Non-Uniformity of Wafer and Pad in CMP: Kinematic Aspects of View

[[abstract]]In this paper, we analyze the non-uniformity of sliding distance on both wafer and polishing pad from kinematic point of view. Using the Fourier series expansion, we can show that in steady state the non-uniformity is determined by the ratio between rotary speeds of platen and wafer carrier (m), and the ratio of wafer radius to the distance between the center of platen and wafer (Rc/d). In general, the non-uniformity of wafer increases with |m| and Rc/d. An important observation for polishing pad is that in two particular ranges of the ratio m, the larger Rc/d produces the smaller non-uniformity. Then a ring type polishing pad is proposed for the purpose of improving the non-uniformity of both wafer and pad. However, it turns out that the result is much worse than we expected.[[conferencetype]]國際[[conferencedate]]20050608~20050610[[iscallforpapers]]Y[[conferencelocation]]Portland, US

The capture region of a general 3D TPN guidance law for missile and target with limited maneuverability

[[abstract]]A method is used to analyze the capture area of general 3D true proportional navigation (TPN) guidance laws. With the aid of the orthogonal by not orthonormal modified polar coordinate (MPC), and three modified polar variables (MPVs), the expression of relative dynamics between target and missile becomes simple, and no trigonometric functions are involved, which makes possible the analysis of capture region for both target and missile with limited maneuverability. It can be shown that the determination of the desired capture area requires only the first two of the MPVs no matter whether the maneuverability of missile and target are limited or not. The boundary of the capture region on the two MPVs phase plane can be shown is composed of stable, unstable manifolds and a particular trajectory which will be indicated in the context. For the case of unlimited missile acceleration and measurable target acceleration, the capture region can be found analytically, while for the other cases, the capture region can be obtained graphically[[notice]]20130320格式已修正by陸桂英[[conferencetype]]國際[[conferencedate]]20010625~20010627[[iscallforpapers]]Y[[conferencelocation]]Arlington, US

[[alternative]]Generation of Random Road Profiles

[[abstract]]In this work we review two of the most commonly adopted methods, namely shaping filter and sinusoidal approximation, for generating one-dimensional random road profiles, that are used in the simulation of a quarter car (or half car) vehicle suspension system control. For the shaping filter method, it is found that the time constant of the first order transfer function generating the road profile is independent of the grade of road. While for the sinusoidal approximation method, a detail derivation of the amplitude of each sinusoidal function is re-derived for completeness.[[sponsorship]]中國機械工程學會[[conferencetype]]國內[[conferencedate]]20071123~20071124[[booktype]]紙本[[iscallforpapers]]Y[[conferencelocation]]臺北市, 臺

[[alternative]]Semi-Active Augmented H/sub inf/ Control of Vehicle Suspension Systems with MR Dampers

[[abstract]]In this work, we extend and study the implementation of H/sub inf/ output feedback controller to a vehicle suspension system with magnetorheological fluid (MRF) damper. In the closed-loop suspension system, the H/sub inf/ controller serves as a system controller to provide the necessary robustness, however, in most of the cases, the controller gain is high. This makes the damper controller, which issues input currents to control the MR damper, hard to track the desired damping force. To this end, an augmented filter is proposed to remedy this issue. Although in the augmented filter, full system states are required in one of the term, while through numerical experiments, we found that this term can be ignored without sacrificing noticeable performance.[[sponsorship]]中國機械工程學會[[conferencetype]]國內[[conferencedate]]20071123~20071124[[booktype]]紙本[[iscallforpapers]]Y[[conferencelocation]]臺北市, 臺

