AFM tip-based nanomachining with increased cutting speed at the tool-workpiece interface

This paper reports a study towards enhancing the throughput of the Atomic Force Microscope (AFM) tip-based nanomachining process by increasing the cutting speed at the interface between the tool and the workpiece. A modified AFM set-up was implemented, which combined the fast reciprocating motions of a piezoelectric actuator, on which the workpiece was mounted, and the linear displacement of the AFM stage, which defined the length of produced grooves. The influence of the feed, the feed direction and the cutting speed on the machined depth and on the chip formation was studied in detail when machining poly(methyl methacrylate). A theoretical cutting speed over 5 m/min could be achieved with this set-up when the frequency of the piezoelectric actuator reciprocating motions was 40 kHz. This is significantly better than the state of the art for AFM-based nanomachining, which is currently less than 1 m/min.</p

Comparison between torsional spring constants of rectangular and V-shaped AFM cantilevers

The properties of force-sensing micro-cantilevers are of fundamental importance for measurements employing atomic force microscopy (AFM) techniques. Due to the well-known arguments of Sader, it is generally accepted that V-shaped cantilevers are more sensitive to lateral forces than rectangular ones. We present results of numerical (finite element modelling) and experimental comparison between torsional spring constants of rectangular and V-shaped commercial AFM cantilevers. As representative example of such beams, we considered AFM probes available commercially. In particular, we tested scaled-up models of V-shaped cantilevers which had the same geometrical shapes as commercial AFM cantilevers. Both the rectangular and the Vshaped larger scale models were made of the same material; they had the same length, thickness, normal spring constant, as well as the same location and shape of the tip base. In the experiments and the simulations, an external lateral load was applied to the free end of the tip. A good agreement between the experimental work and finite element method (FEM) simulations was observed. The results show that the torsional spring constant of the V-shape cantilevers considered here was greater than that of the equivalent rectangular beams by up to 45%. The discrepancy with the results from Sader should be caused by differences in both the load transfer scheme and the geometrical shapes of the V-shaped beams

AFM tip-based nanomachining with increased cutting speed at the tool-workpiece interface

This paper reports a study towards enhancing the throughput of the Atomic Force Microscope (AFM) tip-based nanomachining process by increasing the cutting speed at the interface between the tool and the workpiece. A modified AFM set-up was implemented, which combined the fast reciprocating motions of a piezoelectric actuator, on which the workpiece was mounted, and the linear displacement of the AFM stage, which defined the length of produced grooves. The influence of the feed, the feed direction and the cutting speed on the machined depth and on the chip formation was studied in detail when machining poly(methyl methacrylate). A theoretical cutting speed over 5 m/min could be achieved with this set-up when the frequency of the piezoelectric actuator reciprocating motions was 40 kHz. This is significantly better than the state of the art for AFM-based nanomachining, which is currently less than 1 m/min

Slip system level strengthening in nano-indentation of single crystalline copper: Numerical study via a non-local CPFEM model

A three-dimensional non-local crystal plasticity finite element model (CPFEM) integrating the evolution of geometrically necessary dislocations (GNDs) and statistically stored dislocations (SSDs) was developed to simulate the nano-indentation of single crystal copper. The simulation accurately reproduced published experimental results when considering force-depth curves, indentation size effect (ISE), anisotropic plastic deformation and sink-in phenomenon. The accumulated slip, i.e., shear strain in individual slip systems, was quantitively investigated. It is anticipated that the developed non-local CPFEM model can support future sub-micro and nanoscale manufacturing research as it enables the rapid exploration of slip system level mechanical response of a diverse range of crystalline alloys

