CORE
🇺🇦
make metadata, not war
Services
Services overview
Explore all CORE services
Access to raw data
API
Dataset
FastSync
Content discovery
Recommender
Discovery
OAI identifiers
OAI Resolver
Managing content
Dashboard
Bespoke contracts
Consultancy services
Support us
Support us
Membership
Sponsorship
Community governance
Advisory Board
Board of supporters
Research network
About
About us
Our mission
Team
Blog
FAQs
Contact us
Filters
2 research outputs found
Electrochemical characterization of ruthenium dissolution and chemical mechanical polishing in hydrogen peroxide based slurries
Author
Amanapu
Cheng
+30 more
Chou
Cui
Cui
Damayanti
Du
Eom
Hussin
Jiang
Kim
Kim
Krishnan
Manivannan
Manivannan
Peethala
Peethala
Popkirov
Rock
Sadkowski
Shi
Shi
Steigerwald
Tourabi
Turk
Vasudevan
Venkatesh
Victoria
Victoria
Victoria
Yadav
Yadav
Publication venue
'Elsevier BV'
Publication date
01/01/2019
Field of study
No full text
Crossref
Synergetic Effect of 5-Methyl-1H-Benzotriazole and Sodium Dodecyl Benzene Sulfonate on CMP Performance of Ruthenium Barrier Layer in KIO 4
Author
Abu-Dalo
Al Zaharani
+59 more
Allam
Amanapu
Arancibia
Beamson
Chan
Chandrasekaran
Cheng
Cheng
Cheng
Cheng
Cheng
Cheng
Chou
Chyan
Cohen
Cui
Cui
Damayanti
Gao
Han
Hong
Hu
Hu
Jiang
Jiang
Jiang
Juodkazytė
Kellou-Kerkouche
Kotz
Krishnan
Li
Liu
Luo
Maruyama
Nishizawa
Peethala
Peethala
Prissanaroon
Qiang
Rao
Ryu
Sadkowski
Sagi
Shen
Shi
Song
Stojadinovic
Tamilmani
Tang
Tasic
Tasic
Turk
Varadarajan
Victoria
Victoria
Wang
Wu
Yadav
Yu
Publication venue
'The Electrochemical Society'
Publication date
Field of study
No full text
Crossref