Research of Dynamic Detection Optical Probe based on Principle of Differential Defocus

随着现代工业生产、航空航天等技术的发展，对光学、电子等器件表面形貌质量控制、关键机械零件表面的精确测量要求越来越高，要求测量传感器及其仪器的精度越来越高，结构也要求越来越小。由于现有测量精密物体表面形貌的方法存在着各种缺陷，在实际生产检测中，急需一种能测量非连续表面且集表面微观形貌和小尺寸测量于一体的实时、精密的非接触测量系统。 本课题采用差动离焦动态检测的方法，在光学测头的光路中引入调焦机构，达到自身调焦的目的。这种动态调焦光学测头解决了测量范围小的问题，且能实现实时、快速、精密的非接触测量，在实际生产的表面微观形貌和小尺寸检测中，可大大提高企业生产的自动化水平和生产效率。本文具体的研究内...With modern industrial production, aerospace and other technology development, the optical and electronic devices surface morphology quality control, key mechanical parts surface accurate measurement requirements more and more high, request the accuracy of measuring sensor and instrument is higher and higher, structure becomes smaller and smaller. Due to the existing methods of measuring precision...学位：工学硕士院系专业：物理与机电工程学院机电工程系_精密仪器及机械学号：1992008115295

Simulate and Analysis the Performance of the Adjust Focus Voice-coil Actuator in Measuring Ptical Path

对测量光路中调焦音圈电机的特性进行了分析,通过对音圈电机特性的仿真,定性分析音圈电机设计参数对电机特性的影响情况。从建立音圈电机的数学模型出发,利用仿真软件SIMulInk实现音圈电机的建模、特性仿真。得到仿真结果后,通过适当调整电机的设计参数,分析电机特性的变化。仿真结果表明,音圈电机动子质量、磁钢磁密等参数的变化都对电机的响应时间、平稳性、稳态误差有较大的影响。在原设计的基础上,可适当地增加电机动子的质量以及磁钢磁密来减小响应时间和稳态误差。这些分析结果为音圈电机的加工、测量基础光路中调焦功能的实现奠定了基础。In order to analyzing the actuator characteristics effected by the motor design parameters,a way of simulating the characteristics of voice coil actuator by simulink was introduced.From the established mathematical model of voice-coil actuator, the model of voltage and displacement, voltage and speed,force and displacement was established.The simulation software simulink was used to realize the modeling and simulation of the voice-coil actuator, to get the result of simulation.Then, changed the design parameters, such as the quality of the actuator, or the flux density and so on, to observe the change of the system performence.Analyzing Results showed that, the changes of actuator quality and flux density and other parameters have great influence on the response time, stability and steady-state error of the actuator.In order to reduce the response time and the steady-state error of the actuator, the quality of actuator and the flux density was increased based on the original design.These analysis results build the basis for the processing of voice-coil actuator and the realization of the function of adjust focus in optical path.福建省青年人才基金项目(2006F3125);福建省科技计划重点项目(2007H0034);福建省新世纪优秀人才支持计划资助项