50 research outputs found

    Sensor-Based Monitoring and Inspection of Surface Morphology in Ultraprecision Manufacturing Processes

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    This research proposes approaches for monitoring and inspection of surface morphology with respect to two ultraprecision/nanomanufacturing processes, namely, ultraprecision machining (UPM) and chemical mechanical planarization (CMP). The methods illustrated in this dissertation are motivated from the compelling need for in situ process monitoring in nanomanufacturing and invoke concepts from diverse scientific backgrounds, such as artificial neural networks, Bayesian learning, and algebraic graph theory. From an engineering perspective, this work has the following contributions:1. A combined neural network and Bayesian learning approach for early detection of UPM process anomalies by integrating data from multiple heterogeneous in situ sensors (force, vibration, and acoustic emission) is developed. The approach captures process drifts in UPM of aluminum 6061 discs within 15 milliseconds of their inception and is therefore valuable for minimizing yield losses.2. CMP process dynamics are mathematically represented using a deterministic multi-scale hierarchical nonlinear differential equation model. This process-machine inter-action (PMI) model is evocative of the various physio-mechanical aspects in CMP and closely emulates experimentally acquired vibration signal patterns, including complex nonlinear dynamics manifest in the process. By combining the PMI model predictions with features gathered from wirelessly acquired CMP vibration signal patterns, CMP process anomalies, such as pad wear, and drifts in polishing were identified in their nascent stage with high fidelity (R2 ~ 75%).3. An algebraic graph theoretic approach for quantifying nano-surface morphology from optical micrograph images is developed. The approach enables a parsimonious representation of the topological relationships between heterogeneous nano-surface fea-tures, which are enshrined in graph theoretic entities, namely, the similarity, degree, and Laplacian matrices. Topological invariant measures (e.g., Fiedler number, Kirchoff index) extracted from these matrices are shown to be sensitive to evolving nano-surface morphology. For instance, we observed that prominent nanoscale morphological changes on CMP processed Cu wafers, although discernible visually, could not be tractably quantified using statistical metrology parameters, such as arithmetic average roughness (Sa), root mean square roughness (Sq), etc. In contrast, CMP induced nanoscale surface variations were captured on invoking graph theoretic topological invariants. Consequently, the graph theoretic approach can enable timely, non-contact, and in situ metrology of semiconductor wafers by obviating the need for reticent profile mapping techniques (e.g., AFM, SEM, etc.), and thereby prevent the propagation of yield losses over long production runs.Industrial Engineering & Managemen

    An improved deep learning model for online tool condition monitoring using output power signals

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    Copyright © 2020 Lang Dai et al. Something like normal functionality of tools in a manufacturing process is typically designed to ensure reliability, where fast and accurate identification of tool abnormal operation plays a vital role in intelligent manufacturing. In this study, a novel method is proposed to assess the cutting tool condition, which consists of a convolutional neural network with wider first-layer kernels (W-CONV), and long short-term memory (LSTM). The analysis benefits from the use of output power signals from the cutting tool, since they can be obtained easily and efficiently, enabling the proposed method to be applicable in practical operation for online condition monitoring. Moreover, effectiveness of the proposed method is investigated, using test data from cutting tools at various tool wear conditions. Results demonstrate that with the proposed method, tool wear condition can be identified accurately and efficiently. Furthermore, with test data collected at cutting tools with different sizes, the robustness of the proposed method can be further clarified

    Smart-Building Applications:Deep Learning-Based, Real-Time Load Monitoring

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    EUSPEN : proceedings of the 3rd international conference, May 26-30, 2002, Eindhoven, The Netherlands

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    TOWARD INTELLIGENT WELDING BY BUILDING ITS DIGITAL TWIN

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    To meet the increasing requirements for production on individualization, efficiency and quality, traditional manufacturing processes are evolving to smart manufacturing with the support from the information technology advancements including cyber-physical systems (CPS), Internet of Things (IoT), big industrial data, and artificial intelligence (AI). The pre-requirement for integrating with these advanced information technologies is to digitalize manufacturing processes such that they can be analyzed, controlled, and interacted with other digitalized components. Digital twin is developed as a general framework to do that by building the digital replicas for the physical entities. This work takes welding manufacturing as the case study to accelerate its transition to intelligent welding by building its digital twin and contributes to digital twin in the following two aspects (1) increasing the information analysis and reasoning ability by integrating deep learning; (2) enhancing the human user operative ability to physical welding manufacturing via digital twins by integrating human-robot interaction (HRI). Firstly, a digital twin of pulsed gas tungsten arc welding (GTAW-P) is developed by integrating deep learning to offer the strong feature extraction and analysis ability. In such a system, the direct information including weld pool images, arc images, welding current and arc voltage is collected by cameras and arc sensors. The undirect information determining the welding quality, i.e., weld joint top-side bead width (TSBW) and back-side bead width (BSBW), is computed by a traditional image processing method and a deep convolutional neural network (CNN) respectively. Based on that, the weld joint geometrical size is controlled to meet the quality requirement in various welding conditions. In the meantime, this developed digital twin is visualized to offer a graphical user interface (GUI) to human users for their effective and intuitive perception to physical welding processes. Secondly, in order to enhance the human operative ability to the physical welding processes via digital twins, HRI is integrated taking virtual reality (VR) as the interface which could transmit the information bidirectionally i.e., transmitting the human commends to welding robots and visualizing the digital twin to human users. Six welders, skilled and unskilled, tested this system by completing the same welding job but demonstrate different patterns and resulted welding qualities. To differentiate their skill levels (skilled or unskilled) from their demonstrated operations, a data-driven approach, FFT-PCA-SVM as a combination of fast Fourier transform (FFT), principal component analysis (PCA), and support vector machine (SVM) is developed and demonstrates the 94.44% classification accuracy. The robots can also work as an assistant to help the human welders to complete the welding tasks by recognizing and executing the intended welding operations. This is done by a developed human intention recognition algorithm based on hidden Markov model (HMM) and the welding experiments show that developed robot-assisted welding can help to improve welding quality. To further take the advantages of the robots i.e., movement accuracy and stability, the role of the robot upgrades to be a collaborator from an assistant to complete a subtask independently i.e., torch weaving and automatic seam tracking in weaving GTAW. The other subtask i.e., welding torch moving along the weld seam is completed by the human users who can adjust the travel speed to control the heat input and ensure the good welding quality. By doing that, the advantages of humans (intelligence) and robots (accuracy and stability) are combined together under this human-robot collaboration framework. The developed digital twin for welding manufacturing helps to promote the next-generation intelligent welding and can be applied in other similar manufacturing processes easily after small modifications including painting, spraying and additive manufacturing
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