A Laser-cleaning Laboratorial Equipment Consisting of Nd:YAG

介绍了一种由 Nd:YAG构成的激光除垢实验设备 ,分析了其主要的光学参数设计 ,对其功率密度进行了计算 ,判断其能满足激光清除硅片油脂的要求。This article introduces a laser-cleaning equipment insisting of Nd:YAG, analyzes its main optical parameter, computes its power density and estimates its requirement which can be fit for removing lipin from silica

Study on key fabrication process of micro F-P cavity tunable filter

采用表面加工工艺,AZ5214E光刻胶进行光刻并反转,磁控溅射Ni Cr合金,剥离出高度为2.3μm的金属桥墩,填充聚酰亚胺作为牺牲层,再在牺牲层上光刻、沉积金属形成金属桥面,在金属桥面的中心嵌入第二布拉格反射镜。采用O2等离子体刻蚀去除聚酰亚胺膜,制作成微法布里—珀罗(F-P)腔,不需要硅片键合,克服了传统F-P腔高度不够高、调谐范围有限、腔平整度不好以及对设备要求高的缺点,并且可以做出大阵列结构,易于探测器集成。着重对腔体关键工艺,即金属桥墩的Ni Cr剥离工艺进行研究,针对现有技术缺陷,提出解决办法。Using surface processing technology,AZ5214 E photoresist lithography and inverted,magnetron sputtering Ni Cr alloy,stripping out metal pier with height of 2. 3 μm,fill polyimide as sacrificial layer,and then on sacrificial layer photolithography,depositing metal to form metal bridge,in the center of metal bridge surface,embed the second Bragg reflector. Using O2 plasma etch and remove polyimide film,form cavity structure,without silicon bonding,overcome shortcoming that height is not high enough and the limited tuning range of traditional FP cavity,bad flatness of cavity and low demand of equipment,and it can make a large array structure,easy to integrate with the detector. Focus on key fabrication process that is Ni Cr metal stripping process,propose solutions based on existing technical defects.深圳市科技研发资金资助项目(JCYJ20140529163538765

Analysis and design of MEMS-based F-P cavity filter

通过对微光纤法布里-珀罗(F-P)腔滤波器工作原理的综合分析,确立了微F-P腔滤波器静电驱动腔长调谐方案。对可调谐滤波器的主体部分进行光学设计和; 分析,确立了反射镜的多层薄膜光学结构,并借助ANSYS有限元力电耦合分析,最终选择L型桥臂支撑的腔体结构,可以实现0.625; mum的调谐范围;保持桥面平行的能力很高,可实现高精度的滤波效果;结构稳固,能够抵抗制造时的残余应力。By comprehensive analysis on working principle of micro F-P cavity; filter,the optimum tuning scheme of micro F-P cavity filter is; established. The main part of the optical structure is designed, a; multilayer film structures of the mirror is established,and with the; help of ANSYS finite element electro-mechanical coupling analysis,L type; bridge arm supported cavity structure is finally established, the; structure can achieve a considerable range of tuning 0.625 mum;; relatively high fill factor,filter light leakage is avoided; the high; ability to keep parallel can achieve high precision filtering effect;; structural stability can resist the residual stress of manufacture.深圳市科技计

闽南文化研究国际笔谈会论点选载

2013年12月21日,由闽南师范大学闽南文化研究院主办的“2013闽南文化研究国际笔谈会“在国际学术交流中心召开。来自海峡两岸及日本、新加坡等国家的闽南文化研究方面的专家、学者二十余人出席了会议。会议围绕着闽南文化的内涵、外延及特征,闽南文化的当代价值与社会功能,闽南文化研究的理论与方法,闽南文化的跨文化阐释,闽南文化的世界性及其意义,闽南文化与两岸交流,闽南文化的生态保护,闽南文化学科建设与人才培养等议题展开了深入的研讨,言简意赅,探幽发微,对当下闽南文化理论研究势必产生积极的影响。本期节录专家们的精彩发言,以飨读者,也希望由此来带动和促进闽南文化研究的进一步升华