[[alternative]]A Research of Rotation Invariant Terrain Matching Method

[[abstract]]本研究使用二維數位影像地圖來做實測影像與參考影像之間的比對, 並且正確的找出實測影像在參考影像上的位置。主要任務是考慮此辨認法之抗旋轉(Rotation Invariant)特性, 作法分為兩個部分:第一, 先在頻域上做粗尋, 在影像上取一近似圓形的面積並分別對此近似圓面積的半徑R與角度.THETA.兩個方向來抽取影像像素值(Pixels)存成一個N*M的二維陣列, 並對此二維陣列做快速傅立葉轉換(FFT)得到影像的特徵, 用此特徵來比對找出目標粗略位置。第二, 在粗尋所找出的影像範圍中, 回到時域上做細尋比對。以本方法在頻域上處理比對可以提供具抗旋轉特性的影像辨識能力, 加上粗細格搜尋法的辨識概念, 是為了增進處理速度。希望本抗旋轉地貌影像比對法能夠在預先設定的巡航路徑中途點提供正確位置參考訊號給飛行載具來修正位置誤差。[[abstract]]This paper provides an anti-rotation terrain matching method. We used two-dimension digital terrain image to perform terrain matching and locate the correct position of the sensed image. This method can be divided into two steps. First, use a two-dimensional Fast Fourier Transform(2DFFT) to do image matching in frequency domain, and find the proper area that contains the sensed image. Second, return to time domain to do an image matching in the previous chosen area. Process in frequency domain can provide better anti-rotation matching ability. We expect this method can provide flying vehicles a way to correct position error.[[sponsorship]]中國航空太空學會; 逢甲大學; 經濟部航太工業發展推動小組[[conferencetype]]國內[[conferencedate]]19981212~19981212[[booktype]]紙本[[iscallforpapers]]Y[[conferencelocation]]臺中, 臺

[[alternative]]臉部辨識-支撐向量機法

[[abstract]]人臉的偵測和辨識在錄影監視、個人安全及人臉影像資料庫管理中扮演重要的角色。本論文中臉部辨識的核心採用支撐向量機法(SVM)。支撐向量機法不需像幾何關係法和型態法設定許多關係條件，即可進行臉部辨。支撐向量機法在處理分類問題時，不需建立知識資料庫(如模糊理論中的規則資料庫)可將輸入資料有效分類，並獲得支撐向量(SV) 和邊界(Margin) 等資訊。拉格朗日支撐向量機(LSVM) 使用迭代法來提升計算速度。我們將眼睛和嘴有效的轉換成支撐向量機計算的格式，並分別使用拉格朗日支撐向量機計算眼睛和嘴的邊界做為辨識的依據。在本系統中，採用包含92張照片和31個不同的人CVL 臉部影像資料庫做系統實驗。[[abstract]]Human face detection and recognition plays an important role in application such as video surveillance, personal security and face database management. Support Vector Machines (SVM) is adopted for face recognition. SVM can handle classification problem effectively without establishing the prior knowledge database, and obtain support vector and related margin. To shorten the computing time, a modified version of SVM, namely Lagrangian support vector machine (LSVM) is applied here. An effective method to deal with the eyes and mouth region is proposed in this paper. We verify the correction rate of the utilize method via a database, CVL, that contains 91 images of 31 individuals.[[sponsorship]]淡江大學航空太空工程學系[[conferencetype]]兩岸[[conferencetkucampus]]淡水校園[[conferencedate]]20060314~20060315[[booktype]]紙本[[iscallforpapers]]Y[[conferencelocation]]臺北縣, 臺

