An Electrostatic Actuated MEMS Variable Capacitor

可变电容器能够广泛应用于跳频通讯及任何要求电容依需要而改变的场合。本文利用ANSYS软件进行仿真，并结合MEMS器件的特点进行优化，设计并制作了由MEMS工艺实现的微型的静电驱动的可变电容器件，通过实验测试证明此器件具有稳定的工作特性。本论文的主要研究工作有：1．分析几种驱动方法的原理，比较其优缺点，结合现有实验条件综合考虑，确定静电驱动方式。实践证明，微静电驱动技术是完全与硅材料、IC处理技术相一致的，便于集成化、一体化。2．以半导体器件电子学和微电子学为理论基础，设计可变电容器版图，设计工艺流程，确定最优工艺条件和最合适的制备方法。3．以集成电路工艺和部分成熟的MEMS工艺为工作基础，制作...MEMS variable capacitor can be applied widely in hopping frequency communication and any other occasions that capacitance is required to be adjusted in order to meet the demand. Simulation is done with ANSYS software, and together with characteristics of MEMS devices, optimization is adopted. I design and fabricate the micro-electrostatic actuated variable capacitive devices realized through MEMS ...学位：工学硕士院系专业：物理与机电工程学院机电工程系_测试计量技术及仪器学号：20022901

Study on sputtering process of tin oxide

【中文文摘】SnO2 是最早使用也是目前使用最广泛的一种气敏材料 ,使用该材料设计制作的气敏传感器具有许多优点。在简要介绍溅射镀膜的成膜过程和特点的基础上 ,着重介绍了SnO2 膜的制备流程 ,分析了功率和温度变化对成膜质量的影响 【英文文摘】SnO 2 is the one of gas sensitivity materials that are used the earliest and the most widely, gas sensitivity sensors made of this material have many advantages. Based on the simple introduction of the course of sputtering film plating and characteristic, the preparation flow is introduced in detail, the effects of power or temperature changing on the film quality are analyzed

分子马达的研究进展

本文对国内外分子马达的研究现状进行综述。并以生物中的关键酶ATP水解酶类(F0 F1 ATPase)为例 ,对其运动特点进行较详尽的描述 ,它是一类做圆周运动的旋转马达。同时还讨论了一些做直线运动的分子马达 ,如肌球蛋白 ,驱动蛋白等。并对分子马达的运动机理提出一些相应的观点 ,对分子马达的应用进行了展

Template Synthesis and UV-Vis Absorption Spectra of the Nanowire Arrays of Cadmium Chalcogenides

以多孔氧化铝为模板 ,用交流电分别通过含有相应的CdCl2 、ZnCl2 、单质S、Se等的二甲亚砜 (DMSO)溶液 ,沉积CdS、CdSe以及CdxZn1-xS半导体纳米线阵列并研究其紫外可见吸收光谱 .实验结果表明 ,当半导体纳米线的直径小于 2 5nm时 ,其吸收边相对于体相的吸收边产生蓝移 ,而且蓝移的幅度随着半导体纳米线直径的减小而增加 ,显示了明显的量子限域效应 .XU Shi_min, XUE Kuan_hong , KONG Jing_lin, SUN Dong_mei, FENG Yu_ying, LU Hai_yan (Dept. of Chem., Nanjing Normal Univ., Nanjing 210097, China) WANG Guang_hou (National Laboratory of Solid State Microstructures, Nanjing Univ., Nanjing 210093, China)The porous alumina membrane formed in the anodic oxidation of highly pure aluminum foil has attracted a great deal of attention in recent years [1] . It can be served as a desired template to prepare nanometer scale materials [2] due to its unique structure of discrete and cylindrical nanopores, paralleled one another, with the homogeneous size and distribution [3] . Chalcogenide semiconductors have promising prospect in the applications of photovoltaic [4] and photoconducting devices [5] and have been extensively exploited for many years. Olbright and his co_workers studied experimentally and theoretically the optical nonlinearties of CdS xSe 1-x _doped glass [6] ; Britt and Ferekides reported that the conversion efficiency in a solar cell of thin_film CdS/CdTe could be as high as 15.8% [7] . Here we report the fabrication and UV_Vis absorption spectra of CdS、CdSe and Cd xZn 1-x S nanowire arrays deposited into the template matrix of porous alumina. The diameters of these nanowires were varied from 10 nm to 50 nm in our experiments.作者联系地址：南京师范大学化学系!江苏南京210097,南京师范大学化学系!江苏南京210097,南京师范大学化学系!江苏南京210097,南京师范大学化学系!江苏南京210097,南京师范大学化学系!江苏南京210097,南京师范大学化学系!江苏南京210097,南京大学固体微结构国家重点实验室!江苏南京21009

Preparation Technologies of LPCVD Silicon Nitride Films

氮化硅(Si3N4)薄膜具有许多优良特性,在半导体、微电子和MEMS领域应用广泛.简要介绍了Si3N4膜的制备方法及CVD法制备的Si3N4薄膜的特性,详细介绍了低压化学气相淀积(LPCVD)氮化硅的工艺.通过调整炉温使批量生产的淀积膜的均匀性达到技术要求.Silicon nitride (Si_3N_4)films are widely used in the fields of semiconductor,microelectronics and MEMS with their excellent advantages.This paper introduced the preparation technologies and properties of CVD for Si_3N_4 films and the process of low pressure chemical vapor deposition(LPCVD).The thickness uniformity of films has been demonstrated on a batch LPCVD furnace platform by adjusting the process temperature

RV减速器ANSYS参数化建模系统开发与应用

针对RV减速器的结构特点,定义了几何特征参数,并结合摆线轮、渐开线齿轮的齿廓方程,采用ANSYS参数化设计语言APDL与用户界面设计语言UIDL对ANSYS进行二次开发,实现了RV减速器整机的参数化建模,并采用Pro/E进行运动学仿真对该模型进行了验证;对RV-40E的参数化模型进行了参数化的模态分析,结果与试验模态达到了很好的吻合程度;通过改变模型参数,研究了RV减速器1阶固有频率的影响因素,得到了关键参数的影响曲线,为动态特性的提高提供了依据。提出的参数化建模方法,减少了对RV减速器进行各种有限元分析时所需的建模工作量,避免了重复建模,极大地提高了有限元分析的效率。其在模态分析方面的应用也为ANSYS平台下RV减速器的参数化建模与有限元分析一体化奠定了基础

RV减速器工作频率理论计算与ADAMS仿真

根据RV减速器的传动原理和工作方式,基于行星齿轮传动比计算的转化机构法和轴承滚动体纯滚动假设,导出了RV减速器各工作频率的通用理论计算公式;并以RV-40E减速器为例,采用ADAMS软件进行仿真验算。结果表明,理论公式计算值与仿真值的最大误差为4.19%;曲拐轴承滚动体自转转速较高,增大曲拐轴承滚动体直径,可有效降低其自转转速,有利于提高寿命。研究结果为RV减速器各传动零件和滚动轴承部件旋转频率的计算提供了一种通用、快捷和有效的计算方法