Power-Scavenging MEMS Robots

This thesis includes the design, modeling, and testing of novel, power-scavenging, biologically inspired MEMS microrobots. Over one hundred 500-μm and 990-μm microrobots with two, four, and eight wings were designed, fabricated, characterized. These microrobots constitute the smallest documented attempt at powered flight. Each microrobot wing is comprised of downward-deflecting, laser-powered thermal actuators made of gold and polysilicon; the microrobots were fabricated in PolyMUMPs® (Polysilicon Multi-User MEMS Processes). Characterization results of the microrobots illustrate how wing-tip deflection can be maximized by optimizing the gold-topolysilicon ratio as well as the dimensions of the actuator-wings. From these results, an optimum actuator-wing configuration was identified. It also was determined that the actuator-wing configuration with maximum deflection and surface area yet minimum mass had the greatest lift-to-weight ratio. Powered testing results showed that the microrobots successfully scavenged power from a remote 660-nm laser. These microrobots also demonstrated rapid downward flapping, but none achieved flight. The results show that the microrobots were too heavy and lacked sufficient wing surface area. It was determined that a successfully flying microrobot can be achieved by adding a robust, light-weight material to the optimum actuator-wing configuration—similar to insect wings. The ultimate objective of the flying microrobot project is an autonomous, fully maneuverable flying microrobot that is capable of sensing and acting upon a target. Such a microrobot would be capable of precise lethality, accurate battle-damage assessment, and successful penetration of otherwise inaccessible targets

Concept, modeling and experimental characterization of the modulated friction inertial drive (MFID) locomotion principle:application to mobile microrobots

A mobile microrobot is defined as a robot with a size ranging from 1 in3 down to 100 µm3 and a motion range of at least several times the robot's length. Mobile microrobots have a great potential for a wide range of mid-term and long-term applications such as minimally invasive surgery, inspection, surveillance, monitoring and interaction with the microscale world. A systematic study of the state of the art of locomotion for mobile microrobots shows that there is a need for efficient locomotion solutions for mobile microrobots featuring several degrees of freedom (DOF). This thesis proposes and studies a new locomotion concept based on stepping motion considering a decoupling of the two essential functions of a locomotion principle: slip generation and slip variation. The proposed "Modulated Friction Inertial Drive" (MFID) principle is defined as a stepping locomotion principle in which slip is generated by the inertial effect of a symmetric, axial vibration, while the slip variation is obtained from an active modulation of the friction force. The decoupling of slip generation and slip variation also has lead to the introduction of the concept of a combination of on-board and off-board actuation. This concept allows for an optimal trade-off between robot simplicity and power consumption on the one hand and on-board motion control on the other hand. The stepping motion of a MFID actuator is studied in detail by means of simulation of a numeric model and experimental characterization of a linear MFID actuator. The experimental setup is driven by piezoelectric actuators that vibrate in axial direction in order to generate slip and in perpendicular direction in order to vary the contact force. After identification of the friction parameters a good match between simulation and experimental results is achieved. MFID motion velocity has shown to depend sinusoidally on the phase shift between axial and perpendicular vibration. Motion velocity also increases linearly with increasing vibration amplitudes and driving frequency. Two parameters characterizing the MFID stepping behavior have been introduced. The step efficiency ηstep expresses the efficiency with which the actuator is capable of transforming the axial vibration in net motion. The force ratio qF evaluates the ease with which slip is generated by comparing the maximum inertial force in axial direction to the minimum friction force. The suitability of the MFID principle for mobile microrobot locomotion has been demonstrated by the development and characterization of three locomotion modules with between 2 and 3 DOF. The microrobot prototypes are driven by piezoelectric and electrostatic comb drive actuators and feature a characteristic body length between 20 mm and 10 mm. Characterization results include fast locomotion velocities up to 3 mm/s for typical driving voltages of some tens of volts and driving frequencies ranging from some tens of Hz up to some kHz. Moreover, motion resolutions in the nanometer range and very low power consumption of some tens of µW have been demonstrated. The advantage of the concept of a combination of on-board and off-board actuation has been demonstrated by the on-board simplicity of two of the three prototypes. The prototypes have also demonstrated the major advantage of the MFID principle: resonance operation has shown to reduce the power consumption, reduce the driving voltage and allow for simple driving electronics. Finally, with the fabrication of 2 × 2 mm2 locomotion modules with 2 DOF, a first step towards the development of mm-sized mobile microrobots with on-board motion control is made

