Rapid Prototyping of Micromechanical Devices Using a Q-Switched Nd:YAG Laser with Optional Frequency Doubling

Abstract

A laser technology for fabricating microelectromechanical components has been developed. Using a Q-switched Nd:YAG laser with optional frequency doubling, bulk silicon wafers, silicon membranes, and thin-films deposited on different substrates are micromachined without using lithography-based technologies. Applications are for example rapid prototyping or small lot production of micromechanical devices