Investigation of TiO2 thin film deposited by microwave plasma assisted sputtering and its application in 3D glasses

TiO2 deposition using separate regions for sputtering and oxidation is not well investigated. We optimized process parameter for such as oxygen flow and microwave power to produce high quality TiO2 filters for Stereo/3D imaging applications. This deposition technique was chosen for its unique advantages: high deposition rates while increasing the probability of obtaining stoichiometric oxides, reduces possibility of target poisoning and provides better stability of process. Various characterization methods, such as scanning electron microscopy (SEM), atomic force microscopy (AFM), Raman, X-ray diffraction (XRD), transmission spectroscopy, were used in compliment to simulations for detailed analysis of deposited TiO2 thin films. Process parameters were optimized to achieve TiO2 films with low surface scattering and absorption for fabricating multi-passbands interference filter for 3D glasses. From observations and quantitative analysis of surfaces, it was seen that surface roughness increases while oxygen flow or microwave power increases. As the content of anatase phase also increases with higher microwave power and higher oxygen flow, the formation of anatase grains can cause higher surface roughness. Optical analysis of samples validates these trends and provided additional information for absorption trends. Optimized parameters for deposition process are then obtained and the final fabricated 3D glasses filters showed high match to design, within 0.5% range for thickness error

Automated control of plasma ion-assisted electron beam-deposited TiO2 optical thin films

A hollow cathode plasma source has been operated automatically, demonstrating independent control of plasma ion energy and ion current density for plasma ion-assisted electron beam-deposited titania (TiO2). The lanthanum hexaboride hollow cathode design described in this work utilizes both the interior and exterior cathode surfaces, with the additional electrons generated removing the need for a separate neutralizing source. Automatic feedback control of plasma source cathode-to-anode accelerator voltage (AV-via argon gas flow to the anode and/or cathode plasma source areas) and accelerator current (AC-via an external high-current power supply) provides independent control of the ion energy distribution function and ion current density, respectively. Automated run-to-run reproducibility (over six separate deposition runs) in TiO2 refractive index (550 nm) was demonstrated as 2.416 ± 0.008 (spread quoted as one standard deviation), which is well within the required refractive index control for optical coating applications. Variation in refractive index is achievable through control of AV (ion energy) and/or AC (ion current density), directly influencing deposited TiO2 structural phase. Measured dependencies of TiO2 refractive index and extinction coefficient on AV and AC are described. Optimum plasma source parameters for assisted electron beam deposition of TiO2 optical thin-film applications are highlighted

Durable infrared optical coatings based on pulsed DC-sputtering of hydrogenated amorphous carbon (a-C:H)

Optical properties of low-temperature pulsed DC-sputter deposited (≤70°C) hydrogenated carbon are presented. Increasing hydrogen incorporation into the sputter deposited carbon significantly decreases infrared optical absorption due to a decrease in deep absorptive states associated with dangling bonds. Hydrogen flow is optimized (hydrogen flow 3 sccm), achieving the best compromise between increased infrared transmittance and hardness for durable coating performance. Optical, environmental, and durability performance of pulsed DC-sputtered carbon incorporated in multilayer (a-C:H/Ge) infrared antireflective coatings indicates suitability as a durable infrared optical coating for commonly used infrared substrates, including temperature sensitive chalcogenide glass

Surface Enhanced Raman scattering substrates made by oblique angle deposition:methods and applications

Surface Enhanced Raman Spectroscopy presents a rapid, non-destructive method to identify chemical and biological samples with up to single molecule sensitivity. Since its discovery in 1974, the technique has become an intense field of interdisciplinary research, typically generating >2000 publications per year since 2011. The technique relies on the localised surface plasmon resonance phenomenon, where incident light can couple with plasmons at the interface that result in the generation of an intense electric field. This field can propagate from the surface from the metal-dielectric interface, so molecules within proximity will experience more intense Raman scattering. Localised surface plasmon resonance wavelength is determined by a number of factors, such as size, geometry and material. Due to the requirements of the surface optical response, Ag and Au are typical metals used for surface enhanced Raman applications. These metals then need to have nano features that improve the localised surface plasmon resonance, several variants of these substrates exist; surfaces can range from nanoparticles in a suspension, electrochemically roughened electrodes to metal nanostructures on a substrate. The latter will be the focus of this review, particularly reviewing substrates made by oblique angle deposition. Oblique angle deposition is the technique of growing thin films so that the material flux is not normal to the surface. Films grown in this fashion will possess nanostructures, due to the atomic self-shadowing effect, that are dependent mainly on the deposition angle. Recent developments, applications and highlights of surface enhanced Raman scattering substrates made by oblique angle deposition will be reviewed