Benefits of on-wafer calibration standards fabricated in membrane technology

In this work we compare on-wafer calibration standards fabricated in membrane technology with standards built in conventional thin-film technology. We perform this comparison by investigating the propagation of uncertainties in the geometry and material properties to the broadband electrical properties of the standards. For coplanar waveguides used as line standards the analysis based on Monte Carlo simulations demonstrates an up to tenfold reduction in uncertainty depending on the electromagnetic waveguide property we look at

Kolloquium Mikroproduktion und Abschlusskolloquium SFB 499 ; 11. - 12. Oktober 2011, Karlsruhe (KIT Scientific Reports ; 7591)

In diesem Tagungsband werden aktuelle Ergebnisse der angewandten Grundlagenforschung auf dem Gebiet der Mikroproduktion vorgestellt. Die dargestellten Arbeiten und Ergebnisse stammen vom SFB 499 "Mikrourformen", dem SFB 747 "Mikrokaltumformen", der FOR 702 "Maschinen-, Werkzeug- und Prozessentwicklung für neue Verfahren zur Herstellung von Mikrobauteilen über flüssige Phasen" und aus dem Umfeld des 2010 abgeschlossenen SFB 516 "Konstruktion und Fertigung aktiver Mikrosysteme"

Ground state hyperfine structures of 43K and 44K measured by atomic beam magnetic resonance coupled with laser optical pumping

The ground state hyperfine structures of 43 K and 44K have been measured by an atomic beam magnetic resonance method in which the atoms are spin-polarized by laser optical pumping. The spectroscopic results are : Δv43( 2S1/2) = 192.648 4 (30) MHz and Δν44( 2S1/2) = - 946.718 (3) MHz. The sensitivity of our method is compared to the one achieved in classical ABMR apparatus

Rapid Prototyping of Micromechanical Devices Using a Q-Switched Nd:YAG Laser with Optional Frequency Doubling

A laser technology for fabricating microelectromechanical components has been developed. Using a Q-switched Nd:YAG laser with optional frequency doubling, bulk silicon wafers, silicon membranes, and thin-films deposited on different substrates are micromachined without using lithography-based technologies. Applications are for example rapid prototyping or small lot production of micromechanical devices