13,088 research outputs found
Reduced basis method for computational lithography
A bottleneck for computational lithography and optical metrology are long
computational times for near field simulations. For design, optimization, and
inverse scatterometry usually the same basic layout has to be simulated
multiple times for different values of geometrical parameters. The reduced
basis method allows to split up the solution process of a parameterized model
into an expensive offline and a cheap online part. After constructing the
reduced basis offline, the reduced model can be solved online very fast in the
order of seconds or below. Error estimators assure the reliability of the
reduced basis solution and are used for self adaptive construction of the
reduced system. We explain the idea of reduced basis and use the finite element
solver JCMsuite constructing the reduced basis system. We present a 3D
optimization application from optical proximity correction (OPC).Comment: BACUS Photomask Technology 200
Rigorous Simulations of 3D Patterns on Extreme Ultraviolet Lithography Masks
Simulations of light scattering off an extreme ultraviolet lithography mask
with a 2D-periodic absorber pattern are presented. In a detailed convergence
study it is shown that accurate results can be attained for relatively large 3D
computational domains and in the presence of sidewall-angles and
corner-roundings.Comment: SPIE Europe Optical Metrology, Conference Proceeding
FEM investigation of leaky modes in hollow core photonic crystal fibers
Hollow-core holey fibers are promising candidates for low-loss guidance of
light in various applications, e.g., for the use in laser guide star adaptive
optics systems in optical astronomy. We present an accurate and fast method for
the computation of light modes in arbitrarily shaped waveguides. Maxwell's
equations are discretized using vectorial finite elements (FEM). We discuss how
we utilize concepts like adaptive grid refinement, higher-order finite
elements, and transparent boundary conditions for the computation of leaky
modes in photonic crystal fibers. Further, we investigate the convergence
behavior of our methods. We employ our FEM solver to design hollow-core
photonic crystal fibers (HCPCF) whose cores are formed from 19 omitted cladding
unit cells. We optimize the fiber geometry for minimal attenuation using
multidimensional optimization taking into account radiation loss (leaky modes).Comment: 8 page
Fast simulation method for parameter reconstruction in optical metrology
A method for automatic computation of parameter derivatives of numerically
computed light scattering signals is demonstrated. The finite-element based
method is validated in a numerical convergence study, and it is applied to
investigate the sensitivity of a scatterometric setup with respect to
geometrical parameters of the scattering target. The method can significantly
improve numerical performance of design optimization, parameter reconstruction,
sensitivity analysis, and other applications
Images of a Bose-Einstein condensate in position and momentum space
In the Bogoliubov theory a condensate initially prepared in its ground state
described by stationary Bogoliubov vacuum and later perturbed by a
time-dependent potential or interaction strength evolves into a time-dependent
excited state which is dynamical Bogoliubov vacuum. The dynamical vacuum has a
simple diagonal form in a time-dependent orthonormal basis of single particle
modes. This diagonal representation leads to a gaussian probability
distribution for possible outcomes of density measurements in position and
momentum space. In these notes we also discuss relations with the U(1) symmetry
breaking version of the Bogoliubov theory and give two equivalent gaussian
integral representations of the dynamical vacuum state.Comment: 4 pages; Talk given at the Laser Physics Workshop, July 2005, Kyoto,
Japa
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