Study on Low-temperature Silicon Wafer Bonding Technology

低温键合技术与其他键合技术相比，能够避免高温退火对器件造成的缺陷，在制作微机电系统（MEMS）器件、绝缘体上硅器件（SOI）以及压电和声光器件等领域有着广阔的应用前景。针对传统的低温键合技术不适合解决带活动结构晶圆的键合问题，论文提出了湿法活化与等离子体干法活化相结合的低温键合方法，以硅片的低温键合技术为研究对象，从理论研究、工艺研究以及质量评估三方面开展了如下研究： （1）从化学的角度分析了湿法活化、等离子体干法活化以及湿法活化与等离子体干法活化相结合的具体活化机制，并从表面能入手，对湿法活化与等离子体干法活化相结合的优点进行了分析。紧接着采用赫兹接触理论建立了键合模型，通过对模型的受力分...Comparing with others wafer direct bonding technology, low-temperature bonding technique can avoid the defect caused by high temperature annealing, it is widly used in many production processes of device, such as MEMS (Micro-Electro-Mechanical System), SOI, Piezoelectrics and acoustooptics. Aim at traditional low-temperature bonding technology is not suitable for a mobil wafer, a new low-temperatu...学位：工学硕士院系专业：物理与机电工程学院机电工程系_测试计量技术及仪器学号：1992009115245

《运输法公约草案》中目的港无人提货问题研究

在国际海上货物运输中,经常出现目的港无人提货的情形。在这种情形下,会令承运人遭受很大损失,而同时国际海运界对这个问题的关注度明显不够,缺乏有力的救济措施对承运人是有失公平的。本文结合联合国国际贸易法委员会制定的《运输法公约草案》中关于目的港无人提货的相关规定,全面分析了目的港无人提货问题,对草案中的相关规定做出了评价,并提出了对我国海商法的修改建议

干胶膜在微图案制作中的应用研究

采用干胶膜代替传统的光刻胶进行微图案的制备,并研究了工艺过程中的前烘时间、光刻时间、显影时间、显影液浓度等参数对微图案的影响。通过实验,研究发现当烘时间为30MIn、光刻时间为80S(光源为350W汞灯)、显影时间为90S、显影浓度为4%(显影液为nA2CO3溶液)时,可以成功制备出分辨率为50μM的图案线宽

外资优惠不能影响内资发展

根据2007年世界投资报告,中国是发展经济体中吸引外资数量最多的国家。外商投资一方面促进了我国经济的迅速发展,但另一方面,大量涌入的外资更唤起了我们对内资企业发展的担忧,我国对外资的优惠是否直接影响了内资的发展呢？本文从现行的外资优惠措施出发,力求在优惠外资和发展内资之间寻找平衡点,并提出可选择的路径

压电式喷射点胶阀位移放大机构的优化设计

采用有限元软件AnSyS对叠堆式压电陶瓷以及放大机构性能特性进行分析,研究了叠堆式压电陶瓷0~200V电压下的伸长特性;建立了放大机构的参数化模型,重点分析了放大机构位移输出特性,讨论了影响输出位移大小的各个结构参数。研究表明,三角块长度l0和压电陶瓷间距T对放大机构输出位移影响较大,是放大机构的主要参数。为点胶阀位移放大机构结构设计和优化提供了参考

利用快速傅里叶变换算法仿真光学相关器

光学相关器在图像模式识别中具有广泛的应用,包括匹配滤波相关器和联合变换相关器,两种相关器在应用中各有优势。文章通过利用数学软件MATlAb的快速傅里叶变换算法编程仿真两种光学相关器,得到实验结果的二维图像和三维图像,并比较两种相关器的识别效果