Redox agent enhanced chemical mechanical polishing of thin film diamond

The chemical nature of the chemical mechanical polishing of diamond has been examined by adding various redox agents to the alkaline SF1 polishing slurry. Three oxidizing agents namely, hydrogen peroxide, potassium permanganate and ferric nitrate, and two reducing agents, oxalic acid and sodium thiosulfate, were added to the SF1 slurry. Oxalic acid produced the fastest polishing rate while hydrogen peroxide had very little effect on polishing, probably due to its volatile nature. X-ray photoelectron spectroscopy (XPS) reveals little difference in the surface oxygen content on the polished samples using various slurries. This suggests that the addition of redox agents do not increase the density of oxygen containing species on the surface but accelerates the process of attachment and removal of Si or O atoms within the slurry particles to the diamond surface

A922 Sequential measurement of 1 hour creatinine clearance (1-CRCL) in critically ill patients at risk of acute kidney injury (AKI)

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Technology maturity assessment of micro and nano manufacturing processes and process chains

This article presents a systematic approach for assessing the maturity of manufacturing technologies. A methodology is proposed that is based on modelling the capability of the individual processes and technology interfaces between them. It is inspired by a capability maturity model which has been applied successfully in the field of software engineering. The methodology was developed to assess the maturity levels of individual processes and the combined maturity of pairs or chains of processes. To demonstrate its validity, it was applied for assessing the maturity of technologies in the micro and nano manufacturing domain. The results demonstrated its applicability as a tool for evaluating the maturity of micro and nano manufacturing pairs and their constituent processes. Also, it was shown that the methodology can be employed for identifying process pairs, suitable for integration in process chains, together with their potential weaknesses

This content has been downloaded from IOPscience. Please scroll down to see the full text. Silica based polishing of {100} and {111} single crystal diamond Silica based polishing of {100} and {111} single crystal diamond

Abstract Diamond is one of the hardest and most difficult to polish materials. In this paper, the polishing of {111} and {100} single crystal diamond surfaces by standard chemical mechanical polishing, as used in the silicon industry, is demonstrated. A Logitech Tribo Chemical Mechanical Polishing system with Logitech SF1 Syton and a polyurethane/polyester polishing pad was used. A reduction in roughness from 0.92 to 0.23 nm root mean square and 0.31 to 0.09 nm rms for {100} and {111} samples respectively was observed

A Computer-Aided Design and manufacturing implementation of the atomic force microscope tip-based nanomachining process for two-dimensional patterning

This paper reports a feasibility study that demonstrates the implementation of a computer-aided design and manufacturing (CAD/CAM) approach for producing two-dimensional (2D) patterns on the nanoscale using the atomic force microscope (AFM) tip-based nanomachining process. To achieve this, simple software tools and neutral file formats were used. A G-code postprocessor was also developed to ensure that the controller of the AFM equipment utilized could interpret the G-code representation of tip path trajectories generated using the computer-aided manufacturing (CAM) software. In addition, the error between a machined pattern and its theoretical geometry was also evaluated. The analyzed pattern covered an area of 20 μm × 20 μm. The average machined error in this case was estimated to be 66 nm. This value corresponds to 15% of the average width of machined grooves. Such machining errors are most likely due to the flexible nature of AFM probe cantilevers. Overall, it is anticipated that such a CAD/CAM approach could contribute to the development of a more flexible and portable solution for a range of tip-based nanofabrication tasks, which would not be restricted to particular customised software or AFM instruments. In the case of nanomachining operations, however, further work is required first to generate trajectories, which can compensate for the observed machining errors

Silica based polishing of {100} and {111} single crystal diamond

Diamond is one of the hardest and most difficult to polish materials. In this paper, the polishing of {111} and {100} single crystal diamond surfaces by standard Chemical Mechanical Polishing, as used in the silicon industry, is demonstrated. A Logitech Tribo Chemical Mechanical Polishing system with Logitech SF1 Syton and a polyurethane/polyester polishing pad was used. A reduction in roughness from 0.92 to 0.23 nm root mean square (RMS) and 0.31 to 0.09 nm RMS for {100} and {111} samples respectively was observed.Comment: 13 pages 3 figures, ELHT and SM have contributed equally to the wor