Miniaturized Thin-Film Piezoelectric Traveling Wave Ultrasonic Motor

For many small-scale systems, compact rotary actuators are highly attractive. Many current millimeter-scale motor technologies, such as electrostatic motors and electromagnetic motors, operate at high speeds (on the order of 105 RPM) but low torque, usually pico- or nano-newton-meters. In order to drive large loads at speeds closer to 100 to 1000 RPM, gearing would be required, which drastically increases system complexity and size. Electromagnetic motors, which are effective at the macro-scale, become less practical at the millimeter-scale due to unfavorable scaling of energy density and complex fabrication. Electrostatic micro-motors require approximately 100 V for operation and produce limited torque. Traveling wave ultrasonic motors (TWUM) can provide micro- to milli-newton-meters of torque at low speeds and fill a necessary place within the millimeter-scale rotary motor landscape. Using recent developments in high quality piezoelectric film deposition and microfabrication techniques, TWUM can be made an order of magnitude smaller than currently possible. The fabrication process for the TWUM is described within, with a focus on stator fabrication and the enabling fabrication methods developed for the manufacture of TWUM, including backside vapor-HF release, deep reactive ion etch footing release, and photoresist deep-trench refill. Design and characterization of the traveling wave stator component, both disc and ring are described. Disc stators, 1 to 3 mm in diameter, exhibited traveling waves up to 1 μm in out-of-plane amplitude with quality factors in air of 95. The design process for ring stators with mechanical impedance transformer tethers is presented. The tethers are designed to allow large motion at the stator perimeter, while tethering the stator to the anchored substrate. This mechanical impedance transformer tether allowed for an in increase in standing wave amplitude by over 100% compared to straight tethers. TWUM were demonstrated and characterized, and represent the smallest TWUM currently reported, at 2 to 3 mm in diameter and less than 1 mm thick. Motor performance characteristics are presented, with speeds exceeding 2000 RPM while consuming 4 mW of power at 10 V. These millimeter-scale motors have potential applications in fields such as fuzing, medical imaging, micro-robotics, and sensor steering and calibration

Microrobots for wafer scale microfactory: design fabrication integration and control.

Future assembly technologies will involve higher automation levels, in order to satisfy increased micro scale or nano scale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to micro-electronics and MEMS industries, but less so in nanotechnology. With the bloom of nanotechnology ever since the 1990s, newly designed products with new materials, coatings and nanoparticles are gradually entering everyone’s life, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than with top-down robotic assembly. This is due to considerations of volume handling of large quantities of components, and the high cost associated to top-down manipulation with the required precision. However, the bottom-up manufacturing methods have certain limitations, such as components need to have pre-define shapes and surface coatings, and the number of assembly components is limited to very few. For example, in the case of self-assembly of nano-cubes with origami design, post-assembly manipulation of cubes in large quantities and cost-efficiency is still challenging. In this thesis, we envision a new paradigm for nano scale assembly, realized with the help of a wafer-scale microfactory containing large numbers of MEMS microrobots. These robots will work together to enhance the throughput of the factory, while their cost will be reduced when compared to conventional nano positioners. To fulfill the microfactory vision, numerous challenges related to design, power, control and nanoscale task completion by these microrobots must be overcome. In this work, we study three types of microrobots for the microfactory: a world’s first laser-driven micrometer-size locomotor called ChevBot，a stationary millimeter-size robotic arm, called Solid Articulated Four Axes Microrobot (sAFAM), and a light-powered centimeter-size crawler microrobot called SolarPede. The ChevBot can perform autonomous navigation and positioning on a dry surface with the guidance of a laser beam. The sAFAM has been designed to perform nano positioning in four degrees of freedom, and nanoscale tasks such as indentation, and manipulation. And the SolarPede serves as a mobile workspace or transporter in the microfactory environment