Design and Analysis of Elastic Component of Resonant Cylinder Pressure Sensor

利用有限元分析软件AnSyS对振筒式压力传感器弹性元件——谐振筒进行了动态特性仿真分析,建立了谐振筒的参数化模型,基于模态分析选定合适的工作振型,重点利用谐响应分析讨论了谐振筒品质因数的影响因素。研究表明,当谐振筒的基模态为(4,1)模态时,品质因数随谐振筒外半径、有效长度以及壁厚的增加而减小,而工作时作用于谐振筒的激励载荷只改变了谐振筒振幅大小,对品质因数无明显影响。通过瞬态动力学分析计算得到谐振筒的调节时间,证明了谐振筒具有较好的动态响应特性。为谐振筒的结构设计和优化提供了参考。Simulation and analysis on dynamic behavior of resonant cylinder which composed the pressure sensor as the elastic component are conducted using the finite element analysis software ANSYS.Parametric model is established.Based on the modal analysis,an appropriate mode for work is selected out.Factors affecting quality factor are discussed mainly through harmonic response analysis.Results indicate that,when the cylinder worked on(4,1) mode,quality factor would decreases as radius,effective length or thickness increase,while the force only had an influence on the amplitude of the vibration rather than the quality factor.Adjusting time is obtained by transient dynamic analysis,thus proving the rapidity of resonant cylinder.The study provides reference both for structure design and optimization

Preparation and biological safety of basic fibroblast growth factor/double-layered collagen composite

背景:胶原特殊的分子结构和生物活性有利于多种细胞黏附、增殖和分化,并可降解为新生组织提供足够空间。目的:制备一种复合负载碱性成纤维细胞生长因子的壳聚糖-肝素纳米粒子双层胶原基复合材料,并评价其生物安全性。方法:制备交联风干胶原膜和交联冻干胶原膜。将壳聚糖-肝素纳米粒滴于交联冻干胶原膜上,再将湿态交联风干胶原膜置于复合纳米粒子的交联冻干胶原膜上风干,即碱性成纤维细胞生长因子/双层胶原基复合材料。采用急性全身毒性试验、溶血试验、热原试验和细胞毒性试验评价其生物安全性。结果与结论:碱性成纤维细胞生长因子/双层胶原基复合材料为双层结构,一侧表面致密,另一侧疏松多孔。在其中间负载碱性成纤维细胞生长因子的壳聚糖-肝素纳米粒子呈不规则球形分布于胶原膜内侧面;急性全身毒性试验、热原试验、溶血试验均为阴性,细胞毒性为0级。说明碱性成纤维细胞生长因子/双层胶原基复合材料具有良好的生物安全性,对机体无毒,符合ISO10993-1评价标准。BACKGROUND: Collagen is a common used scaffold in tissue engineering, its specific molecular structure and biological activity are conducive to a variety of cell adhesion, proliferation and differentiation, and can speed up wound healing and degradation to provide sufficient space for new tissues.OBJECTIVE: To prepare a kind of inhomogeneous double layered collagen composite incorporated with basic fibroblast growth factor (bFGF) loaded chitosan-heparin (CS-Hep) nanoparticles, and to evaluate its biological safety.METHODS: The air-dried dense layer collagen membranes and freeze-dried loose layer collagen membrane were prepared respectively and then cross-linked by D-ribose (termed as CAM and CFM respectively).CS-Hep nanoparticles were prepared and then dropped on the surface of CFM.The wet CAM was laid on the surface of CFM with nanoparticles, and then air dried completely at 4 ℃.The obtained material was termed as bDM.Its physical and chemical properties were investigated.In addition, its bio-safety was also examined through acute systemic toxicity, pyrogen, hemolysis and cellular toxicity tests.RESULTS AND CONCLUSION: The bFGF/double-layered collagen composite was made up of double layers with one dense layer (CAM) and another loose layer (CFM).As part of bDM, CS-Hep nanopartiles with irregular global shape were aligned in the scope of D-period structure of the inner surface of CFM; the bFGF/double-layered collagen composite had no systemic acute toxicity, no cytotoxicity and pyrogen reactions as well as no hemolytic effect.The bFGF/double-layered collagen composite is prepared and found to have good biocompatibility and safety.Moreover, this material conforms to the ISO 10993-1, and can be used as a basic scaffold material in tissue engineering天津市科技支撑计划重点项目(08ZCKFSF02100);博士点基金项目(20101106110042)---

静电纺丝制备有序纳米纤维的研究进展

静电纺丝法是目前制备纳米纤维最直接最有效的方法,有序排列的纳米纤维具有独特的光、电、磁等性质,但是静电纺丝法所制备的纳米纤维杂乱无章的无纺结构限制了静电纺丝在许多领域的应用。文章介绍了静电纺丝的基本原理,综述了目前制备有序纳米纤维的一些有代表性的方法,并分析了各自的优缺点