Research on Grinding Characteristics of Throw-Away Diamond Wheel

针对现有超大规模集成电路基板加工中存在的效率低问题 ,提出一种免除砂带张紧装置、消除砂带横向振动影响 ,达到柔性砂轮磨削效果的新型砂轮。新型砂轮结合了砂带磨削加工效率高、发热低的优点及砂轮磨削精度高和设备简单的条件 ,解决了集成电路基板高效磨削的问题。通过和树脂砂轮的对比实验表明 ,柔性砂轮对石英基板具有良好的磨削性

Optimization of Structure Parameters in Ultra-precision Plane Honing

超精密平面研磨中工件的加工精度受到研磨轮结构参数的影响。为了得到最高的加工精度和最合理的砂轮磨损曲线 ,必须研究研磨轮的结构参数。通过研究研磨轮的加工精度系数曲线和磨损系数曲线得出 :对于大量生产的研磨机床 ,研磨轮磨损是加工精度的主要影响因素 ,研磨轮应采用正三角形放射线结构 ;对于高精度小批量的研磨加工 ,加工精度系数是主要影响因素 ,研磨轮应采用反三角形放射线结构The structure parameters of honing wheel have effects on machining accuracy in ultra-precision plane honing. This paper put forward to the optimization of structure parameters. By calculating the machining accuracy coefficient and wear coefficient of triangle radial structure honing wheels, it is obvious that the suitable triangle radial structure honing wheel can improve machining accuracy of workpiece.国家 8 63基金资助项目 ( 80 42 416

洋务运动与中国近代科技

本书从科学史角度,对科技发展和社会进步之间的相互影响进行探索,并从此角度对洋务运动的历史意义进行评估和研究

STUDY ON COMPENSATION OF PARALLEL GRINDING NON-AXISYMMETRIC ASPHERIC SURFACES

【中文摘要】 针对非轴对称非球面的成形加工法柔性不足及球形砂轮加工法对工具和机械的要求太高的缺点,提出采用普通圆弧金刚石砂轮加工的平行磨削法。对于新方法加工中存在的加工误差问题,提出在非轴对称非球面加工中使用带倾角圆弧修整器及对主轴半径和副轴半径误差采用离线补偿的加工技术。通过理论分析和试验表明此方法可达到提高非轴对称非球面的加工精度的效果。 【英文摘要】 In accordance with the difficult problems of grinding non-axisymmetric aspheric surfaces with 5-axis CNC machining and mould grinding, a new parallel grinding method is put forward. To reduce the profile error of workpiece in parallel grinding, the new truing technology of tilting cup-truer, off-axis compensation in main axis and cross axis, and compensation of wheel wear are used in the machining program design. With grinding experiment and analyzing measured data, it is obvious that new compensating metho...2000年国际合作研究和福建省青年科技人才创新（2001T015）资助项

从荒漠肉苁蓉分离苯乙醇苷产生的废弃液中结晶甘露醇

荒漠肉苁蓉中分离苯乙醇苷的工艺中,大量甘露醇因难以与其它糖类分离而被一起丢弃。为了从这些废弃的糖溶液中分离纯化甘露醇,本文开发了一套甘露醇的结晶工艺。分别对影响结晶过程的3个主要因素(包括糖溶液的密度、结晶时间和结晶温度)进行了单因素实验。结果表明,适宜的操作参数为:糖溶液的密度为1.21~1.27 g/m L,结晶时间为24~30 d,结晶温度为-10~0℃。在单因素实验的基础上,采用响应曲面法对结晶的工艺参数进行优化。结果表明最优操作条件为:糖溶液的密度为1.24 g/m L,结晶时间为28 d,结晶温度为0℃。在此条件下,甘露醇的回收率和纯度分别可达70.04%和87.17%。以上结果表明,荒漠肉苁蓉中分离苯乙醇苷的工艺中,废弃的糖液可以用于回收甘露醇。本研究获得的模型可以用来优化甘露醇结晶过程。</p