New Formulation for Finite Element Modeling Electrostatically DrivenMicroelectromechanical Systems

The increased complexity and precision requirements of microelectromechanical systems(MEMS) have brought about the need to develop more reliable and accurate MEMS simulation tools. To better capture the physical behavior encountered, several finite elementanalysis techniques for modeling electrostatic and structural coupling in MEMS devices havebeen developed in this project. Using the principle of virtual work and an approximationfor capacitance, a new 2-D lumped transducer element for the static analysis of MEMS hasbeen developed. This new transducer element is compatible to 2-D structural and beamelements. A novel strongly coupled 3-D transducer formulation has also been developed tomodel MEMS devices with dominant fringing electrostatic fields. The transducer is compatible with both structural and electrostatic solid elements, which allows for modeling complexdevices. Through innovative internal morphing capabilities and exact element integrationthe 3-D transducer element is one of the most powerful coupled field FE analysis tools available. To verify the accuracy and effectiveness of both the 2-D and 3-D transducer elements a series of benchmark analyses were conducted. More specifically, the numerically predicted results for the misalignment of lateral combdrive fingers were compared to available analytical and modeling techniques. Electrostatic uncoupled 2-D and 3-D finite element models werealso used to perform energy computations during misalignment. Finally, a stability analysisof misaligned combdrive was performed using a coupled 2-D finite element approach. Theanalytical and numerical results were compared and found to vary due to fringing fields

Leveraging a Community of Practice to Build Faculty Resilience and Support Innovations in Teaching during a Time of Crisis

Amidst the COVID-19 upheaval to higher education, a grantor-led community of practice (CoP) supported faculty members to deliver an innovative, sustainability-oriented entrepreneurship curriculum and maintain resiliency as teaching professionals. This paper discusses how through engagement in the CoP, this group of faculty from across engineering, material science, business, and geosciences demonstrated resilience, adaptability, and pivoted to create curriculum for students in real time, as the events of the COVID-19 pandemic unfolded throughout 2020 and impacted face-to-face learning. The role the community of practice played in sustaining and supporting the faculty will be discussed. Case studies from faculty members will demonstrate how sustainable design and social responsibility can be integrated into entrepreneurially focused classes and student experiences across disciplines. The primary contribution of this research is the important role that an emergent learning framework can play in informing how best to optimize the CoP format and approach in a way that leverages and addresses individual member strengths, challenges, and experiences, and supports the needs of CoP members during a time of significant change and crisi

Evolution of the Soot-Particle Size Distribution Function in the Cylinder and Exhaust System of Piston Engines: Simulation

A computational tool for simulating the temporal evolution of the soot-particle size distribution function (SDF) in the internal combustion engine (ICE) and in the attached exhaust pipe is developed and tested against available experimental data on the soot-particle SDF at the outlet of the exhaust system. Firstly, a database of soot particle properties (particle mean diameter, dispersion, total particle number density vs. time for different fuels, fuel-to-air equivalence ratios, temperatures, pressures, and exhaust gas recirculation) is developed based on the thoroughly validated detailed model of soot formation under ICE conditions. The database is organized in the form of look-up tables. Secondly, the soot-particle SDF in the database is approximated using the log-normal SDF, which is directly used in the multidimensional calculations of the ICE operation process. Thirdly, the coagulation model of soot particles is developed, which includes three coagulation mechanisms: Brownian, turbulent–kinetic, and turbulent–diffusion. This model is applied for simulating the evolution of the soot-particle SDF in the exhaust pipe after opening the exhaust valve. Calculations show that the coagulation process of soot particles in the exhaust pipe has a significant effect on the mean size of particles at the outlet of the exhaust system (the mean particle diameter can increase by almost an order of magnitude), and the dominant mechanism of particle coagulation in the exhaust system of a diesel engine is the Brownian mechanism. The objective, approach, and obtained results are the novel features of the study

Low-Damage Reactive Ion Etching of Nanoplasmonic Waveguides with Ultrathin Noble Metal Films

Nanoplasmonic waveguides utilizing surface plasmon polaritons (SPPs) propagation have been investigated for more than 15 years and are now well understood. Many researchers make their efforts to find the best ways of using light and overcoming the speed limit of integrated circuits by means of SPPs. Here, we introduce the simulation results and fabrication technology of dielectric-metal-dielectric long-range nanoplasmonic waveguides, which consists of a multilayer stack based on ultrathin noble metals in between alumina thin films. Various waveguide topologies are simulated to optimize all the geometric and multilayer stack parameters. We demonstrate the calculated propagation length of Lprop = 0.27 mm at the 785 nm wavelength for the Al2O3/Ag/Al2O3 waveguides. In addition, we numerically show the possibility to eliminate signal cross-talks (less than 0.01%) between two crossed waveguides. One of the key technology issues of such waveguides’ nanofabrication is a dry, low-damage-etching of a multilayer stack with extremely sensitive ultrathin metals. In this paper, we propose the fabrication process flow, which provides both dry etching of Al2O3/Au(Ag)/Al2O3 waveguides nanostructures with high aspect ratios and non-damage ultrathin metal films patterning. We believe that the proposed design and fabrication process flow provides new opportunities in next-generation photonic interconnects, plasmonic nanocircuitry, quantum optics and biosensors