DESIGN AND CONTROL OF A HUMMINGBIRD-SIZE FLAPPING WING MICRO AERIAL VEHICLE

Flying animals with flapping wings may best exemplify the astonishing ability of natural selection on design optimization. They evince extraordinary prowess to control their flight, while demonstrating rich repertoire of agile maneuvers. They remain surprisingly stable during hover and can make sharp turns in a split second. Characterized by high-frequency flapping wing motion, unsteady aerodynamics, and the ability to hover and perform fast maneuvers, insect-like flapping flight presents an extraordinary aerial locomotion strategy perfected at small size scales. Flapping Wing Micro Aerial Vehicles (FWMAVs) hold great promise in bridging the performance gap between engineered flying vehicles and their natural counterparts. They are perfect candidates for potential applications such as fast response robots in search and rescue, environmental friendly agents in precision agriculture, surveillance and intelligence gathering MAVs, and miniature nodes in sensor networks

NASA SBIR abstracts of 1990 phase 1 projects

The research objectives of the 280 projects placed under contract in the National Aeronautics and Space Administration (NASA) 1990 Small Business Innovation Research (SBIR) Phase 1 program are described. The basic document consists of edited, non-proprietary abstracts of the winning proposals submitted by small businesses in response to NASA's 1990 SBIR Phase 1 Program Solicitation. The abstracts are presented under the 15 technical topics within which Phase 1 proposals were solicited. Each project was assigned a sequential identifying number from 001 to 280, in order of its appearance in the body of the report. The document also includes Appendixes to provide additional information about the SBIR program and permit cross-reference in the 1990 Phase 1 projects by company name, location by state, principal investigator, NASA field center responsible for management of each project, and NASA contract number

Electropermanent magnetic connectors and actuators : devices and their application in programmable matter

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2010.Cataloged from PDF version of thesis.Includes bibliographical references (p. 199-206).Programmable matter is a digital material having computation, sensing, and actuation capabilities as continuous properties active over its whole extent. To make programmable matter economical to fabricate, we want to use electromagnetic direct drive, rather than clockwork, to actuate the particles. Previous attempts to fabricate small scale (below one centimeter) robotic systems with electromagnetic direct-drive have typically run into problems with insufficient force or torque, excessive power consumption and heat generation (for magnetic-drive systems), or high-voltage requirements, humidity sensitivity, and air breakdown. (for electrostatic-drive systems) The electropermanent magnet is a solid-state device whose external magnetic flux can be stably switched on and off by a discrete electrical pulse. Electropermanent magnets can provide low-power connection and actuation for programmable matter and other small-scale robotic systems. The first chapter covers the electropermanent magnet, its physics, scaling, fabrication, and our experimental device performance data. The second introduces the idea of electropermanent actuators, covers their fundamental limits and scaling, and shows prototype devices and performance measurements. The third chapter describes the smart pebbles system, which consists of 12-mm cubes that can form shapes by stochastic self-assembly and self-disassembly. The fourth chapter describes the millibot, a continuous chain of programmable matter which forms shapes by folding.by Ara Nerses Knaian.Ph.D

NASA SBIR abstracts of 1991 phase 1 projects

The objectives of 301 projects placed under contract by the Small Business Innovation Research (SBIR) program of the National Aeronautics and Space Administration (NASA) are described. These projects were selected competitively from among proposals submitted to NASA in response to the 1991 SBIR Program Solicitation. The basic document consists of edited, non-proprietary abstracts of the winning proposals submitted by small businesses. The abstracts are presented under the 15 technical topics within which Phase 1 proposals were solicited. Each project was assigned a sequential identifying number from 001 to 301, in order of its appearance in the body of the report. Appendixes to provide additional information about the SBIR program and permit cross-reference of the 1991 Phase 1 projects by company name, location by state, principal investigator, NASA Field Center responsible for management of each project, and NASA contract number are included