Concentration Protile of Etchant Measured by Microelectrode Technique in the Process of Chemical Micromachining

利用微圆盘电极技术,测定了KBr、L-胱氨酸和硫酸组成的刻蚀溶液体系中Pt电极表面电化学氧化产生的刻蚀剂Br2浓度分布,为约束刻蚀剂层技术(CELT)中刻蚀体系的选择和优化提供更直观的依据.GaAs表面CELT微加工实验证明了用微圆盘电极测得的表面刻蚀剂的浓度分布趋势与微加工实验所得到的结果一致.A carbon-disk microelectrode was used to investigate the surface concentration profile of etchant Br2, which was electrogenerated on the Pt working electrode. The steady state reducing currents of Br2 at different distances away from the Pt electode was measured. The concentration profile was estimated from the current-distance variation curves as a function of different sampling times. Experimentally determined concentration profiles are in good agreement with those estimated from the microetching results. The microelectrode technique has offered a good method to choose suitable etching solution for chemical micromachining.国家高新技术发展规划(863项目)(2002AA404170);; 福建省自然科学基金计划资助项目(E0520001

金属Cu表面三维齿状微图形的复制加工——约束刻蚀剂层技术 (CELT)的应用

主要介绍了一种Cu的CELT加工的化学刻蚀体系和捕捉体系 ,并通过控制刻蚀时间、刻蚀电流、刻蚀剂浓度、捕捉剂浓度等实验参数和优化电化学模板的制作工艺 ,以规整的齿状结构为模板 ,在Cu的表面实现了三维微结构的复制加工 ,得到了与齿状结构模板互补的三维微结构 ,用SEM和AFM对实验结果进行了表征 ,表征结果证明约束刻蚀剂层技术在金属三维加工方面的可行性和潜在优势。金属Cu由于具有优良的导热导电性能以及很好的延展性 ,在微系统 (也称微机电系统 )中应用广泛 ,因此对Cu的刻蚀加工对微系统技术的发展具有重要的意义。约束刻蚀剂层技术 (ConfinedEtch antLayerTechnique简称CELT)作为一种新型的微加工技术[1] ,能够加工复制出复杂三维结构 ,到目前为止 ,该技术已成功应用于Si、GaAs等材料微结构的复制加工[2 ,3]

Concentration protile of etchant measured by microelectrode technique in the process of chemical micromachining

A carbon-disk microelectrode was used to investigate the surface concentration profile of etchant Br-2, which was electrogenerated on the Pt working electrode. The steady state reducing currents of Br-2 at different distances away from the Pt electode was measured. The concentration profile was estimated from the current-distance variation curves as a function of different sampling times. Experimentally determined concentration profiles are in good agreement with those estimated from the microetching results. The microelectrode technique has offered a good method to choose suitable etching solution for chemical micromachining

Numerical study of periodic flame flashback in a cavity-based scramjet combustor

The periodic flame flashback phenomenon in an ethylene-fueled cavity-based scramjet combustor was numerically investigated by a three-dimensional unsteady Reynolds-averaged Navier-Stokes solver with two-step kinetics. The air inflow stagnation temperature is 1225 K, and its Mach number is 2.6. Spectral analyses revealed the combustion oscillations with flame flashbacks maintained in the separated scramjet mode with the establishment/vanishment of flow separation near the fuel injector, differing from previous studies of flame flashbacks connected to the ramjet/scramjet mode transitions. A mechanism with four evolution stages was proposed to elucidate the flow-flame interaction. In stage I, a rapid flame flashback upstream and shock-train extension were caused by the high-temperature induced auto-ignition tendency of well-mixed unburned gas in the near-sidewall low-speed region. In stage II, the combustion-induced back pressure and shock train gradually achieved an aerodynamic balance. The combustion flow barely changed in stage III. Meanwhile, a simplified model suggested that the gradual temperature rises occurring upstream of the cavity and away from the sidewall were caused by spanwise heat conduction. The higher temperatures would cause upstream flame propagation with enhanced heat release due to auto-ignition. However, the enhanced heat release occurred mostly in the subsonic flow, resulting in pressure decreases according to one-dimensional flow equations. A smaller near-sidewall separation was produced by the lower back-pressures, which prompted the rapid flame recession downstream in stage IV. Moreover, a simplified flame-spreading model was proposed to illuminate the flame propagation nature. The comparison of flame speeds with theoretical estimations indicated that the current flame was in the regime of turbulent flame propagation, rather than the C-J detonation or deflagration speculated in previous studies

鱼体中谷胱甘肽对微囊藻毒素的解毒作用的初步研究

鱼体中谷胱甘肽对微囊藻毒素的解毒作用的初步研究张甬元，徐立红，周炳升，徐盈（中国科学院水生生物研究所，淡水生态与生物技术国家重点实验室，武汉４３００７２）原田健一（日本名城大学药学部，名古屋４６８）ＰＲＥＩＬＩＭＩＮＡＲＹＳＴＵＤＩＥＳＯＮＴＨＥＲＯ..