3D-Printed Optics for Wafer-Scale Probing

Mass production of photonic integrated circuits requires high-throughput wafer-level testing. We demonstrate that optical probes equipped with 3D-printed elements allow for efficient coupling of light to etched facets of nanophotonic waveguides. The technique is widely applicable to different integration platforms.Comment: Accepted for presentation at European Conference on Optical Communications (ECOC) 201

Low-loss fiber-to-chip couplers with ultrawide optical bandwidth

Providing efficient access from optical fibers to on-chip photonic systems is a key challenge for integrated optics. In general, current solutions allow either narrowband out-of-plane-coupling to a large number of devices or broadband edge-coupling to a limited number of devices. Here we present a hybrid approach using 3D direct laser writing, merging the advantages of both concepts and enabling broadband and low-loss coupling to waveguide devices from the top. In the telecom wavelength regime, we demonstrate a coupling loss of less than -1.8 dB between 1480 nm and 1620 nm. In the wavelength range between 730 nm and 1700 nm, we achieve coupling efficiency well above -8 dB which is sufficient for a range of broadband applications spanning more than an octave. The 3D couplers allow relaxed mechanical alignment with respect to optical fibers, with -1 dB alignment tolerance of about 5 μm in x- and y-directions and -1 dB alignment tolerance in the z-direction of 34 μm. Using automatized alignment, many such couplers can be connected to integrated photonic circuits for rapid prototyping and hybrid integration. © 2019 Author(s)

Ultra-broadband polarization beam splitter and rotator based on 3D-printed waveguides

Multi-photon lithography has emerged as a powerful tool for photonic integration, allowing to complement planar photonic circuits by 3D-printed freeform structures such as waveguides or micro-optical elements. These structures can be fabricated with high precision on the facets of optical devices and lend themselves to highly efficient package-level chip-chip-connections in photonic assemblies. However, plain light transport and efficient coupling is far from exploiting the full geometrical design freedom that is offered by 3D laser lithography. Here, we extend the functionality of 3D-printed optical structures to manipulation of optical polarization states. We demonstrate compact ultra-broadband polarization beam splitters (PBS) that can be combined with polarization rotators (PR) and mode-field adapters into a monolithic 3D-printed structure, fabricated directly on the facets of optical devices. In a proof-of-concept experiment, we demonstrate measured polarization extinction ratios beyond 11 dB over a bandwidth of 350 nm at near-infrared (NIR) telecommunication wavelengths around 1550 nm. We demonstrate the viability of the device by receiving a 640 Gbit/s dual-polarization data signal using 16-state quadrature amplitude modulation (16QAM), without any measurable optical-signal-to-noise-ratio (OSNR) penalty compared to a commercial PBS.Comment: 11 pages and 4 figures in the main part + 7 pages and 4 figures in the supplementar

3D-Printed Scanning-Probe Microscopes with Integrated Optical Actuation and Read-Out

Scanning‐probe microscopy (SPM) is the method of choice for high‐resolution imaging of surfaces in science and industry. However, SPM systems are still considered as rather complex and costly scientific instruments, realized by delicate combinations of microscopic cantilevers, nanoscopic tips, and macroscopic read‐out units that require high‐precision alignment prior to use. This study introduces a concept of ultra‐compact SPM engines that combine cantilevers, tips, and a wide variety of actuator and read‐out elements into one single monolithic structure. The devices are fabricated by multiphoton laser lithography as it is a particularly flexible and accurate additive nanofabrication technique. The resulting SPM engines are operated by optical actuation and read‐out without manual alignment of individual components. The viability of the concept is demonstrated in a series of experiments that range from atomic‐force microscopy engines offering atomic step height resolution, their operation in fluids, and to 3D printed scanning near‐field optical microscopy. The presented approach is amenable to wafer‐scale mass fabrication of SPM arrays and capable to unlock a wide range of novel applications that are inaccessible by current approaches to build SPMs