[[alternative]]撓性旋轉軸之降階有限元素-傳遞矩陣法

[[abstract]]本文主要目的在於使用有限元素與降階傳遞矩陣法來分析撓性旋轉軸。此方法的優點在於計算過程中所用來計算撓性旋轉軸振動頻率的矩陣其最大維度僅有四乘四，成功地減少計算機記憶體的使用。此外，在建立撓性旋轉系統運動方程時，考慮了轉動慣性力矩、迴轉力要巨效應與剪應力與應變的效應。當撓性旋轉系統複雜性提高、所使用的節點數增加時，有限元素與降階傳遞矩陣法仍然保有了與傳統有限元素法相同之精確度，並且計算機之記憶體的使用並不會隨著系統複雜性而增加。[[abstract]]In this work, Laplace transform is implemented to develop a reduced order finite element - transfer matrix method for analyzing a rotating flexible shaft. The advantage of the proposed method is that the largest size of the matrices involved in computing the critical speed of rotating shaft is only four by four, which reduces the memory requirement significantly. In addition, the effects of shear deformation, rotary inertia, gyroscopic moments and shear strain are all taken into account as well. The accuracy of the obtained results from this method is as high as that of traditional fi nite element method, which however inevitably demands computer memory intensively for increasing number of nodes.[[sponsorship]]淡江大學航空太空工程學系[[conferencetype]]兩岸[[conferencedate]]20060314~20060315[[booktype]]紙本[[iscallforpapers]]Y[[conferencelocation]]臺北縣, 臺

[[alternative]]The Analysis of Capture Area of Nonlinear Three-Dimensional Guidance Laws Using Phase Plane Method in Modified Polar Coordinate

[[abstract]]本文提出三維空間導引律通式，並利用相位法在修正的極座標下成功的分析其相關之目標物捕捉條件。一般在導引律方面之論文皆需假設小量瞄準誤差，或其結果僅能適用於二維空間之情況，然本文所提方法則無此限制。本方法可直接推展至目標物逃逸，但無法得知其加速度時，其捕捉條件之分析。另外對系統可觀性亦做了所需充分條件之探討。[[abstract]]In this paper, we presents the general three-dimensional guidance law. With the aid of the modified polar coordinate, the expression of relative dynamics between target and missile becomes simple, and the constructed guidance law is intuitive and naive. Furthermore, a phase plane method is used to analyze the capture condition of the corresponding guidance law. The result is not restricted to time -invariant navigation constant. For a nonmaneuvering target or a maneuvering target but with known acceleration, it can be seen that only two of the state vectors are related to the intercept condition. The corresponding observability is also examined.[[sponsorship]]中正理工學院; 中國航空太空學會; 中華民國燃燒學會[[conferencetype]]國內[[conferencedate]]19991204~19991204[[booktype]]紙本[[iscallforpapers]]Y[[conferencelocation]]桃園縣, 臺

Frequency Responses of Wire Rope Isolators

[[abstract]]In this work, both first harmonic and multiharmonic method are implemented to estimate the steady state response of wire rope isolators which is subject to arbitrary periodic excitation. First harmonic method is simple to implement in the sense of computer coding. In addition, when both frequency- and amplitude-controlled algorithms are formulated and are alternatively implemented, we would be able to obtain complete frequency-response curves including unstable solutions. While to determine the super harmonic resonant frequencies in the steady state, we resort to the discrete Fourier series (multi-harmonic) method. Finally, Galerkin/Levenberg-Marquardt Method is utilized to solve for a related optimization problem for those Fourier coefficients. Several numerical examples were examined to demonstrate the usage of these two methods.[[sponsorship]]中華民國力學學會[[notice]]20130320格式已修正by陸桂英[[conferencetype]]國內[[conferencedate]]20061215~20061216[[booktype]]紙本[[iscallforpapers]]Y[[conferencelocation]]臺北市, 臺

An Investigation on Mathematical Models of Wire Rope Isolators

[[abstract]]Vibration isolation systems using helical wire rope isolators are known to be highly effective in controlling both shock and vibration and have been used in numerous space and military applications. For damping response, the force displacement relationship of a wire rope isolator is highly nonlinear and history-dependent. For satisfactory analysis of such behavior, it is important to be able to characterize and to model the phenomenon of hysteresis accurately. Both Tinker and Bouc-Wen models that had been proposed for response studies of wire rope isolators are examined in this paper. For helical type wire-rope isolator Bouc-Wen's model, compared with Tinker's model, predicts much more intimate behavior as observed in experiment datum.[[sponsorship]]中華民國力學學會[[conferencetype]]國內[[conferencedate]]20061215~20061216[[booktype]]紙本[[iscallforpapers]]Y[[conferencelocation]]臺北市, 臺