Realization of AlGaAs antidot arrays by pulsed laser interference gratings

AlGaAs antidot arrays with about 107 antidots are produced by single-shot interference processing with a pulsed high-power Nd:YAG laser system. We apply magnetotransport experiments and atomic force microscopy (AFM) to explore the electronic and geometric properties of the arrays. The size of the antidot arrays are 3 mm × 3 mm and the period varies from 400 to 1000 nm. The dots are elliptic or circular and have diameters ranging from 255 to 690 nm. The magnetotransport experiments are performed at 1.5 K in van der Pauw contact configuration. The laser structuring leaves the two dimensional electron density nearly unchanged but decreases the mobility by a factor of about 30. Several maxima are detected in the low magnetic field magnetoresistivity which are discussed based on the geometric data determined by AFM