is provided with an RF sputtering system and a DC magnetron sputtering system. A gas inlet is provided in the chamber for the introduction of various gases to the vacuum chamber and the creation of various gas plasma during the sputtering steps

ERTS-1 observations of sea surface circulation and sediment transport, Cook Inlet, Alaska

Cook Inlet is a large tide-dominated estuary in southern Alaska. Highly turbid streams enter the upper inlet, providing an excellent tracer for circulation in the lower inlet. MSS 4 and 5 images both can be used in this area to plot sediment and pollutant trajectories, areas of (probable) commercial fish concentration, and the entire circulation regime

Electrochemical incineration of wastes

The novel technology of waste removal in space vehicles by electrochemical methods is presented to convert wastes into chemicals that can be eventually recycled. The important consideration for waste oxidation is to select a right kind of electrode (anode) material that should be stable under anodic conditions and also a poor electrocatalyst for oxygen and chlorine evolution. On the basis of long term electrolysis experiments on seven different electrodes and on the basis of total organic carbon reduced, two best electrodes were identified. The effect of redox ions on the electrolyte was studied. Though most of the experiments were done in mixtures of urine and waste, the experiments with redox couples involved 2.5 M sulfuric acid in order to avoid the precipitation of redox ions by urea. Two methods for long term electrolysis of waste were investigated: (1) the oxidation on Pt and lead dioxide electrodes using the galvanostatic methods; and (2) potentiostatic method on other electrodes. The advantage of the first method is the faster rate of oxidation. The chlorine evolution in the second method is ten times less then in the first. The accomplished research has shown that urine/feces mixtures can be oxidized to carbon dioxide and water, but current densities are low and must be improved. The perovskite and Ti4O7 coated with RuO2 are the best electrode materials found. Recent experiment with the redox agent improves the current density, however, sulphuric acid is required to keep the redox agent in solution to enhance oxidation effectively. It is desirable to reduce the use of acid and/or find substitutes

Driven diffusive systems with mutually interactive Langmuir kinetics

We investigate the simple one-dimensional driven model, the totally asymmetric exclusion process, coupled to mutually interactive Langmuir kinetics. This model is motivated by recent studies on clustering of motor proteins on microtubules. In the proposed model, the attachment and detachment rates of a particle are modified depending upon the occupancy of neighbouring sites. We first obtain continuum mean-field equations and in certain limiting cases obtain analytic solutions. We show how mutual interactions increase (decrease) the effects of boundaries on the phase behavior of the model. We perform Monte Carlo simulations and demonstrate that our analytical approximations are in good agreement with the numerics over a wide range of model parameters. We present phase diagrams over a selective range of parameters.Comment: 9 pages, 8 Figure

Sea-surface circulation, sediment transport, and marine mammal distribution, Alaska continental shelf

There are no author-identified significant results in this report

The BCS theory of q-deformed nucleon pairs - qBCS

We construct a coherent state of q-deformed zero coupled nucleon pairs distributed in several single-particle orbits. Using a variational approach, the set of equations of qBCS theory, to be solved self consistently for occupation probabilities, gap parameter Delta, and the chemical potential lambda, is obtained. Results for valence nucleons in nuclear degenerate sdg major shell show that the strongly coupled zero angular momentum nucleon pairs can be substituted by weakly coupled q-deformed zero angular momentum nucleon pairs. A study of Sn isotopes reveals a well defined universe of (G, q) values, for which qBCS converges. While the qBCS and BCS show similar results for Gap parameter Delta in Sn isotopes, the ground state energies are lower in qBCS. The pairing correlations in N nucleon system, increase with increasing q (for q real).Comment: 8 pages, REVTEX, 3 eps figure